Phase-change material (PCM) radio frequency (RF) switch

Patent metadata

Field	Value
Publication number	US-10862032-B2
Application number	US-201916692296-A
Country	US
Kind code	B2
Filing date	Nov 22, 2019
Priority date	Aug 14, 2018
Publication date	Dec 8, 2020
Grant date	Dec 8, 2020

Abstract

A radio frequency (RF) switch includes a heating element, thermally conductive and electrically insulating layer over the heating element, a wetting dielectric layer over the thermally conductive and electrically insulating layer, and a phase-change material (PCM) over the wetting dielectric layer. At least one cladding dielectric layer can be situated over sides and/or over a top surface of the PCM. Each of the wetting dielectric layer, phase change material, and cladding dielectric layer can comprise at least germanium. A transitional dielectric layer can be situated between the thermally conductive and electrically insulating layer and the wetting dielectric layer. A contact uniformity support layer can be situated over the cladding dielectric layer.

First claim

The invention claimed is:

1. A radio frequency (RF) switch comprising:
a heating element;
a thermally conductive and electrically insulating layer situated over said heating element;
a wetting dielectric layer comprising at least germanium situated over said thermally conductive and electrically insulative layer;
at least one transitional dielectric layer situated between said thermally conductive and electrically insulating layer and said wetting dielectric layer;
a phase-change material (PCM) comprising at least germanium situated over said wetting dielectric layer.

2. The RF switch of claim 1 , wherein said wetting dielectric layer comprises a material selected from the group consisting of germanium oxide (Ge X O Y ), germanium nitride (Ge X N Y ), germanium oxynitride (Ge X O Y N Z ), germanium silicon oxide (Ge X Si Y O Z ), germanium silicon nitride (Ge X Si Y N Z ), and germanium silicon oxynitride (Ge W Si X O Y N Z ).

3. The RF switch of claim 1 , further comprising a cladding dielectric layer comprising at least germanium situated over a top surface of said PCM.

4. The RF switch of claim 1 , further comprising a cladding dielectric layer comprising at least germanium situated over sides of said PCM.

5. The RF switch of claim 3 , wherein said cladding dielectric layer comprises a material selected from the group consisting of germanium oxide (Ge X O Y ), germanium nitride (Ge X N Y ), germanium oxynitride (Ge X O Y N Z ), germanium silicon oxide (Ge X Si Y O Z ), germanium silicon nitride (Ge X Si Y N Z ), and germanium silicon oxynitride (Ge W Si X O Y N Z ).

6. The RF switch of claim 3 , further comprising at least one contact uniformity support layer situated over said cladding dielectric layer.

7. The RF switch of claim 6 , wherein said at least one contact uniformity support layer comprises a material selected from the group consisting of silicon nitride (Si X N Y ) and silicon oxide (Si X O Y ).

8. The RF switch of claim 1 , wherein said least one transitional dielectric layer comprises a material selected from the group consisting of silicon nitride (Si X N Y ) and silicon oxide (Si X O Y ).

9. The RF switch of claim 1 , wherein said thermally conductive and electrically insulating layer comprises a material selected from the group consisting of silicon carbide (Si X C Y ), aluminum nitride (Al X N Y ), aluminum oxide (Al X O Y ), beryllium oxide (Be X O Y ), diamond, and diamond-like carbon.

10. The RF switch of claim 1 , wherein said PCM is selected from the group consisting of germanium telluride (Ge X Te Y ), germanium antimony telluride (Ge X Sb Y Te Z ), germanium selenide (Ge X Se Y ), and any other chalcogenide.

11. A radio frequency (RF) switch comprising:
a heating element;
a thermally conductive and electrically insulating layer situated over said heating element;
a transitional dielectric layer situated over said thermally conductive and electrically insulating layer, said transitional dielectric layer comprising a material selected from the group consisting of silicon nitride (Si X N Y ) and silicon oxide (Si X O Y );
a wetting dielectric layer situated over said transitional dielectric layer, said wetting dielectric layer comprising a material selected from the group consisting of germanium oxide (Ge X O Y ), germanium nitride (Ge X N Y ), germanium oxynitride (Ge X O Y N Z ), germanium silicon oxide (Ge X Si Y O Z ), germanium silicon nitride (Ge X Si Y N Z ), and germanium silicon oxynitride (Ge W Si X O Y N Z );
a phase-change material (PCM) comprising at least germanium situated over said wetting dielectric layer;
a cladding dielectric layer situated over a top surface of said PCM, said cladding dielectric layer comprising a material selected from the group consisting of Ge X O Y , Ge X N Y , Ge X O Y N Z , Ge X Si Y O Z , Ge X Si Y N Z , and Ge W Si X O Y N Z .

12. The RF switch of claim 11 , wherein said heating element is transverse to said PCM and approximately underlying an active segment of said PCM.

13. The RF switch of claim 11 , further comprising PCM contacts situated over passive segments of said PCM.

14. The RF switch of claim 11 , further comprising another cladding dielectric layer situated over sides of said PCM.

15. The RF switch of claim 11 , further comprising at least one contact uniformity support layer situated over said cladding dielectric layer, said at least one contact uniformity support layer comprising a material selected from the group consisting of silicon nitride (Si X N Y ) and silicon oxide (Si X O Y ).

16. A radio frequency (RF) switch comprising:
a heating element;
a thermally conductive and electrically insulating layer situated over said heating element;
a phase-change material (PCM) comprising at least germanium situated over said thermally conductive and electrically insulating layer;
a cladding dielectric layer comprising at least germanium situated over said PCM;
at least one contact uniformity support layer situated over said cladding dielectric layer.

17. The RF switch of claim 16 , wherein said cladding dielectric layer comprises a material selected from the group consisting of germanium oxide (Ge X O Y ), germanium nitride (Ge X N Y ), germanium oxynitride (Ge X O Y N Z ), germanium silicon oxide (Ge X Si Y O Z ), germanium silicon nitride (Ge X Si Y N Z ), and germanium silicon oxynitride (Ge W Si X O Y N Z ).

18. The RF switch of claim 16 , further comprising another cladding dielectric layer situated over sides of said PCM.

19. The RF switch of claim 16 , wherein said at least one contact uniformity support layer comprises a material selected from the group consisting of silicon nitride (Si X N Y ) and silicon oxide (Si X O Y ).

20. The RF switch of claim 13 , wherein said heating element is transverse to said PCM such that said PCM contacts situated over said passive segments of said PCM do not overlie said heating element.

Assignees

• Newport Fab Llc

Inventors

• Rose Jefferson E
• Howard David J
• Slovin Gregory P
• El-Hinnawy Nabil

Classifications

• H01L45/06

  Electricity · mapped topic

• H01L45/1286

  Electricity · mapped topic

• H01L45/143

  Electricity · mapped topic

• H01L45/1675

  Electricity · mapped topic

• H01L45/144

  Electricity · mapped topic