Vacuum pump having a first housing with a supply port and a second housing with a recess portion

Patent metadata

Field	Value
Publication number	US-10837447-B2
Application number	US-201816652260-A
Country	US
Kind code	B2
Filing date	May 30, 2018
Priority date	Oct 30, 2017
Publication date	Nov 17, 2020
Grant date	Nov 17, 2020

Abstract

[Object] To efficiently supply lubricant oil to a bearing member with a simple mechanism.
[Solving Means] A vacuum pump includes a first housing, a second housing, a rotor shaft, a lubricant oil-stirring plate, and a bearing member. The second housing is attached to the first housing and forms a space that stores lubricant oil together with the first housing. The rotor shaft passes through the first housing. The lubricant oil-stirring plate is housed in the space and is attached to the rotor shaft. The bearing member is fixed to the first housing and rotatably supports the rotor shaft. The first housing includes a supply port that enables lubricant oil to be supplied to the bearing member. The second housing includes an inner-wall upper portion which the lubricant oil stirred by the lubricant oil-stirring plate hits against. The inner-wall upper portion of the second housing includes a recess portion that enables the lubricant oil to move above the supply port.

First claim

The invention claimed is:

1. A vacuum pump, comprising:
a first housing;
a second housing attached to the first housing and forming a space together with the first housing, the space storing a lubricant oil;
a rotor shaft passing through the first housing;
a lubricant oil-stirring plate housed in the space and attached to the rotor shaft; and
a bearing member fixed to the first housing and rotatably supporting the rotor shaft,
the first housing including a supply port enabling the lubricant oil to be supplied to the bearing member,
the second housing including an inner-wall upper portion, the lubricant oil being stirred by the lubricant oil-stirring plate and hitting against the inner-wall upper portion, the inner-wall upper portion including a recess portion enabling the lubricant oil to move above the supply port,
the recess portion including a first recess portion and a second recess portion,
the second recess portion being aligned with the first recess portion in a first direction orthogonal to an axis direction of the rotor shaft,
a width of the second recess portion in the first direction being smaller than a width of the first recess portion in the first direction, and
a depth of the first recess portion being configured to become shallower toward the bearing member from the lubricant oil-stirring plate.

2. The vacuum pump according to claim 1 , wherein
an inner surface of the first recess portion is configured as a curved surface protruding in a depth direction of the first recess portion or a polygonal surface protruding in the depth direction.

3. The vacuum pump according to claim 2 , wherein
an inner surface of the second recess portion is configured as a curved surface protruding in a depth direction of the second recess portion or a polygonal surface protruding in the depth direction.

4. The vacuum pump according to claim 2 , wherein
the inner surface of the first recess portion is provided continuously with an inner surface of the second recess portion, and
an angle formed by the inner surface of the first recess portion and the inner surface of the second recess portion is equal to or smaller than 90 degrees at a boundary between the inner surface of the first recess portion and the inner surface of the second recess portion.

5. The vacuum pump according to claim 1 , wherein
an inner surface of the second recess portion is configured as a curved surface protruding in a depth direction of the second recess portion or a polygonal surface protruding in the depth direction.

6. The vacuum pump according to claim 1 , wherein
the inner surface of the first recess portion is provided continuously with the inner surface of the second recess portion, and
an angle formed by the inner surface of the first recess portion and the inner surface of the second recess portion is equal to or smaller than 90 degrees at a boundary between the inner surface of the first recess portion and the inner surface of the second recess portion.

Assignees

• Ulvac Inc

Inventors

• Kimura Yasuhiro
• TOKUHIRA Shinnosuke
• Inoue Hideaki
• Machiya Kenji

Classifications

• F16N2210/14

  Bearings · CPC title

• F16N7/32

  Mist lubrication (splash lubrication F16N7/26) · CPC title

• F16N7/26

  Splash lubrication (mist lubrication F16N7/32) · CPC title

• F16C33/664

  Retaining the liquid in or near the bearing · CPC title

• F04C29/02 Primary

  Lubrication (of machines or engines in general F01M); Lubricant separation (separation in general B01D) · CPC title