Overmolded lead frame assembly for pressure sensing applications

Patent metadata

Field	Value
Publication number	US-10830656-B2
Application number	US-201815995594-A
Country	US
Kind code	B2
Filing date	Jun 1, 2018
Priority date	Jun 1, 2018
Publication date	Nov 10, 2020
Grant date	Nov 10, 2020

Abstract

A process of forming an overmolded lead frame assembly for a pressure sensing application includes clamping both sides of a lead frame to performing a primary overmolding operation to prevent resin flash on wire bonding areas on the lead frame. The process also includes performing the primary overmolding operation to form a primary mold that covers selected portions of the lead frame on first and second sides of the lead frame assembly. The primary mold forms an electronics cavity on the first side of the lead frame assembly to enable subsequent wire-bonding of a microelectromechanical system (MEMS) pressure sensing element to the wire bonding areas. The process further includes performing a secondary overmolding operation to form a secondary mold on the second side of the lead frame assembly. The secondary mold covers an exposed portion of the lead frame beneath the wire bonding areas.

First claim

What is claimed is:

1. A process of forming an overmolded lead frame assembly for a pressure sensing application, the process comprising:
performing a primary overmolding operation that includes overmolding a frontside and a backside of a lead frame with a first mold while clamping the lead frame at both the frontside and the backside of a wire bonding area on the lead frame, wherein clamping the lead frame at the wire bonding area prevents the frontside and the backside of the wire bonding area from being covered by the first mold during the primary overmolding operation and creates:
an electronics cavity that provides an opening within the first mold that exposes the frontside of the wire bonding area for subsequent wire-bonding of a microelectromechanical system (MEMS) pressure sensing element to the frontside of the wire bonding area; and
a pressure through-hole for placement of the MEMS pressure sensing element; and

performing a secondary overmolding operation that includes overmolding, with a second mold, a portion of a backside of the first mold and the backside of the wire bonding area that was prevented from being covered by the first mold, by clamping the frontside and the backside of the wire bonding area during the primary overmolding operation, while preventing the pressure through-hole from being covered by the second mold during the secondary overmolding operation.

2. The process of claim 1 , wherein the lead frame assembly includes an application-specific integrated circuit (ASIC) attached to the lead frame.

3. The process of claim 1 , further comprising prior to performing the secondary overmolding operation, performing a pre-conditioning operation on a portion of a backside of the first mold and the backside of the wire bonding area that was prevented from being covered by the first mold, by clamping the frontside and the backside of the wire bonding area during the primary overmolding operation.

4. The process of claim 3 , wherein the pre-conditioning operation includes a plasma treatment.

5. The process of claim 4 , wherein the plasma treatment utilizes hydrogen (H 2 ) gas or a mixture of hydrogen (H 2 ) gas and oxygen (O 2 ) gas.

6. The process of claim 1 , wherein the primary overmolding operation utilizes a thermoset epoxy resin to form the first mold, and wherein the secondary overmolding operation utilizes the same thermoset epoxy resin to form the second mold.

7. The process of claim 1 , wherein the primary overmolding operation utilizes a first thermoset epoxy resin to form the first mold, and wherein the secondary overmolding operation utilizes a second thermoset epoxy resin that is different from the first thermoset epoxy resin to form the second mold.

8. The process of claim 1 , wherein the primary overmolding operation results in formation of:
topside cavities that extend through the first mold from the electronics cavity to the wire bonding areas, the topside cavities providing electrical connection pathways for MEMS wire-bonds between the MEMS pressure sensing element and the wire bonding areas; and
backside cavities that extend through the first mold to the exposed portion of the lead frame beneath the wire bonding areas.

9. The process of claim 8 , wherein the second mold covers the backside cavities but does not cover the topside cavities.

10. The process of claim 8 , wherein the second mold maintains the pressure through-hole.

11. An overmolded lead frame assembly for pressure sensing applications, the overmolded lead frame assembly comprising:
a lead frame assembly that includes a lead frame, wherein the lead frame includes wire bonding areas;
a first mold covering a frontside and a backside of the lead frame, the first mold formed by a primary overmolding operation that overmolded the frontside and the backside of the lead frame with the first mold while the lead frame was clamped at both the frontside and the backside of the wire bonding area on the lead frame, wherein clamping the lead frame at the wire bonding area prevented the frontside and the backside of the wire bonding area from being covered by the first mold during the primary overmolding operation and created:
an electronics cavity that provides an opening within the first mold that exposes the frontside of the wire bonding area for subsequent wire-bonding of a microelectromechanical system (MEMS) pressure sensing element to the frontside of the wire bonding area; and
a pressure through-hole for placement of the MEMS pressure sensing element; and

a second mold that was formed by a secondary overmolding operation that overmolded, with the second mold, a portion of a backside of the first mold and the backside of the wire bonding area that was prevented from being covered by the first mold, by clamping the frontside and the backside of the wire bonding area during the primary overmolding operation, while preventing the pressure through-hole from being covered by the second mold during the secondary overmolding operation.

12. The overmolded lead frame assembly of claim 11 , wherein the lead frame assembly includes an application-specific integrated circuit (ASIC) attached to the lead frame.

13. The overmolded lead frame assembly of claim 11 , wherein the first mold is formed from a thermoset epoxy resin, and wherein the second mold is formed from the same thermoset epoxy resin.

14. The overmolded lead frame assembly of claim 11 , wherein the first mold is formed from a first thermoset epoxy resin, and wherein the second mold is formed from a second thermoset epoxy resin that is different from the first thermoset epoxy resin.

15. The overmolded lead frame assembly of claim 11 , wherein the first mold forms the pressure through-hole beneath the MEMS pressure sensing element to enable differential pressure measurement, and wherein the second mold maintains the pressure through-hole.

16. A pressure sensing package comprising:
a lead frame assembly that includes a lead frame, wherein the lead frame includes wire bonding areas;
a first mold covering a frontside and a backside of the lead frame, the first mold formed by a primary overmolding operation that overmolded the frontside and the backside of the lead frame with the first mold while the lead frame was clamped at both the frontside and the backside of the wire bonding area on the lead frame, wherein clamping the lead frame at the wire bonding area prevented the frontside and the backside of the wire bonding area from being covered by the first mold during the primary overmolding operation and created:
an electronics cavity that provides an opening within the first mold that exposes the frontside of the wire bonding area for subsequent wire-bonding of a microelectromechanical system (MEMS) pressure sensing element to the frontside of the wire bonding area; and
a pressure through-hole for placement of the MEMS pressure sensing element; and

a second mold that was formed by a secondary overmolding operation that overmolded, with the second mold, a portion of a backside of the first mold and the backside of the wire bonding area that was prevented from being covered by the first mold, by clamping the frontside and the backside of the wire bonding area during the primary overmolding operation, while preventing the pressure through-hole from being covered by the second mold during the secondary overmolding operation; and
the MEMS pressure sensing element disposed within the electronics cavity.

17. The pressure sensing package of claim 16 , wherein the lead frame assembly includes an application-specific integrated circuit (ASI

Assignees

• Sensata Technologies Inc

Inventors

• Bae Jun H
• Brown David T
• Herron Andrew C

Classifications

• H10W90/756

  between a chip and a stacked lead frame, conducting package substrate or heat sink · CPC title

• H10W70/421 Primary

  Shapes or dispositions · CPC title

• H10W70/04

  of leadframes · CPC title

• G01L1/00 Primary

  Measuring force or stress, in general (measuring force due to impact G01L5/00) · CPC title

• G01L19/0084 Primary

  to the outside of the housing (other details about the housing see G01L19/14) · CPC title