Methods for forming a silicon nitride film on a substrate and related semiconductor device structures

Patent metadata

Field	Value
Publication number	US-10892156-B2
Application number	US-201715589861-A
Country	US
Kind code	B2
Filing date	May 8, 2017
Priority date	May 8, 2017
Publication date	Jan 12, 2021
Grant date	Jan 12, 2021

Abstract

A method for forming a silicon nitride film on a substrate is disclosed. The method may include; forming a cyclical silicon nitride film on the substrate by a cyclical deposition process, wherein the cyclical deposition process comprises at least one of; contacting the substrate with a first reactant comprising a silicon halide source and contacting the substrate with a second reactant comprising a nitrogen source. The method may also include exposing the cyclical silicon nitride film to a plasma. Semiconductor device structures comprising a silicon nitride film are also disclosed.

First claim

What is claimed is:

1. A method for forming a silicon nitride film on a substrate, the method comprising:
forming a cyclical silicon nitride film on the substrate by a cyclical deposition process, wherein the cyclical deposition process comprises at least one cycle of:
contacting the substrate with a first reactant comprising a silicon halide source, and
contacting the substrate with a second reactant comprising a nitrogen source;

after the at least one cycle, exposing the cyclical silicon nitride film to a plasma to finish a complete deposition cycle and to form a plasma treated silicon nitride film, wherein the step of exposing renders a surface of the plasma treated silicon nitride film reactive, and wherein a wet etch rate of the plasma treated silicon nitride film is less than a wet etch rate of the cyclical silicon nitride film;
after the complete deposition cycle, and thus after forming the plasma treated silicon nitride film, repeating the forming and the exposing steps to perform multiple complete deposition cycles to form multiple plasma treated silicon nitride films; and
after repeating the forming and the exposing steps to perform multiple complete deposition cycles; passivating a surface of the plasma treated silicon nitride film, wherein the step of passivating comprises one or more of a plasma process and exposing the plasma treated silicon nitride film to nitrogen (N 2 ), wherein the step of passivating differs from the step of exposing the cyclical silicon nitride film to the plasma, and wherein the step of passivating reduces a reactivity of a surface of the plasma treated silicon nitride film.

2. The method of claim 1 , wherein the cyclical deposition process is a cyclical atomic layer deposition process.

3. The method of claim 2 , wherein the complete deposition cycle is repeated more than two times prior to the step of passivating.

4. The method of claim 1 , wherein the cyclical deposition process is repeated until the cyclical silicon nitride film has a first desired thickness, wherein repeating the forming and the exposing steps is performed until the multiple plasma treated silicon nitride films has a second desired thickness.

5. The method of claim 1 , wherein the step of passivating comprises contacting the silicon nitride film with nitrogen exposed to a remote plasma prior to removing the silicon nitride film from a semiconductor processing apparatus.

6. The method of claim 1 , further comprising selecting the silicon halide source to comprise at least one of hexaiododisilane (Si 2 I 6 ) or octoiodotrisilane (Si 3 I 8 ).

7. The method of claim 1 , further comprising selecting the nitrogen source to comprise an alkyl-hydrazine.

8. The method of claim 1 , wherein exposing the cyclical silicon nitride film to the plasma comprises exposing the cyclical silicon nitride film to the plasma for a time period of less than approximately 90 seconds.

9. The method of claim 1 , wherein exposing the cyclical silicon nitride film to the plasma comprises exposing the cyclical silicon nitride film to a plasma source comprising at least one of nitrogen (N 2 ), helium (He), hydrogen (H 2 ), and argon (Ar).

10. The method of claim 1 , wherein exposing the cyclical silicon nitride film to the plasma comprises exposing the cyclical silicon nitride film to a plasma source comprising helium (He) and nitrogen (N 2 ).

11. The method of claim 10 , wherein the plasma source comprises a 50%:50% ratio of helium (He) to nitrogen (N 2 ).

12. The method of claim 10 , wherein the step of passivating comprises contacting the silicon nitride film the nitrogen.

13. The method of claim 12 , wherein the silicon nitride film has an atomic percentage of hydrogen of less than 15%.

14. The method of claim 1 , wherein the silicon nitride film has a wet etch rate in a 2000:1 H 2 O:HF solution of approximately less than 5 Angstroms/minute.

15. The method of claim 1 , wherein forming the cyclical silicon nitride film on the substrate by the cyclical deposition process and exposing the cyclical silicon nitride film to the plasma are performed within the same semiconductor processing apparatus.

16. The method of claim 1 , further comprising exposing the substrate to the plasma prior to forming the cyclical silicon nitride film on the substrate by the cyclical deposition process.

17. The method of claim 1 , wherein exposing the cyclical silicon nitride film to the plasma further comprises altering the stress in the cyclical silicon nitride film.

18. The method of claim 17 , wherein altering the stress in the cyclical silicon nitride film further comprises altering the stress from a tensile state to a compressive state.

19. The method of claim 1 , wherein exposing the cyclical silicon nitride film to the plasma further comprises altering a degree of bow in the substrate.

20. The method of claim 1 , wherein the step of passivating comprises contacting the plasma treated silicon nitride film with a nitrogen precursor comprising at least one of ammonia or nitrogen gas plasma prior to removing the silicon nitride film from a semiconductor processing apparatus.

21. A semiconductor device structure comprising the silicon nitride layer formed by the method of claim 1 .

22. A reaction system configured to perform the method of claim 1 .

Assignees

• Asm Ip Holding Bv

Inventors

• Woodruff Jacob Huffman
• Sharma Bed
• Shero Eric James

Classifications

• H10P76/405

  characterised by their composition, e.g. multilayer masks · CPC title

• H10P50/283

  by chemical means · CPC title

• H10P14/69433

  the material being a silicon nitride not containing oxygen, e.g. SixNy or SixByNz · CPC title

• H10P14/6682

  the compound being a silane, e.g. disilane, methylsilane or chlorosilane · CPC title

• H10P14/6532

  by exposure to a plasma · CPC title