Capacitive tuning circuit using RF switches with PCM capacitors and PCM contact capacitors

Patent metadata

Field	Value
Publication number	US-10833004-B2
Application number	US-201916247225-A
Country	US
Kind code	B2
Filing date	Jan 14, 2019
Priority date	Aug 14, 2018
Publication date	Nov 10, 2020
Grant date	Nov 10, 2020

Abstract

A capacitive tuning circuit includes radio frequency (RF) switches connected to an RF line. Each RF switch includes a phase-change material (PCM), a heating element underlying an active segment of the PCM and extending outward and transverse to the PCM, and RF terminals having lower metal portions and upper metal portions. Alternatively, the RF terminals can have a trench metal liner separated from a trench metal plug by a dielectric liner. At least one capacitor is formed in part by at least one of the lower metal portions, upper metal portions, or trench metal liner. The capacitive tuning circuit can be set to a desired capacitance value when a first group of the RF switches is in an OFF state and a second group of the RF switches is in an ON state.

First claim

The invention claimed is:

1. A capacitive tuning circuit for capacitive loading of an RF line, said capacitive tuning circuit comprising:
RF switches connected to said RF line, each of said RF switches including:
a phase-change material (PCM) and a heating element underlying an active segment of said PCM and extending outward and transverse to said PCM;
RF terminals comprising lower metal portions and upper metal portions, said RF terminals being coupled to said RF line;
at least one of said lower metal portions of said RF terminals being ohmically separated from and capacitively coupled to passive segments of said PCM;
said upper metal portions of said RF terminals being ohmically connected to said lower metal portions of said RF terminals;

said capacitive tuning circuit being set to a desired capacitance value when a first group of said RF switches is in an OFF state and a second group of said RF switches is in an ON state.

2. The capacitive tuning circuit of claim 1 , wherein each RF switch in said OFF state represents a PCM capacitor that is utilized for fine tuning said capacitive tuning circuit.

3. The capacitive tuning circuit of claim 2 , wherein said PCM capacitor is formed by an amorphized active segment of said PCM and said passive segments of said PCM.

4. The capacitive tuning circuit of claim 2 , wherein each RF switch in said ON state represents a PCM contact capacitor that is utilized for coarse tuning said capacitive tuning circuit.

5. The capacitive tuning circuit of claim 4 , wherein said PCM contact capacitor is formed by said passive segments of said PCM, an RF terminal dielectric segment, and said lower metal portions of said RF terminals.

6. The capacitive tuning circuit of claim 5 , wherein said PCM contact capacitor is at least one order of magnitude greater than said PCM capacitor.

7. The RF switch of claim 1 , wherein said PCM is selected from the group consisting of germanium telluride (Ge X Te Y ), germanium antimony telluride (Ge X Sb Y Te Z ), germanium selenide (Ge X Se Y ), and any other chalcogenide.

8. A capacitive tuning circuit for capacitive loading of an RF line, said capacitive tuning circuit comprising:
RF switches connected to said RF line, each of said RF switches including:
a phase-change material (PCM) and a heating element underlying an active segment of said PCM and extending outward and transverse to said PCM;
RF terminals comprising lower metal portions and upper metal portions;
said lower metal portions of said RF terminals being ohmically connected to passive segments of said PCM;
said upper metal portions of said RF terminals made from a first interconnect metal, wherein at least one of said upper metal portions of said RF terminals is capacitively coupled by a capacitor formed in part by said first interconnect metal;

said capacitive tuning circuit being set to a desired capacitance value when a first group of said RF switches is in an OFF state and a second group of said RF switches is in an ON state.

9. The capacitive tuning circuit of claim 8 , wherein said upper metal portions of said RF terminals are ohmically separated from and capacitively coupled to said lower metal portions of said RF terminals.

10. The capacitive tuning circuit of claim 8 , wherein each RF switch in said OFF state represents a PCM capacitor that is utilized for fine tuning said capacitive tuning circuit.

11. The capacitive tuning circuit of claim 10 , wherein said PCM capacitor is formed by an amorphized active segment of said PCM and said passive segments of said PCM.

12. The capacitive tuning circuit of claim 10 , wherein each RF switch in said ON state represents a PCM contact capacitor that is utilized for coarse tuning said capacitive tuning circuit.

13. The capacitive tuning circuit of claim 12 , wherein said PCM contact capacitor is a MOM capacitor formed by said lower metal portion, a pre-metal dielectric, and said first interconnect metal.

14. The capacitive tuning circuit of claim 12 , wherein said PCM contact capacitor is at least one order of magnitude greater than said PCM capacitor.

15. The capacitive tuning circuit of claim 8 , wherein said PCM is selected from the group consisting of germanium telluride (Ge X Te Y ), germanium antimony telluride (Ge X Sb Y Te Z ), germanium selenide (Ge X Se Y ), and any other chalcogenide.

16. A capacitive tuning circuit for capacitive loading of an RF line, said capacitive tuning circuit comprising:
RF switches connected to said RF line, each of said RF switches including:
a phase-change material (PCM) and a heating element underlying an active segment of said PCM and extending outward and transverse to said PCM;
RF terminals comprising a trench metal liner separated from a trench metal plug by a dielectric liner;
said trench metal liner of said RF terminals being ohmically connected to passive segments of said PCM;
said trench metal plug of at least one of said RF terminals being ohmically separated from and capacitively coupled to said trench metal liner of said RF terminals;

said capacitive tuning circuit being set to a desired capacitance value when a first group of said RF switches is in an OFF state and a second group of said RF switches is in an ON state.

17. The capacitive tuning circuit of claim 16 , wherein each RF switch in said OFF state represents a PCM capacitor that is utilized for fine tuning said capacitive tuning circuit.

18. The capacitive tuning circuit of claim 17 , wherein said PCM capacitor is formed by an amorphized active segment of said PCM and said passive segments of said PCM.

19. The capacitive tuning circuit of claim 17 , wherein each RF switch in said ON state represents a PCM contact capacitor that is utilized for coarse tuning said capacitive tuning circuit.

20. The capacitive tuning circuit of claim 19 , wherein said PCM contact capacitor is a trench capacitor formed by said trench metal plug of said RF terminals, said dielectric liner, and said trench metal liner of said RF terminals.

Assignees

• Newport Fab Llc
• Newport Fab Llc Dba Jazz Semiconductor

Inventors

• El-Hinnawy Nabil
• Slovin Gregory P
• Rose Jefferson E
• Howard David J

Classifications

• H10W44/20

  at high-frequency [HF] or radio frequency [RF] · CPC title

• H10W20/496 Primary

  Capacitor integral with wiring layers · CPC title

• H10B63/10

  Phase change RAM [PCRAM, PRAM] devices · CPC title

• H10N79/00

  Integrated devices, or assemblies of multiple devices, comprising at least one solid-state element covered by group H10N70/00 (ReRAM devices H10B63/00; PCRAM devices H10B63/10) · CPC title

• H01L45/06

  Electricity · mapped topic