Ultrasonic treatment apparatus

Patent metadata

Field	Value
Publication number	US-10773280-B2
Application number	US-201715800751-A
Country	US
Kind code	B2
Filing date	Nov 1, 2017
Priority date	Nov 10, 2016
Publication date	Sep 15, 2020
Grant date	Sep 15, 2020

Abstract

An ultrasonic treatment apparatus including: an ultrasonic bath for performing an ultrasonic treatment on a treatment target object; a first ultrasonic vibrator provided on the front surface side of the treatment target object; and a second ultrasonic vibrator provided on the back surface side of the treatment target object; wherein the first ultrasonic vibrator does not face the second ultrasonic vibrator.

First claim

What is claimed is:

1. An ultrasonic treatment apparatus comprising:
an ultrasonic bath for performing an ultrasonic treatment on a treatment target object;
a first ultrasonic vibrator having an ultrasonic oscillation surface provided on a front surface side of the treatment target object;
a second ultrasonic vibrator having an ultrasonic oscillation surface provided on a back surface side of the treatment target object;
a first reflector having a reflection surface facing the first ultrasonic vibrator; and
a second reflector having a reflection surface facing the second ultrasonic vibrator,
wherein the reflection surface of the first reflector is located in front of the ultrasonic oscillation surface of the first ultrasonic vibrator with the treatment target object situated therebetween,
wherein the reflection surface of the second reflector is located in front of the ultrasonic oscillation surface of the second ultrasonic vibrator with the treatment target object situated therebetween, and
wherein the first ultrasonic vibrator does not face the second ultrasonic vibrator,
the reflection surface of the first reflector is configured to reflect an ultrasonic wave transmitted from the first ultrasonic vibrator back along a same path of approach to the back surface side of the treatment target object, and the reflection surface of the second reflector is configured to reflect an ultrasonic wave transmitted from the second ultrasonic vibrator back along a same path of approach to the front surface side of the treatment target object.

2. The ultrasonic treatment apparatus according to claim 1 , wherein each of the ultrasonic vibrators includes a plurality of ultrasonic oscillators and a plate member provided in contact with an ultrasonic oscillation side of the ultrasonic oscillators.

3. The ultrasonic treatment apparatus according to claim 2 , wherein
the ultrasonic bath further includes:
a third ultrasonic vibrator provided on the front surface side of the treatment target object; and
a fourth ultrasonic vibrator provided on the back surface side of the treatment target object,
wherein the ultrasonic oscillators are disposed such that any horizontal lines passing through central parts of the ultrasonic oscillators constituting the first ultrasonic vibrator does not overlap any horizontal lines passing through central parts of the ultrasonic oscillators constituting the third ultrasonic vibrator, and
such that any horizontal lines passing through central parts of the ultrasonic oscillators constituting the second ultrasonic vibrator does not overlap any horizontal lines passing through central parts of the ultrasonic oscillators constituting the fourth ultrasonic vibrator.

4. The ultrasonic treatment apparatus according to claim 1 , wherein the ultrasonic treatment apparatus further includes a conveyance mechanism for the treatment target object.

5. The ultrasonic treatment apparatus according to claim 1 , further comprising:
a front bath provided on an entrance side of the ultrasonic bath; and
a rear bath provided on an exit side of the ultrasonic bath,
wherein open/close mechanisms which open toward an ultrasonic bath side is provided between the baths.

6. An ultrasonic treatment apparatus comprising:
an ultrasonic bath for performing an ultrasonic treatment on a treatment target object;
an ultrasonic vibrator which transmits an ultrasonic wave toward the treatment target object;
a conveyance mechanism for the treatment target object;
a guide member facing a front surface of the treatment target object; and
a guide member facing a back surface of the treatment target object,
wherein each of the guide members has a plurality of wire members formed on a vertical plane, and
a longitudinal direction of each of the wire members being inclined with respect to the horizontal line.

7. The ultrasonic treatment apparatus according to claim 6 , wherein each of the guide members includes:
support pillars at each end of the longitudinal direction of the plurality of wire members; and
folding parts for the wire members being provided close to the support pillar, wherein
each of the wire members passes through an outer circumference of one of the support pillars and is folded back at one of the folding parts, and then passes through the outer circumference of the one of the support pillars and is stretched to the other of the support pillars.

8. An ultrasonic treatment apparatus comprising:
an ultrasonic bath for performing an ultrasonic treatment on a treatment target object;
an ultrasonic vibrator which transmits an ultrasonic wave toward the treatment target object;
a conveyance mechanism for the treatment target object;
a guide member facing a front surface of the treatment target object; and
a guide member facing a back surface of the treatment target object,
wherein each of the guide members has a plurality of wire members formed on a vertical plane, and
a longitudinal direction of each of the wire members being inclined with respect to the horizontal line,

wherein the wire members have conductivity to conduct electricity from a power supply.

9. The ultrasonic treatment apparatus according to claim 7 , wherein each of the support pillars has a groove formed in a spiral manner.

10. The ultrasonic treatment apparatus according to claim 7 , wherein each of the support pillars is provided with a horizontal position adjustment mechanism to adjust a distance to the treatment target object.

11. The ultrasonic treatment apparatus according to claim 6 , wherein each of the ultrasonic vibrators is configured with a plurality of ultrasonic oscillators which oscillates at different frequencies.

12. The ultrasonic treatment apparatus according to claim 6 , wherein each of the ultrasonic vibrators simultaneously oscillates at at least two different frequencies.

13. The ultrasonic treatment apparatus according to claim 6 , wherein each of the ultrasonic vibrators is driven at a variable frequency.

14. The ultrasonic treatment apparatus according to claim 6 , wherein each of the ultrasonic vibrators is provided with a horizontal position adjustment mechanism to adjust a distance to the treatment target object.

Assignees

• Uemura Kogyo Kk

Inventors

• Yamamoto Hisamitsu
• Utsumi Masayuki
• Saijo Yoshikazu
• Okuda Tomoji
• Nishinaka Yutaka
• Nakanishi Yoshinori

Classifications

• B08B3/12 Primary

  by sonic or ultrasonic vibrations · CPC title

• B06B1/02

  making use of electrical energy (B06B1/18, B06B1/20 take precedence) · CPC title

• H05K3/26

  Cleaning or polishing of the conductive pattern · CPC title

• B08B7/028

  Using ultrasounds · CPC title

• B06B1/10

  making use of mechanical energy (B06B1/18, B06B1/20 take precedence) · CPC title