Method for treating a semiconductor device

Patent metadata

Field	Value
Publication number	US-10041904-B2
Application number	US-201715704695-A
Country	US
Kind code	B2
Filing date	Sep 14, 2017
Priority date	Mar 29, 2013
Publication date	Aug 7, 2018
Grant date	Aug 7, 2018

Abstract

A sensor array includes a plurality of sensors. A sensor of the plurality of sensors has a sensor pad exposed at a surface of the sensor array. A method of treating the sensor array includes exposing at least the sensor pad to a wash solution including sulfonic acid and an organic solvent and rinsing the wash solution from the sensor pad.

First claim

What is claimed is:

1. A method of treating a sensor array, the sensor array including a plurality of sensors, a sensor of the plurality of sensors having a sensor pad exposed at a surface of the sensor array, the method comprising:
exposing at least the sensor pad to a wash solution comprising sulfonic acid and an organic solvent; and
rinsing the wash solution from the sensor pad.

2. The method of claim 1 , wherein the sulfonic acid includes alkyl sulfonic acid, alkyl aryl sulfonic acid, or a combination thereof.

3. The method of claim 1 , wherein the alkyl aryl sulfonic acid includes an alkyl group having between 1 and 20 carbons.

4. The method of claim 1 , wherein the sulfonic acid includes dodecyl benzene sulfonic acid.

5. The method of claim 1 , wherein the wash solution includes between 10 mM and 500 mM of the sulfonic acid.

6. The method of claim 1 , wherein the wash solution includes between 0.5 wt % and 25 wt % of the sulfonic acid.

7. The method of claim 1 , wherein the organic solvent is non-polar.

8. The method of claim 1 , wherein the organic solvent has a boiling point in a range of 36° C. to 345° C.

9. The method of claim 1 , wherein the organic solvent is an alkane having between 6 and 24 carbons.

10. The method of claim 1 , wherein the organic solvent is a polar aprotic solvent.

11. The method of claim 1 , further comprising heating the sensor pad and the wash solution while exposing the sensor pad to the wash solution at a temperature in a range of 35° C. to 70° C.

12. The method of claim 1 , wherein exposing includes exposing for a period in a range of 30 seconds to 30 minutes.

13. The method of claim 1 , further comprising exposing at least the sensor pad to a basic solution following exposing the sensor pad to the wash solution.

14. The method of claim 1 , wherein rinsing includes rinsing with a rinse organic solvent miscible with water and the organic solvent.

15. The method of claim 10 , wherein the polar aprotic solvent includes tetrahydrofuran, ethylacetate, acetone, dimethylformamide, acetonitrile, dimethyl sulfoxide, N-methyl pyrrolidone, or combinations thereof.

16. The method of claim 13 , wherein the basic solution includes between 0.005M and 1.5M sodium hydroxide.

17. The method of claim 14 , wherein the rinse organic solvent includes alcohol.

18. A method of treating a sensor array, the sensor array including a plurality of sensors, a sensor of the plurality of the sensors including a sensor pad, a well structure disposed over the sensory array and defining wells of a well array corresponding with the sensor array, a well of the well array providing an opening to the sensor pad, a cap attached over the sensor array and the well structure and including a fluid port and a space defined between the cap and the well structure, the method comprising:
applying a wash solution through the fluid port into the space and waiting for a first period between 30 seconds and 30 minutes, the wash solution comprising sulfonic acid and an organic solvent;
applying a basic solution through the fluid port into the space and waiting for a second period between 20 seconds and 15 minutes; and
applying a rinse solution through the fluid port.

19. The method of claim 18 , further comprising repeating applying the wash solution, applying the basic solution, and applying the rinse solution.

Assignees

• Life Technologies Corp

Inventors

• Ball James
• Reed Brian

Classifications

• C11D3/43

  Solvents · CPC title

• C11D7/5022

  containing oxygen · CPC title

• B08B3/08

  the liquid having chemical or dissolving effect · CPC title

• C11D7/5013

  containing nitrogen · CPC title

• B08B9/08

  Cleaning containers, e.g. tanks · CPC title