System and method for enhanced removal of metal hardmask using ultra violet treatment

Patent metadata

Field	Value
Publication number	US-10828680-B2
Application number	US-201414537652-A
Country	US
Kind code	B2
Filing date	Nov 10, 2014
Priority date	Nov 11, 2013
Publication date	Nov 10, 2020
Grant date	Nov 10, 2020

Abstract

Systems and methods for cleaning a substrate include a combined treatment of hydrogen peroxide and ultraviolet (UV) irradiation. Specific embodiments include the direct irradiation with 185/254 nm UV of a spinning substrate immersed under a liquid film of dilute hydrogen peroxide solution. Such a cleaning treatment can result in about a 100% improvement of TiN strip rate compared to processing with the same hydrogen peroxide solution without UV exposure. Such method can also be executed at room temperature and still provide improved cleaning efficiency.

First claim

The invention claimed is:

1. A method for cleaning a substrate, the method comprising:
receiving a substrate in a cleaning system, the cleaning system including a wet clean system, a processing chamber, and a fluid delivery sub system, the substrate including a hardmask layer deposited on an underlying layer;
spinning the substrate on a substrate holder in the processing chamber;
depositing a hydrogen peroxide solution on a top surface of the substrate;
irradiating the hydrogen peroxide solution on the substrate with ultraviolet (UV) electromagnetic radiation to create reactive oxygen species while the substrate is spinning, the UV electromagnetic radiation having a wavelength between approximately 185-400 nanometers, the hardmask being dissolved by irradiated hydrogen peroxide and being removed from the substrate by action of hydrogen peroxide flow and by action of spinning the substrate, wherein said irradiating comprises providing said UV at a radially non-uniform intensity to compensate for radially non-uniform thickness of the hydrogen peroxide solution on a top surface of the substrate.

2. The method of claim 1 , wherein irradiating the hydrogen peroxide solution includes irradiating with UV electromagnetic radiation having a wavelength between approximately 185-254 nanometers.

3. The method of claim 1 , wherein irradiating the hydrogen peroxide solution includes providing a UV electromagnetic radiation intensity greater than approximately 4 milliwatts per centimeter squared.

4. The method of claim 3 , wherein irradiating the hydrogen peroxide solution includes providing a UV electromagnetic radiation intensity greater than approximately 800 milliwatts per centimeter squared.

5. The method of claim 1 , wherein irradiating the hydrogen peroxide solution includes irradiating the UV electromagnetic radiation with an intensity per unit area sufficient to increase a hardmask strip rate by more than approximately 25% as compared to a strip rate of the hardmask without irradiation.

6. The method of claim 1 , wherein irradiating the hydrogen peroxide solution includes irradiating a central portion of the substrate at a first intensity and irradiating an edge portion of the substrate at a second intensity, wherein the first intensity is greater than the second intensity.

7. The method of claim 1 , further comprising, maintain a process temperature within the processing chamber that is less than approximately 50 degrees Celsius.

8. The method of claim 7 , wherein maintaining the process temperature within the processing chamber includes maintaining a temperature that is less than 30 degrees Celsius.

9. The method of claim 1 , further comprising, prior to depositing the hydrogen peroxide solution, depositing a polymer cleaning solution that removes a polymer layer from the substrate.

10. The method of claim 1 , wherein spinning the substrate includes spinning the substrate at a rotational velocity sufficient to cause the deposited hydrogen peroxide solution to have a film thickness of less than approximately 2000 microns.

11. The method of claim 10 , wherein spinning the substrate includes spinning the substrate at a rotational velocity sufficient to cause the deposited hydrogen peroxide solution to have a film thickness of less than approximately 200 microns.

12. The method of claim 11 , wherein spinning the substrate includes spinning the substrate at a rotational velocity sufficient to cause the deposited hydrogen peroxide solution to have a film thickness of less than approximately 20 microns.

13. The method of claim 1 , wherein the hydrogen peroxide solution has less than approximately 35% hydrogen peroxide by weight.

14. The method of claim 13 , wherein the hydrogen peroxide has between approximately 15% to 25% hydrogen peroxide by weight.

15. The method of claim 1 , wherein depositing the hydrogen peroxide solution includes, mixing a corrosion-prevention mixture with the hydrogen peroxide solution.

16. The method of claim 15 , wherein depositing the corrosion prevention mixture includes a mixture including a first agent that prevents corrosion of copper, a second agent that maintains metal species dissolved, a third agent that dissolves polymers, a chelating agent, and a pH buffer.

17. The method of claim 1 , wherein depositing the hydrogen peroxide solution includes dispensing liquid in pulses with sufficient hydrogen peroxide solution being dispensed such that the substrate is continuously covered with the hydrogen peroxide solution.

18. The method of claim 1 , wherein the hardmask layer is selected from a material having a density greater than a density of the underlying layer.

19. The method of claim 18 , wherein the hardmask layer comprises a material selected from the group consisting of Ti, W, Ta, Ge, and C.

20. The method of claim 18 , wherein the hardmask layer is a metal hardmask layer selected from the group consisting of titanium nitride (TiN), tantalum nitride (TaN), silicon carbide (SiC), and amorphous carbon.

Assignees

• Tokyo Electron Ltd

Inventors

• Brown Ian J

Classifications

• H10P72/0448

  Apparatus for applying a liquid, a resin, an ink or the like · CPC title

• H10P72/0436

  mainly by radiation · CPC title

• H10P72/0414

  using mainly spraying means, e.g. nozzles · CPC title

• B08B3/10

  with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration · CPC title

• B08B7/0057 Primary

  by ultraviolet radiation · CPC title