Systems and methods for reducing the actuation voltage for electrostatic MEMS devices

Patent metadata

Field	Value
Publication number	US-10771040-B2
Application number	US-201816033573-A
Country	US
Kind code	B2
Filing date	Jul 12, 2018
Priority date	Jul 12, 2017
Publication date	Sep 8, 2020
Grant date	Sep 8, 2020

Abstract

Systems and methods to amplify the response of a MEMS micro-oscillator by driving the MEMS device at its electrical and mechanical resonance frequencies, simultaneously. This enhances the MEMS mechanical sensitivity to electrical excitation and increases the voltage across the MEMS capacitor. Moreover, using a combination of two input signals at different frequencies (beat signal) may be used to achieve double resonance in any MEMS device, even if its natural frequency is far from its electrical resonance.

First claim

The invention claimed is:

1. A method of actuating an electrostatic micro-electro-mechanical system (MEMS) micro-oscillator device, wherein the MEMS device has a natural mechanical resonance frequency and an internal electrical resonance frequency, the method comprising:
driving the MEMS device with a first alternating current (AC) signal; and
simultaneously driving the MEMS device with a second AC signal,
wherein a frequency of the first AC signal is within the 3-db bandwidth of, or substantially the same as, the internal electrical resonance frequency and wherein a difference between the frequency of the first AC signal and a frequency of the second AC signal is near to or substantially the same as the natural mechanical resonance frequency.

2. The method of claim 1 , wherein the MEMS oscillator device includes an electrode arrangement comprising a first electrode and a second electrode arranged parallel to the first electrode, wherein the second electrode is fixed and wherein at least a first end of the first electrode is able to move relative to the second electrode.

3. The method of claim 2 , wherein the natural mechanical resonance frequency ω n =√(k/m), and wherein the internal electrical resonance frequency ω e =1/√{square root over (L s C o ))}, wherein L s is the parasitic inductance of the electrode arrangement, wherein C o is a nominal capacitance of the electrode arrangement, wherein m is an effective mass of the first electrode and wherein k is a linear stiffness of the first electrode.

4. The method of claim 2 , further comprising applying a direct current (DC) signal to the first electrode.

5. A method of actuating an electrostatic micro-electro-mechanical system (MEMS) micro-oscillator device, wherein the MEMS device has a natural mechanical resonance frequency that is near to or substantially the same as an internal electrical resonance frequency of the MEMS device, the method comprising:
driving the MEMS device with a first alternating current (AC) signal, wherein a frequency of the first AC signal is near to or substantially the same as the internal electrical resonance frequency or the natural mechanical resonance frequency.

6. The method of claim 5 , wherein the MEMS oscillator device includes an electrode arrangement comprising a first electrode and a second electrode arranged parallel to the first electrode, wherein the second electrode is fixed and wherein at least a first end of the first electrode is able to move relative to the second electrode.

7. The method of claim 6 , further comprising applying a direct current (DC) signal to the first electrode.

Assignees

• Nutech Ventures

Inventors

• Alsaleem Fadi
• Hasan Mohammad H

Classifications

• G02B6/357

  Electrostatic force (electrostatic forces controlling reflecting elements in general G02B26/0841) · CPC title

• H03H2009/02283

  Vibrating means · CPC title

• H03H9/02259 Primary

  Driving or detection means · CPC title

• H03H3/0073

  Integration with other electronic structures · CPC title

• H03H9/2463

  Clamped-clamped beam resonators · CPC title