Processing method and processing apparatus of metal member

Patent metadata

Field	Value
Publication number	US-10895014-B2
Application number	US-201916287273-A
Country	US
Kind code	B2
Filing date	Feb 27, 2019
Priority date	Mar 2, 2018
Publication date	Jan 19, 2021
Grant date	Jan 19, 2021

Abstract

A method of processing a metal member having a passivation film on its surface is provided. The method includes a step of heating the metal member for a predetermined period at a temperature of 300° C. or higher.

First claim

What is claimed is:

1. A method of processing metal member having a passivation film on a surface of the metal member, the method comprising:
heating the metal member tear a predetermined period at a temperature of 300° C. or higher; wherein
the metal member is formed of stainless steel, and
the passivation film on the surface of the metal member is a chromium passivation.

2. The method according to claim 1 , wherein in the beating, the metal member is heated at a temperature between 380° C. and 450° C.

3. The method according to claim 1 , wherein the heating is performed while supplying an inert gas.

4. The method according to claim 3 , wherein the heating, is performed by using a heating member at a temperature of 300° C. or higher.

5. The method according to claim 1 , further comprising detecting concentration of moisture desorbed from the metal member; wherein the heating includes
controlling a time for stopping the heating of the metal member, in accordance with the detected concentration of moisture, the controlling being performed after the metal member is heated to 300° C. or higher.

6. The method according to claim 5 , wherein the heating of the metal member is stopped in response to the detected concentration of moisture becoming 100 ppb or less, after the metal member is heated to 300° C. or higher.

7. The method according to claim 5 , wherein the heating of the metal member is stopped, in response to the detected concentration of moisture becoming 100 ppb or less, and a change rate of the detected moisture concentration becoming within a range of −1.0 to 0.0 ppb/min, after the metal member is heated to 300° C. or higher.

8. The method according to claim 5 , wherein the heating of the metal member is stopped, in response to a difference, between moisture concentration in an inert gas flowing into the metal member and moisture concentration in the inert gas, flowing out of the metal member, becoming 100 ppb or less.

9. The method according to claim 5 , wherein the heating of the metal member is stopped, in response to a difference, between moisture concentration in an inert gas flowing into the metal member and moisture concentration in the inert gas flowing out of the metal member, becoming 10 ppb or less.

10. The method according to claim 1 , wherein the metal member is a part of a processing apparatus, the passivation film on the surface of the part being exposed to corrosive gas.

11. A processing apparatus comprising:
a heating unit configured to heat a metal member
a moisture detecting unit configured to detect concentration of moisture desorbed from the metal member; and
a control unit configured to control, the moisture detecting unit and the heating unit; wherein the control unit is configured to
heat the metal member to 300° C. or higher by using the heating unit, the metal member being formed of stainless steel and having a chromium passivation film on a surface of the metal member,
detect the concentration of moisture desorbed from the metal member by using the moisture detecting unit, and
continue heating the metal member at 300° C. or higher, until the concentration of moisture, detected by the moisture detecting unit, becomes 100 ppb or less, and until a change rate of the detected moisture concentration becomes within a range of −1.0 to 0.0 ppb/min.

12. A processing apparatus comprising:
a heating unit configured to heat a metal member;
a moisture detecting unit configured to detect concentration of moisture desorbed from the metal member; and
a control unit configured to control the moisture detecting unit and the heating unit; wherein the control unit is configured to
heat the metal member to 300° C. or higher by using the heating unit, the metal member being formed of stainless steel and having a chromium passivation film on a surface of the metal member,
detect the concentration of moisture desorhed from the metal member by using the moisture detecting unit, and
after detecting that the concentration of moisture has reached a peak, continue heating the metal member at 300° C. or higher until the concentration of moisture that is detected after detecting the peak becomes not higher than one hundredth of the peak.

13. The method according to claim 3 , wherein the heating is performed by supplying, to the metal member, the inert gas at a temperature, of 300° C. or higher.

Assignees

• Tokyo Electron Ltd

Inventors

• Nagaike Hiroshi

Classifications

• C21D1/76 Primary

  Adjusting the composition of the atmosphere · CPC title

• C21D6/002

  containing Cr (C21D6/004 takes precedence) · CPC title

• C21D1/26

  Methods of annealing · CPC title

• C23C22/82 Primary

  After-treatment · CPC title

• C21D9/08

  for tubular bodies or pipes · CPC title