Apparatus and methods for isolating a reaction chamber from a loading chamber resulting in reduced contamination

Patent metadata

Field	Value
Publication number	US-10872803-B2
Application number	US-201715803615-A
Country	US
Kind code	B2
Filing date	Nov 3, 2017
Priority date	Nov 3, 2017
Publication date	Dec 22, 2020
Grant date	Dec 22, 2020

Abstract

The present disclosure relates to a semiconductor processing apparatus having a reaction chamber which can include a baseplate having an opening; a moveable substrate support configured to support a substrate; a movement element configured to move a substrate held on the substrate support towards the opening of the baseplate; a plurality of gas inlets positioned above and configured to direct gas downwardly towards the substrate support; and a sealing element configured to form a seal between the baseplate and the substrate support, the seal positioned at a greater radial distance from a center of the substrate support than an outer edge of the substrate support. In some embodiments, the sealing element can also include a plurality of apertures extend through the sealing element, the apertures configured to provide a flow path between a position below the sealing element to a position above the sealing element.

First claim

What is claimed is:

1. A semiconductor processing apparatus comprising:
a reaction chamber comprising a baseplate including an opening;
a moveable substrate support configured to support a substrate and configured to move towards the opening of the baseplate;
a plurality of gas inlets positioned above and configured to direct gas downwardly towards the substrate support;
an annular sealing ring configured to form a seal between the baseplate and the substrate support, the seal positioned at a greater radial distance from a center of the substrate support than an outer edge of the substrate support;
a plurality of apertures extending through the sealing ring, the apertures configured to provide a flow path between a position below the sealing ring and a position above the sealing ring; and
wherein the baseplate comprises a surface, the surface including an apex, the seal formed between the apex and the sealing ring, wherein the apertures extend radially across the apex.

2. The apparatus of claim 1 , wherein the sealing ring comprises metal.

3. The apparatus of claim 2 , wherein the seal comprises a metal to metal contact between the sealing ring and at least one of the baseplate and the substrate support.

4. The apparatus of claim 1 , further comprising an exhaust port, wherein at least one of the apertures and the seal is positioned at a radial distance that is less than or equal to the exhaust port, relative to a center of the substrate support.

5. The apparatus of claim 4 , further comprising a gap extending radially between the substrate support and the baseplate, wherein the apertures are arranged at a greater radial distance from the center of the substrate support than the gap.

6. The apparatus of claim 5 , wherein the seal is formed without a substantial vertical gap between the substrate support and the baseplate.

7. The apparatus of claim 6 , wherein the exhaust port is located at a greater radial distance from the center of the substrate support than the plurality of gas inlets.

8. The apparatus of claim 7 , wherein the exhaust port comprises an exhaust ring extending around the substrate support.

9. The apparatus of claim 1 , wherein each aperture comprises a slot.

10. The apparatus of claim 1 , wherein the apertures are configured to allow about 50 sccm to about 200 sccm of flow through the sealing ring when the seal is formed between the baseplate and the substrate support.

11. The apparatus of claim 1 , wherein the substrate support comprises an upper portion and a lower portion, wherein the sealing ring is affixed to an underside of the upper portion of the substrate support.

12. The apparatus of claim 1 , wherein the surface comprises a curved surface, and the total circumference where the curved surface contacts the sealing ring is greater than the total circumference of the apertures.

13. The apparatus of claim 1 , wherein the sealing ring is pneumatically actuated.

14. The apparatus of claim 1 , wherein the baseplate does not include bellows.

15. A semiconductor processing apparatus comprising:
a reaction chamber comprising a baseplate including an opening;
a moveable substrate support configured to support a substrate and
configured to move towards the opening of the baseplate, and between a loading position and a processing position;

a metal annular sealing ring extending around the substrate support and configured to form a seal between the baseplate and the substrate support when the substrate support is in the processing position, wherein a plurality of apertures extend through the sealing ring, the apertures configured to provide a flow path between a position below the sealing ring to a position above the sealing ring; and
wherein the baseplate comprises a surface, the surface including an apex, the seal formed between the apex and the metal sealing ring, wherein the apertures extend radially across the apex.

16. The apparatus of claim 15 , wherein the seal comprises a metal to metal contact between the sealing ring and at least one of the baseplate and the substrate support.

17. The apparatus of claim 15 , further comprising a plurality of gas inlets positioned above and configured to direct gas downwardly towards the substrate portion.

18. The apparatus of claim 17 , wherein the plurality of gas inlets is located radially inwardly from an inside edge of the baseplate.

19. The apparatus of claim 18 , wherein the plurality of gas inlets is arranged in a showerhead formation.

20. The apparatus of claim 19 , wherein the plurality of gas inlets is further configured to direct gas substantially perpendicular to a substantially planar upper surface of the substrate support.

21. The apparatus of claim 15 , wherein each aperture comprises a slot.

22. The apparatus of claim 21 , wherein the plurality of apertures are spaced around an outer edge of the sealing ring.

23. The apparatus of claim 22 , further comprising a second plurality of slots arranged on a radially inner portion of the sealing ring.

24. The apparatus of claim 15 , wherein the substrate support comprises a recess, wherein a radial distance between an outer edge of the recess and the seal is between about 50 mm to about 65 mm.

25. The apparatus of claim 15 , wherein a total effective area of a portion of the apertures which is located radially inwardly from the seal is in a range of about 4 mm 2 to about 6 mm 2 .

26. The apparatus of claim 15 , further comprising a flow control ring configured to encircle the circumference of the substrate support.

27. A semiconductor processing apparatus comprising:
a reaction chamber comprising a baseplate including an opening;
a moveable substrate support comprising a recess configured to support a substrate the substrate support
configured to move towards the opening of the baseplate; and

an annular sealing ring configured to form a seal between the baseplate and the substrate support, the seal positioned radially from a center of the substrate support at a distance at least 30% or greater than the distance between the center of the substrate support and an outer edge of the recess, wherein a plurality of apertures extend through the sealing ring, the apertures configured to provide a flow path between a position below the sealing ring to a position above the sealing ring, wherein the baseplate comprises a surface, the surface including an apex, the seal formed between the apex and the sealing ring, wherein the apertures extend radially across the apex.

28. The apparatus of claim 26 , wherein the flow control ring is a separate component relative to the substrate support.

Assignees

• Asm Ip Holding Bv

Inventors

• White Carl Louis
• Fondurulia Kyle
• Shugrue John Kevin

Classifications

• H10P72/7618

  characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating carrousel · CPC title

• H10P72/0462

  characterised by the construction of the processing chambers, e.g. modular processing chambers · CPC title

• H10P72/0441

  Apparatus for sealing, encapsulating, glassing, decapsulating or the like · CPC title

• H10P72/7611 Primary

  characterised by edge profile or support profile · CPC title

• C23C16/458

  characterised by the method used for supporting substrates in the reaction chamber · CPC title