Device including PCM RF switch integrated with group III-V semiconductors

Patent metadata

Field	Value
Publication number	US-10916540-B2
Application number	US-201816173340-A
Country	US
Kind code	B2
Filing date	Oct 29, 2018
Priority date	Aug 14, 2018
Publication date	Feb 9, 2021
Grant date	Feb 9, 2021

Abstract

There are disclosed herein various implementations of a semiconductor device including a group III-V layer situated over a substrate, and a phase-change material (PCM) radio frequency (RF) switch situated over the group III-V layer. The PCM RF switch couples a group III-V transistor situated over the group III-V layer to one of an integrated passive element or another group III-V transistor situated over the group III-V layer. The PCM RF switch includes a heating element transverse to the PCM, the heating element underlying an active segment of the PCM. The PCM RF switch is configured to be electrically conductive when the active segment of the PCM is in a crystalline state, and to be electrically insulative when the active segment of the PCM is in an amorphous state.

First claim

The invention claimed is:

1. A method for using a substrate having a group III-V layer thereon, and a group III-V transistor formed over said group III-V layer, said method comprising:
forming a phase-change material (PCM) radio frequency (RF) switch over said group III-V layer;
coupling said PCM RF switch between said group III-V transistor and one of an integrated passive element situated over said group III-V layer or another group III-V transistor situated over said group III-V layer;
said PCM RF switch including a heating element transverse to said PCM, said heating element underlying an active segment of said PCM;
said PCM RF switch including a thermally conductive and electrically insulating material between said heating element and said PCM;
said PCM RF switch being configured to be electrically conductive when said active segment of said PCM is in a crystalline state, and to be electrically insulative when said active segment of said PCM is in an amorphous state.

2. The method of claim 1 , comprising forming said integrated passive element prior to forming said PCM RF switch.

3. The method of claim 1 , comprising forming said integrated passive element after forming said PCM RF switch.

4. The method of claim 1 , wherein said coupling said PCM RF switch between said group III-V transistor and said one of said integrated passive element situated over said group III-V layer or said another group III-V transistor situated over said group III-V layer is performed using through-substrate vias.

5. The method of claim 1 , wherein said PCM is selected from the group consisting of germanium telluride, germanium antimony telluride, and any other chalcogenide.

6. The method of claim 1 , wherein said heating element comprises at least one of tungsten (W), molybdenum (Mo), titanium (Ti), titanium tungsten (TiW), titanium nitride (TiN), tantalum (Ta), nickel chromium (NiCr), or nickel chromium silicon (NiCrSi).

7. The method of claim 1 , wherein said group III-V layer comprises a group III-V material selected from gallium arsenide (GaAs), aluminum gallium arsenide (AlGaAs), indium gallium arsenide (InGaAs), indium phosphide (InP), indium gallium nitride (InGaN), indium gallium phosphide (InGaP), gallium nitride (GaN), gallium phosphide (GaP), aluminum nitride (AlN), and aluminum gallium nitride (AlGaN).

8. The method of claim 1 , wherein said PCM RF switch interfaces a heat spreader comprising a thermally conductive material selected from the group consisting of aluminum nitride (AlN), gallium nitride (GaN), gallium phosphide (GaP), aluminum gallium nitride (AlGaN), and silicon carbide (SiC).

9. The method of claim 1 , wherein said integrated passive element is selected from the group consisting of a capacitor, a resistor, an inductor, and a transmission line.

10. A method for using a substrate having a group III-V layer thereon, a group III-V transistor formed over said group III-V layer, and an integrated passive element formed over said group III-V layer, said method comprising:
forming a phase-change material (PCM) radio frequency (RF) switch under said substrate;
coupling said PCM RF switch between said group III-V transistor and one of said integrated passive element situated over said group III-V layer or another group III-V transistor situated over said group III-V layer;
said PCM RF switch including a heating element transverse to said PCM, said heating element underlying an active segment of said PCM;
said PCM RF switch being configured to be electrically conductive when said active segment of said PCM is in a crystalline state, and to be electrically insulative when said active segment of said PCM is in an amorphous state.

11. The method of claim 10 , wherein said coupling said PCM RF switch between said group III-V transistor and said one of said integrated passive element situated over said group III-V layer or said another group III-V transistor situated over said group III-V layer is performed using through-substrate vias.

