Cleanliness monitor and a method for monitoring a cleanliness of a vacuum chamber

Patent metadata

Field	Value
Publication number	US-10910204-B2
Application number	US-201916576588-A
Country	US
Kind code	B2
Filing date	Sep 19, 2019
Priority date	Jul 18, 2017
Publication date	Feb 2, 2021
Grant date	Feb 2, 2021

Abstract

A cleanliness monitor for monitoring a cleanliness of a vacuum chamber. The cleanliness monitor may include a mass spectrometer, a molecule aggregation and release unit and an analyzer. The molecule aggregation and release unit is configured to (a) aggregate, during an aggregation period, organic molecules that are present in the vacuum chamber and (b) induce, during a release period, a release of a subset of the organic molecules towards the mass spectrometer. The mass spectrometer is configured to monitor an environment within the vacuum chamber and to generate detection signals indicative of a content of the environment; wherein a first subset of the detection signals is indicative of a presence of the subset of the organic molecules. The analyzer is configured to determine the cleanliness of the vacuum chamber based on the detection signals.

First claim

We claim:

1. A system for monitoring cleanliness of a vacuum chamber, the system comprising:
a mass spectrometer configured to monitor an environment within the vacuum chamber and generate detection signals that are indicative of a content of the environment, wherein a first subset of the detection signals is indicative of a presence of organic molecules;
a molecule aggregation and release unit spaced from walls of the vacuum chamber, the molecule aggregation and release unit configured to aggregate organic molecules that are present in the vacuum chamber during an aggregation period, and induce a release of a subset of the organic molecules towards the mass spectrometer during a release period, wherein the molecule aggregation and release unit includes a heating element configured to heat the molecule aggregation and release unit and a cooling unit configured to cool the molecule aggregation and release unit; and
an analyzer configured to determine the cleanliness of the vacuum chamber based on the detection signals.

2. The system according to claim 1 comprising a segregating unit configured to segregate the molecule aggregation and release unit from parts of the vacuum chamber.

3. The system according to claim 1 wherein the molecule aggregation and release unit is positioned outside the vacuum chamber.

4. The system according to claim 1 wherein the molecule aggregation and release unit is positioned inside the vacuum chamber.

5. The system according to claim 1 wherein the mass spectrometer is arranged with a line of sight to the molecule aggregation and release unit.

6. The system according to claim 1 wherein the heating element is thermally coupled to a molecule aggregator of the molecule aggregation and release unit.

7. The system according to claim 1 wherein the molecule aggregation and release unit comprises a molecule releaser electrically coupled to a molecule aggregator of the molecule aggregation and release unit; and wherein the molecule releaser is configured to drive an electrical current through the heating element thereby heating the molecule aggregator.

8. The system according to claim 1 wherein the heating element comprises a spiral electrical conductor.

9. The system according to claim 1 wherein the molecule aggregation and release unit comprises a spiral electrical insulator.

10. The system according to claim 1 wherein the molecule aggregation and release unit comprises a non-smooth plate.

11. The system according to claim 1 comprising a flow control unit for affecting a propagation of the aggregated molecules during the release period.

12. The system according to claim 11 wherein the flow control unit comprises a pump for directing the aggregated molecules towards the mass spectrometer.

13. The system according to claim 1 wherein the molecule aggregation and release unit is configured to apply a given release process for inducing the release of the subset of the organic molecules towards the mass spectrometer; and wherein the system further comprises a dummy molecule aggregation and release unit that has a lower exposure to the organic molecules than the molecule aggregation and release unit and is configured to apply the given release process.

14. The system according to claim 13 comprising an additional mass spectrometer that is configured to monitor a space within the vacuum chamber that includes the dummy molecule aggregation and release unit.

15. The system according to claim 1 wherein a second subset of the detection signals are not indicative of a presence of some of the organic molecules; and wherein the analyzer is configured to determine the cleanliness of the vacuum chamber based on a comparison between the first and second subsets of the detection signals.

16. The system according to claim 15 wherein the second subset of the detection signals is obtained before the release period or after a predefined period after the release period.

17. The system according to claim 1 wherein the aggregation period is longer than the release period.

18. A method for monitoring cleanliness of a vacuum chamber, the method comprising:
during an aggregation period, aggregating organic molecules that are present in the vacuum chamber by a molecule aggregation and release unit that is spaced from walls of the vacuum chamber;
during a release period, inducing a release of a subset of the organic molecules towards a mass spectrometer by the molecule aggregation and release unit;
monitoring an environment within the vacuum chamber and generating detection signals indicative of a content of the environment, wherein a first subset of the detection signals is indicative of a presence of the subset of the organic molecules; and
determining the cleanliness of the vacuum chamber based on the detection signals.

19. The method of claim 18 wherein the monitoring and generating detection signals is done by the mass spectrometer and wherein the determining is done by an analyzer.

20. A system for monitoring cleanliness of a vacuum chamber, the system comprising:
a mass spectrometer configured to monitor an environment within the vacuum chamber and generate detection signals that are indicative of a content of the environment, wherein a first subset of the detection signals is indicative of a presence of organic molecules;
a molecule aggregation and release unit configured to aggregate organic molecules that are present in the vacuum chamber during an aggregation period, and induce a release of a subset of the organic molecules towards the mass spectrometer during a release period, wherein the molecule aggregation and release unit includes a heating element configured to heat the molecule aggregation and release unit and a cooling unit configured to cool the molecule aggregation and release unit;
a segregating unit configured to temporarily seal the molecule aggregation and release unit from portions of the vacuum chamber; and
an analyzer configured to determine the cleanliness of the vacuum chamber based on the detection signals.

Assignees

• Applied Materials Israel Ltd

Inventors

• Ruach-Nir Irit
• Eilon Michal
• Eytan Guy
• Schulman Magen Yaacov

Classifications

• H01J49/0468

  with means for heating or cooling the sample · CPC title

• H01J49/0413 Primary

  for automated handling · CPC title

• H01J37/18

  Vacuum locks {; Means for obtaining or maintaining the desired pressure within the vessel} · CPC title

• H01J37/16 Primary

  Vessels; Containers · CPC title

• H01J49/0031

  Step by step routines describing the use of the apparatus (H01J49/0081 takes precedence) · CPC title