Systems and methods for reducing the actuation voltage for electrostatic MEMS devices
US-10771040-B2 · Sep 8, 2020 · US
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Patent family 64999222
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 64999222 |
| Family type | — |
| Earliest priority | Jul 12, 2017 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US10771040B2 — Systems and methods for reducing the actuation voltage for electrostatic MEMS devices |
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US10771040B2 — Systems and methods for reducing the actuation voltage for electrostatic MEMS devices (published Sep 8, 2020)
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