Method and apparatus for contactlessly advancing substrates

Patent metadata

Field	Value
Publication number	US-10837107-B2
Application number	US-201113808392-A
Country	US
Kind code	B2
Filing date	Jul 6, 2011
Priority date	Jul 7, 2010
Publication date	Nov 17, 2020
Grant date	Nov 17, 2020

Abstract

A method of contactlessly advancing a substrate (140), comprising: —providing a process tunnel (102), extending in a longitudinal direction and bounded by at least a first (120) and a second (134) wall; —providing first and second gas bearings (124, 134) by providing substantially laterally flowing gas alongside the first and second walls respectively; —bringing about a first longitudinal division of the process tunnel into a plurality of pressure segments (116), wherein the gas bearings (124, 34) in a pressure segment have an average gas pressure that is different from an average gas pressure of the gas bearings in an adjacent pressure segment; —providing a substrate (140) in between the first wall (120) and the second wall (130); and 1—allowing differences in average gas pressure between adjacent pressure segments (116) to drive the substrate along the longitudinal direction of the process tunnel.

First claim

We claim:

1. A method of contactlessly advancing substantially flat substrates in a transport direction, comprising:
providing a process tunnel, extending from an entrance to an exit in a longitudinal direction that is parallel to the transport direction, the process tunnel being bounded by at least a first and a second wall, said walls being mutually parallel and spaced apart so as to allow the substantially flat substrates, oriented parallel to the walls, to be accommodated there between, wherein the process tunnel has two opposite lateral sides and is bounded by two lateral side walls that extend in the longitudinal direction, wherein the process tunnel defines a lateral direction that extends parallel to the first and second walls and perpendicular to the longitudinal direction, wherein both the first and the second wall comprise a plurality of gas injection channels, the process tunnel being unobstructed along the entire length thereof, wherein the first and second walls extend horizontally and the longitudinal direction of the process tunnel extends horizontally;
providing at least a first precursor gas, a purge gas, and a second precursor gas;
selectively supplying the first precursor gas, the purge gas and the second precursor gas to the plurality of gas injection channels of the first wall to create a plurality of atomic layer deposition (ALD)-segments in the process tunnel, wherein each ALD-segment comprises at least four laterally extending gas zones that successively contain the first precursor gas, the purge gas, the second precursor gas and the purge gas, respectively, wherein in each laterally extending gas zone the gas flows substantially laterally towards the lateral sides of the process tunnel, whereby the ALD-segments of the plurality of ALD-segments are successively arranged in the longitudinal direction of the process tunnel, and wherein each ALD-segment is provided at a substantially constant pressure;
supplying a purge gas to the plurality of gas injection channels of the second wall whereby the purge gas flows substantially laterally towards the lateral sides of the process tunnel, or, alternatively,
selectively supplying the first precursor gas, the purge gas and the second precursor gas to the plurality of gas injection channels of the second wall to create a plurality of ALD-segments in the process tunnel, wherein each ALD-segment comprises at least four laterally extending gas zones that successively contain the first precursor gas, the purge gas, the second precursor gas and the purge gas, respectively, wherein in each laterally extending gas zone the gas flows substantially laterally towards the lateral sides of the process tunnel, whereby the ALD-segments of the plurality of ALD-segments are successively arranged in the longitudinal direction of the process tunnel;
successively supplying substrates into the process tunnel via the entrance to create a continuous stream of substrates within the process tunnel, whereby the first precursor gas, the purge gas and the second precursor gas supplied via gas injection channels of the first wall create a first gas bearing between each substrate and the first tunnel wall, wherein a stiffness of the first gas bearing is based on the substantially laterally flowing gas in the first gas bearings, whereby when purge gas is supplied via the plurality of gas injection channels of the second wall the purge gas creates a second gas bearing between each substrate and the second tunnel wall so that the substrates are floatingly supported and whereby, in the alternative when the first precursor gas, the purge gas and the second precursor gas, are supplied via the plurality of gas injection channels of the second wall the first precursor gas, the purge gas and the second precursor gas create a second gas bearing between each substrate and the second tunnel wall so that the substrates are floatingly supported, wherein a stiffness of the second gas bearing is based on the substantially laterally flowing gas in the second gas bearings;
wherein with the supplying of said gases:
an average gas pressure is created within both the first and the second gas bearing that, viewed in the transport direction of the process tunnel, drops monotonically along a first portion of the process tunnel thereby providing a pressure differential across each of the substrates which pressure differential drives the substrates in the transport direction, wherein said first portion in which the average pressure drops monotonically is long enough to accommodate a plurality of substrates wherein the pressure differential over each substrate is substantially constant at each longitudinal position of the substrate within said first portion of the process tunnel in which the average pressure drops monotonically so as to induce a substantial constant velocity to each substrate that is moving as part of the train of substrates within said first portion of the process tunnel,
wherein said first portion of the process tunnel includes a plurality of subsequent ALD-segments, wherein within the said first portion of the process tunnel a corresponding plurality of ALD cycles is performed, wherein the average pressure in the subsequent ALD-segments in the first portion of the process tunnel at which the ALD cycle is performed monotonically drops when viewed from the entrance to the exit, and
wherein the stiffness of the first gas bearing and the stiffness of the second gas bearing is independent of the longitudinal pressure drops in the average gas pressure;

wherein an ALD-layer is deposited on at least a first surface and optionally on both the first surface and a second, opposite surface of each substrate during movement of each substrate through each ALD-segment of the process tunnel along the transport direction, wherein an ALD-film composed of a stack of ALD-layers is formed during movement of each substrate from the entrance to the exit.

2. The method according to claim 1 , wherein an average longitudinal velocity component of the gas of the first and second gas bearings is not larger than 20% of an average lateral velocity component of said gas.

3. The method according to claim 1 , wherein the pressure differential (ΔP z ) over each substrate accommodated within said first portion of the process tunnel in which the average pressure monotonically decreases is in the range of 0-100 Pa.

4. The method according to claim 1 , further comprising:
changing a difference in average gas pressure within said first portion of the process tunnel without altering a lateral gas flow rate (Q x ) of the substantially laterally flowing gas in the first and second gas bearings, so as to change a force with which the substrate is driven without altering a stiffness of the gas bearings.

5. The method according to claim 1 , further comprising:
changing a lateral gas flow rate (Q x ) of the substantially laterally flowing gas in the first and second gas bearings without altering a difference in average gas pressure along said first portion of the process tunnel, so as to change a stiffness of the gas bearings without altering a force with which the substrates are driven within said first portion of the process tunnel.

6. The method according to claim 1 , further comprising:
supplying in a second portion of the process tunnel having a second length, via the plurality of gas injection channels of the first wall and second wall, an inert purge gas or a process gas chosen from the group comprising: (i) oxygen, (ii) ammonia, (iii) hydrogen, and (iv) a phosphorus or boron comprising compound,
supplying heat to the second portion of the process tunnel thereby subjecting the continuous stream of substrates moving through the second portion to an annealing treatment.

7. A method of cont

Assignees

• Granneman Ernst Hendrik August
• Kuznetsov Vladimir
• Asm Int Nv

Inventors

• Granneman Ernst Hendrik August
• Kuznetsov Vladimir

Classifications

• H10P72/36

  using air tracks · CPC title

• B65G51/03 Primary

  over a flat surface or in troughs · CPC title

• B65G51/02

  Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases · CPC title

• C23C16/54

  Apparatus specially adapted for continuous coating · CPC title

• C23C16/455 Primary

  characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber · CPC title