Baking device for a wafer coated with a coating containing a solvent
US-10825701-B2 · Nov 3, 2020 · US
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Patent family 55914101
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 55914101 |
| Family type | — |
| Earliest priority | Nov 25, 2014 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US10825701B2 — Baking device for a wafer coated with a coating containing a solvent |
Representative publication
Best representative member for this family based on priority and filing country.
US10825701B2 — Baking device for a wafer coated with a coating containing a solvent (published Nov 3, 2020)
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