Film deposition method and film deposition apparatus
US-2026101683-A1 · Apr 9, 2026 · US
Ulvac Inc holds 406 patents in our database, with recent filings and technology areas summarized below.
| Metric | Value |
|---|---|
| Total patents | 406 |
| Recent patents | 66 |
| First publication | Jan 13, 2015 |
| Latest publication | Apr 9, 2026 |
Year-over-year patent counts for this assignee.
Latest publications where this party is an assignee.
US-2026101683-A1 · Apr 9, 2026 · US
US-2026040807-A1 · Feb 5, 2026 · US
US-2026035780-A1 · Feb 5, 2026 · US
US-2026040805-A1 · Feb 5, 2026 · US
US-2026040880-A1 · Feb 5, 2026 · US
Representative or frequently cited publications from precomputed assignee stats.
US-2026101683-A1 · Apr 9, 2026 · US
US-2026040807-A1 · Feb 5, 2026 · US
US-2026035780-A1 · Feb 5, 2026 · US
US-2026040805-A1 · Feb 5, 2026 · US
US-2026040880-A1 · Feb 5, 2026 · US
Most common classification codes in this portfolio.
| CPC | Patents |
|---|---|
| C23C14/34 | 91 |
| C23C14/3407 | 60 |
| C23C14/35 | 57 |
| C23C14/50 | 47 |
| H10P50/242 | 41 |
Mapped technology topics for this assignee.
| Technology | Patents |
|---|---|
| Electricity | 325 |
| Chemistry & Metallurgy | 247 |
| Operations & Transport | 68 |
| Physics | 39 |
| Cross-Sectional Technologies | 32 |
| Mechanical Engineering | 31 |
| Human Necessities | 11 |
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