Method for treating a semiconductor device

Patent metadata

Field	Value
Publication number	US-10828679-B2
Application number	US-201916663099-A
Country	US
Kind code	B2
Filing date	Oct 24, 2019
Priority date	Mar 26, 2015
Publication date	Nov 10, 2020
Grant date	Nov 10, 2020

Abstract

A method of treating a sensor array including a plurality of sensors and an isolation structure, where a sensor of the plurality of sensors has a sensor pad exposed at a surface of the sensor array and the isolation structure is disposed between the sensor pad and sensor pads of other sensors of the plurality of sensors, comprises exposing the sensor pad and the isolation structure to a non-aqueous organo-silicon solution including an organo-silicon compound and a first non-aqueous carrier; applying an acid solution including an organic acid and a second non-aqueous carrier to the sensor pad; and rinsing the acid solution from the sensor pad and the isolation structure.

First claim

What is claimed is:

1. A method of treating a sensor array, the sensor array including a plurality of sensors, a sensor of the plurality of the sensors including a sensor pad, a well structure defining a well array having a plurality of wells, a well of the plurality of wells disposed over each sensor of the sensor array and providing an opening to the sensor pad, the method comprising:
applying a treatment solution to the well and to at least the sensor pad and waiting for a first period between 30 seconds and 30 minutes, the treatment solution including an organo-silicon compound, an organic acid and a first organic solvent;
rinsing at least the sensor pad with a second organic solvent; and
drying the sensor array.

2. The method of claim 1 , further comprising rinsing at least the sensor pad with water following rinsing with the second organic solvent and prior to drying.

3. The method of claim 1 , further comprising attaching a lid over the sensor array and the well array, the lid including a fluid port, and providing a space defined between the lid and the well array in fluid communication with the fluid port.

4. The method of claim 1 , wherein the organo-silicon compound includes a silane functionalized with an aryl, polyaryl, alkyl, alkoxy, halo, or cyano moiety, or any combination thereof.

5. The method of claim 1 , wherein the organo-silicon compound includes a polysiloxane including aryl, dialkyl or alkylhydro units, or combinations thereof.

6. The method of claim 1 , wherein the organo-silicon compound includes a siloxane selected from the group consisting of an alkyl terminated polydimethylsiloxane, a hydride-terminated polydimethylsiloxane, a monovinyl terminated polydimethylsiloxane, dichloro-tetramethyldisiloxane, hexamethyltrisiloxane, polymethylhydrosiloxane, tris(trimethylsilyloxy)silane, octamethyltrisiloxane, and a combination thereof.

7. The method of claim 1 , wherein the organo-silicon compound has a molecular weight in a range of 50 Da to 10000 Da.

8. The method of claim 1 , wherein the treatment solution includes the organo-silicon compound in an amount of 0.001% to 10.0% by weight.

9. The method of claim 1 , wherein the treatment solution further includes a platinum compound.

10. The method of claim 1 , wherein the organic acid includes sulfonic acid.

11. The method of claim 1 , wherein the treatment solution includes between 0.5 wt % and 25 wt % of the acid.

12. The method of claim 1 , wherein the first organic solvent is non-polar.

13. The method of claim 1 , wherein the first organic solvent has a normal boiling point in a range of 36° C. to 345° C.

14. The method of claim 1 , further comprising heating the sensor pad and the treatment solution while exposing the sensor pad to the treatment solution, wherein heating includes heating at a temperature in a range of 35° C. to 70° C.

15. The method of claim 1 , further comprising exposing at least the sensor pad to a basic solution.

16. The method of claim 1 , wherein rinsing includes rinsing with the second organic solvent having a boiling point in a range of 25° C. to 100° C.

17. The method of claim 4 , wherein the silane is selected from the group consisting of phenyldimethylchlorosilane, tert-butylchlorodiiphenylsilane, chlorotripropylsilane, (N,N-dimethylamino) trimethyl-silane, tris(trimethylsilyl)silane, triethylchlorosilane, 3-cyanopropyldimethylchloro-silane, chlorotriethylsilane, 1,2-bis(chlorodimethylsiyl)ethane, trimethylsilyltrifluoronesulfonate, trioctylsilane, dodecyldimethylchlorosilane, chlorodimethylthexylsilane, trimethylchlorosilane, chloro(chloromethyl) dimethylsilane, thexyldimethylchlorosilane, triisopropylchlorosilane, trimethylmethoxysilane, trimethylchlorosilane, chlorotriisopropylsilane, acetoxytrimethylsilane, and a combination thereof.

18. The method of claim 10 , wherein the sulfonic acid includes alkyl sulfonic acid, alkyl aryl sulfonic acid, or a combination thereof.

19. The method of claim 16 , wherein the second organic solvent includes an alcohol.

20. The method of claim 18 , wherein the alkyl aryl sulfonic acid includes an alkyl group having between 1 and 20 carbons.

Assignees

• Life Technologies Corp

Inventors

• Ball James A
• Waggoner Phil
• Parker Scott

Classifications

• H10P70/20

  Cleaning during device manufacture · CPC title

• B08B3/10

  with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration · CPC title

• B08B3/08 Primary

  the liquid having chemical or dissolving effect · CPC title

• G01N27/4148

  Integrated circuits therefor, e.g. fabricated by CMOS processing · CPC title

• G01N27/4145 Primary

  specially adapted for biomolecules, e.g. gate electrode with immobilised receptors · CPC title