Method of and apparatus for protecting a switch, such as a MEMS switch, and to a MEMS switch including such a protection apparatus

Patent metadata

Field	Value
Publication number	US-10855073-B2
Application number	US-201816035538-A
Country	US
Kind code	B2
Filing date	Jul 13, 2018
Priority date	Jul 2, 2014
Publication date	Dec 1, 2020
Grant date	Dec 1, 2020

Abstract

A method of and apparatus for protecting a MEMS switch is provided. The method and apparatus improve the integrity of MEMS switches by reducing their vulnerability to current flow through them during switching of the MEMS switch between on and off or vice versa. The protection circuit provides for a parallel path, known as a shunt, around the MEMS component. However, components within the shunt circuit can themselves be removed from the shunt when they are not required. This improves the electrical performance of the shunt when the switch is supposed to be in an off state.

First claim

What is claimed:

1. A protected microelectromechanical systems (MEMS) device, comprising:
a MEMS switch having a first switch node and a second switch node;
a protection circuit comprising a diode having a first electrode connected to the first switch node and a second electrode connected to a voltage node, the protection circuit configured to connect the first switch node to the voltage node in response to a switch transition of the MEMS switch; and
a second switch connected between the second electrode and the voltage node, wherein the second switch is configured to electrically connect the second electrode and the voltage node when the MEMS switch is switching between open and closed.

2. The protected MEMS device of claim 1 , wherein the voltage node is a ground node.

3. The protected MEMS device of claim 1 , further comprising a shunt component connected between the first electrode of the diode and the first switch node.

4. The protected MEMS device of claim 3 , wherein the shunt component comprises a resistor.

5. The protected MEMS device of claim 3 , wherein the shunt component comprises a protection switch connected between the first electrode of the diode and the first switch node of the MEMS switch, wherein the protection switch is configured to electrically connect the first electrode of the diode and the first switch node in response to a switch transition of the MEMS switch.

6. The protected MEMS device of claim 5 , wherein the shunt component further comprises a resistor in parallel with the protection switch.

7. A protected microelectromechanical systems (MEMS) device, comprising:
a MEMS switch having a first switch node and a second switch node;
a protection circuit comprising a diode having a first electrode connected to the first switch node and a second electrode connected to a voltage node, the protection circuit configured to connect the first switch node to the voltage node in response to a switch transition of the MEMS switch, wherein
the diode is a first diode, the first electrode is an anode of the first diode, the second electrode is a cathode of the first diode, and the protection circuit further comprises a second diode having a cathode connected to the first switch node and an anode connected to the voltage node.

8. The protected MEMS device of claim 7 , wherein the protection circuit is a first protection circuit, and the protected MEMS device further comprises a second protection circuit configured to connect the second switch node to the voltage node in response to a switch transition of the MEMS switch, wherein the second protection circuit comprises:
a third diode having a cathode connected to the voltage node and an anode connected to the second switch node;
a fourth diode having a cathode connected to the second switch node and an anode connected to the voltage node.

9. A protected microelectromechanical systems (MEMS) device, comprising:
a MEMS switch; and
a first diode having a cathode and an anode, a second diode having a cathode and an anode,
wherein a terminal of the MEMS switch is connected to the anode of the first diode and the cathode of the second diode, and
wherein the cathode of the first diode and the anode of the second diode are configured to be connected to ground in response to a switch transition of the MEMS switch.

10. The protected MEMS device of claim 9 , further comprising a first switch connected between the cathode of the first diode and ground, and a second switch connected between the anode of the second diode and ground.

11. The protected MEMS device of claim 10 , further comprising a controller configured to control the first and second switches such that the cathode of the first diode and the anode of the second diode are connected to ground in response to a switch transition of the MEMS switch.

12. The protected MEMS device of claim 11 , wherein the first switch is a toggle switch that connects to either ground or a first voltage node, the second switch is a toggle switch that connects to either ground or a second voltage node, and
the controller is configured to control the first and second switches such that the cathode of the first diode is connected to the first voltage node and the anode of the second diode is connected to the second voltage node in response to the MEMS switch being outside of a switch transition.

13. The protected MEMS device of claim 9 , further comprising a shunt component coupled between the terminal of the MEMS switch and the cathode of the first diode.

14. The protected MEMS device of claim 13 , wherein the shunt component comprises a resistor.

15. The protected MEMS device of claim 13 , wherein the shunt component comprises a protection switch connected between the terminal of the MEMS switch and the cathode of the first diode, wherein the protection switch is configured to electrically connect the terminal and the cathode of the first diode in response to a switch transition of the MEMS switch.

16. The protected MEMS device of claim 15 , wherein the shunt component further comprises a resistor in parallel with the protection switch.

Assignees

• Analog Devices Global Unlimited Co

Inventors

• Fitzgerald Padraig
• Carty Eric James

Classifications

• H01H59/0009 Primary

  making use of micromechanics · CPC title

• H02H9/04 Primary

  responsive to excess voltage (lightning arrestors H01C7/12, H01C8/04, H01G9/18, H01T) · CPC title

• H01H2061/006

  Micromechanical thermal relay · CPC title

• H01H73/18

  Means for extinguishing or suppressing arc {(magnet coil acting as blow-out device H01H71/38)} · CPC title

• H01H9/542

  Contacts shunted by static switch means · CPC title