12. The method of claim 10 , wherein said PCM is selected from the group consisting of germanium telluride, germanium antimony telluride, and any other chalcogenide, and wherein said heating element comprises at least one of tungsten (W), molybdenum (Mo), titanium (Ti), titanium tungsten (TiW), titanium nitride (TiN), tantalum (Ta), nickel chromium (NiCr), or nickel chromium silicon (NiCrSi).

13. The method of claim 10 , wherein said group III-V layer comprises a group III-V material selected from gallium arsenide (GaAs), aluminum gallium arsenide (AlGaAs), indium gallium arsenide (InGaAs), indium phosphide (InP), indium gallium nitride (InGaN), indium gallium phosphide (InGaP), gallium nitride (GaN), gallium phosphide (GaP), aluminum nitride (AlN), and aluminum gallium nitride (AlGaN).

14. The method of claim 10 , wherein said PCM RF switch interfaces a heat spreader comprising a thermally conductive material selected from the group consisting of aluminum nitride (AlN), gallium nitride (GaN), aluminum gallium nitride (AlGaN), indium gallium nitride (InGaN), and silicon carbide (SiC).

15. A semiconductor device comprising:
a group III-V layer situated over a substrate;
a phase-change material (PCM) radio frequency (RF) switch situated over said group III-V layer;
said PCM RF switch coupling a group III-V transistor situated over said group III-V layer to one of an integrated passive element situated over said group III-V layer or another group III-V transistor situated over said group III-V layer;
said PCM RF switch including a heating element transverse to said PCM, said heating element underlying an active segment of said PCM;
said PCM RF switch including a thermally conductive and electrically insulating material between said heating element and said PCM;
said PCM RF switch being configured to be electrically conductive when said active segment of said PCM is in a crystalline state, and to be electrically insulative when said active segment of said PCM is in an amorphous state.

16. The semiconductor device of claim 15 , further comprising through-substrate vias for coupling said PCM RF switch with said group III-V transistor and said one of said integrated passive element situated over said group III-V layer or said another group III-V transistor situated over said group III-V layer.

17. The semiconductor device of claim 15 , wherein said PCM is selected from the group consisting of germanium telluride, germanium antimony telluride, and any other chalcogenide.

18. The semiconductor device of claim 15 , wherein said heating element comprises at least one of tungsten (W), molybdenum (Mo), titanium (Ti), titanium tungsten (TiW), titanium nitride (TiN), tantalum (Ta), nickel chromium (NiCr), or nickel chromium silicon (NiCrSi).

19. The semiconductor device of claim 15 , wherein said group III-V layer comprises a group III-V material selected from gallium arsenide (GaAs), aluminum gallium arsenide (AlGaAs), indium gallium arsenide (InGaAs), indium phosphide (InP), indium gallium nitride (InGaN), indium gallium phosphide (InGaP), gallium nitride (GaN), gallium phosphide (GaP), aluminum nitride (AlN), and aluminum gallium nitride (AlGaN).

20. The semiconductor device of claim 15 , wherein said PCM RF switch interfaces a heat spreader comprising a thermally conductive material selected from the group consisting of aluminum nitride (AlN), gallium nitride (GaN), gallium phosphide (GaP), aluminum gallium nitride (AlGaN), and silicon carbide (SiC).

21. The semiconductor devi

Assignees

• Newport Fab Llc

Inventors

• El-Hinnawy Nabil
• Howard David J
• Slovin Gregory P
• Rose Jefferson E

Classifications

• H10W44/20

  at high-frequency [HF] or radio frequency [RF] · CPC title

• H10D84/05 Primary

  using Group III-V technology · CPC title

• H10D84/0107

  Integrating at least one component covered by H10D12/00 or H10D30/00 with at least one component covered by H10D8/00, H10D10/00 or H10D18/00, e.g. integrating IGFETs with BJTs · CPC title

• H10D84/40

  characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00 with at least one component covered by groups H10D10/00 or H10D18/00, e.g. integration of IGFETs with BJTs · CPC title

• H10D88/101

  comprising components on opposite major surfaces of semiconductor substrates · CPC title