Stacking fault-free semipolar and nonpolar GaN grown on foreign substrates by eliminating the nitrogen polar facets during the growth

Patent metadata

Field	Value
Publication number	US-10896818-B2
Application number	US-201716324979-A
Country	US
Kind code	B2
Filing date	Aug 11, 2017
Priority date	Aug 12, 2016
Publication date	Jan 19, 2021
Grant date	Jan 19, 2021

Abstract

Methods and structures for forming epitaxial layers of Ill-nitride materials on patterned foreign substrates with low stacking fault densities are described. Semipolar and nonpolar orientations of GaN that are essentially free from stacking faults may be grown from crystal-growth facets of a patterned substrate. Etching can be used to remove stacking faults if present. Crystal growth with an impurity can eliminate crystal growth from a facet that is responsible for stacking fault formation and permit substantially stacking-fault-free growth of the Ill-nitride material.

First claim

What is claimed is:

1. A method for forming an epitaxial layer of III-nitride material on a patterned foreign substrate, the method comprising:
receiving the patterned foreign substrate having separated III-nitride crystals formed thereon; and
further growing the III-nitride crystals to include an impurity dopant; and
eliminating a crystal growth facet on the further grown III-nitride crystals that forms stacking faults.

2. The method of claim 1 , wherein further growing the III-nitride crystals comprises growing GaN or an alloy of GaN.

3. The method of claim 2 , wherein the GaN or the alloy of GaN has a semipolar orientation approximately parallel to a process surface and wherein the semipolar orientation is within 60 degrees of a nonpolar facet.

4. The method of claim 2 , wherein further growing the III-nitride crystals comprises using Ge as the impurity dopant to dope the GaN or the alloy of GaN with a dopant density between approximately 1×10 18 cm −3 and approximately 1×10 19 cm −3 .

5. The method of claim 2 , wherein further growing the III-nitride crystals comprises metal-organic chemical vapor deposition of the GaN or the alloy of GaN on the separated III-nitride crystals.

6. The method of claim 5 , wherein a flow rate of NH 3 gas during the deposition is between approximately 0.5 slm and approximately 5 slm.

7. The method of claim 5 , wherein a flow rate of trimethylgallium or triethylgallium gas during the deposition is between approximately 10 mol/min and approximately 200 mol/min.

8. The method of claim 5 , wherein a temperature during the deposition is between approximately 950° C. and approximately 1070° C.

9. The method of claim 5 , wherein a pressure during the deposition is between approximately 50 mbar and approximately 400 mbar.

10. The method of claim 1 , wherein further growing the III-nitride crystals comprises using Ge as the impurity dopant.

11. The method of claim 1 , wherein the crystal growth facet that is eliminated is a ( 0001 ) facet of GaN.

12. The method of claim 1 , further comprising:
continuing the growth of the III-nitride crystals until the separated III-nitride crystals coalesce into a continuous layer across the patterned foreign substrate; and
further growing the III-nitride crystals without the impurity dopant.

13. The method of claim 12 , further comprising planarizing the continuous layer to form a process surface on the epitaxial layer.

Assignees

• Univ Yale

Inventors

• Han Jung
• Song Jie

Classifications

• H10P50/648

  Anisotropic liquid etching · CPC title

• H10P50/646

  of Group III-V materials · CPC title

• H10P14/3466

  Crystal orientation · CPC title

• H10P14/3442

  N-type · CPC title

• H10P14/3438

  Doping during depositing · CPC title