Baking device for a wafer coated with a coating containing a solvent

Patent metadata

Field	Value
Publication number	US-10825701-B2
Application number	US-201514948877-A
Country	US
Kind code	B2
Filing date	Nov 23, 2015
Priority date	Nov 25, 2014
Publication date	Nov 3, 2020
Grant date	Nov 3, 2020

Abstract

A baking device for a wafer coated with a coating containing a solvent is described, having a baking chamber, a support for the wafer, an inlet for a purge gas, and an evacuation for the purge gas charged with solvent evaporated from the coating. The inlet is formed as a diffusion element arranged above the wafer so as to admit the purge gas evenly over substantially the entire surface of the wafer, and the evacuation is formed as an evacuation ring which radially surrounds the diffusion element and is arranged at a ceiling of the baking chamber.

First claim

What is claimed is:

1. A baking device for a wafer coated with a coating containing a solvent, the baking device comprising:
a baking chamber;
a support for the wafer, the support being integrated within the baking chamber and configured for placement of the wafer on the support;
an inlet for purge gas, the inlet being formed as a diffusion element arranged above the wafer so as to admit the purge gas evenly over substantially the entire surface of the wafer;
an evacuation for the purge gas charged with solvent evaporated from the coating, the evacuation being formed as an evacuation ring radially surrounding the diffusion element and arranged at a ceiling of the baking chamber, wherein the evacuation ring provides a flow connection out of the baking chamber at the ceiling; and
a discharge system that connects with an exhaust system, the discharge system comprising a plurality of discharge channels connected to the flow connection, wherein the plurality of discharge channels are connected to an evacuation channel formed behind the evacuation ring, wherein the evacuation channel and the plurality of discharge channels are integrated into a ceiling element which forms the ceiling of the baking chamber and which centrally comprises the diffusion element.

2. The device of claim 1 , wherein the diffusion element has a plurality of inlet openings distributed over its surface.

3. The device of claim 2 , wherein the diffusion element is a sintered plate having a defined gas porosity.

4. The device of claim 2 , wherein the diffusion element is a plate at which the inlet openings were formed by at least one of etching, laser drilling and mechanical drilling.

5. The device of claim 1 , wherein a distribution chamber is provided behind the diffusion element.

6. The device of claim 1 , wherein the evacuation ring is arranged radially outwardly of the wafer.

7. The device of claim 1 , wherein a diameter of the evacuation ring corresponds approximately to a diameter of the support.

8. The device of claim 1 , wherein an additional purge gas entrance to the baking chamber is provided along a perimeter of the support.

9. The device of claim 1 , wherein a heating system for at least one of the surfaces of the baking chamber is provided to heat the evacuation ring.

10. The device of claim 1 , wherein a heating system is incorporated into the support.

11. The device of claim 1 , wherein the evacuation ring has a plurality of holes formed therein.

12. The device of claim 1 , wherein an annular evacuation channel is formed behind the evacuation ring.

13. The device of claim 12 , wherein the discharge system connects the evacuation channel with the exhaust system, and wherein the plurality of discharge channels is connected to the evacuation channel at evenly distributed locations.

14. A baking device for a wafer coated with a coating containing a solvent, the baking device comprising:
a baking chamber;
a support for the wafer, the support being integrated within the chamber and configured for placement of the wafer on the support;
an inlet for purge gas, the inlet being formed as a diffusion element arranged above the wafer so as to admit the purge gas evenly over substantially the entire surface of the wafer; and
an evacuation for the purge gas charged with solvent evaporated from the coating, the evacuation being formed as an evacuation ring radially surrounding the diffusion element and arranged at a ceiling of the baking chamber, wherein the evacuation ring provides a flow connection out of the baking chamber at the ceiling, the evacuation ring at least partially capping an exhaust pathway out of the baking chamber, and wherein the evacuation ring clamps the diffusion element to a ceiling element which forms the ceiling of the baking chamber.

Assignees

• Suss Microtec Lithography Gmbh

Inventors

• George Gregory
• Foley Aaron
• Treichel Oliver

Classifications

• H10P72/0462

  characterised by the construction of the processing chambers, e.g. modular processing chambers · CPC title

• H10P72/0434

  mainly by convection · CPC title

• H10P72/0432 Primary

  mainly by conduction · CPC title

• H10P72/0431

  Apparatus for thermal treatment · CPC title

• H10P72/0408 Primary

  for drying · CPC title