Electronic label-free DNA and genome sequencing

Patent metadata

Field	Value
Publication number	US-10737263-B2
Application number	US-201716076673-A
Country	US
Kind code	B2
Filing date	Feb 9, 2017
Priority date	Feb 9, 2016
Publication date	Aug 11, 2020
Grant date	Aug 11, 2020

Abstract

A method of manufacturing a device useable in DNA or genome sequencing comprises disposing pairs of electrodes on a substrate, the electrodes within each pair separated by a nanogap; depositing a resist layer over the electrodes; patterning the resist layer to create an exposed region on each electrode at or near each nanogap; roughening the electrode surface within each exposed region using various methods; and exposing the exposed regions to biomolecules, wherein one biomolecule bridges each nanogap of each electrode pair, with each end of each biomolecule bound to the electrodes at each exposed region.

First claim

We claim:

1. A method of manufacturing a device for DNA or genome sequencing, said method comprising:
disposing a pair of electrodes on a substrate, the electrodes separated by a nanogap;
depositing a resist layer over the pair of electrodes;
patterning the resist layer to create an exposed region on each electrode at or near the nanogap;
exposing the electrodes to plasma etching or gold (Au) ion beam implantation to roughen the surface within each exposed region; and
exposing the exposed regions to a biomolecule, wherein the biomolecule has at least first and second ends, with each end comprising a functionalization for bonding to the pair of electrodes,
wherein the biomolecule bridges the nanogap, with the first and second ends of the biomolecule being bound to the exposed regions.

2. The method of claim 1 , wherein the resist layer comprises an electrically insulating polymer or oxide coating of from about 3 nm to about 20 nm in thickness.

3. The method of claim 1 , wherein the electrodes comprise gold (Au).

4. The method of claim 1 , wherein the patterning comprises e-beam or nano-lithography.

5. The method of claim 1 , wherein the plasma etching comprises RF plasma, DC plasma or sputter etching processes.

6. The method of claim 1 , wherein the plasma etching or the Au ion beam implantation step results in an increase in the surface area of the electrode within each exposed region of at least 50% from the surface area of the exposed region prior to plasma etching or Au ion beam implantation.

7. A method of manufacturing a device for DNA or genome sequencing, said method comprising:
disposing a pair of electrodes on a substrate, the electrodes separated by a nanogap;
depositing a resist layer over the pair of electrodes;
patterning the resist layer to create an exposed region on each electrode at or near the nanogap;
exposing the electrodes to Au nanoparticles, wherein the Au nanoparticles attach to the electrode surfaces within each exposed region;
annealing an array at from about 200° to about 500° C. to bond the Au nanoparticles to the electrode surface; and
exposing the exposed regions to a biomolecule, wherein the biomolecule has at least first and second ends, with each end comprising a functionalization for bonding to the pair of electrodes,
wherein each biomolecule bridges the nanogap, with the first and second ends of the biomolecule being bound to the exposed regions.

8. The method of claim 7 , wherein the resist layer comprises an electrically insulating ceramic layer comprising Al 2 O 3 or SiO 2 .

9. The method of claim 7 , wherein the electrodes comprise gold (Au).

10. The method of claim 7 , wherein the patterning comprises e-beam or nano-lithography.

11. A method of manufacturing a device for DNA or genome sequencing, said method comprising:
disposing a pair of Au metal alloy electrodes on a substrate, the electrodes separated by a nanogap;
depositing a resist layer over the electrode pair;
patterning the resist layer to create an exposed region on each electrode at or near the nanogap;
exposing the electrodes to an etchant solution to selectively remove a non-Au metal from the alloy within each exposed region; and
exposing the exposed regions to a biomolecule, wherein the biomolecule has at least first and second ends, with each end comprising a functionalization for bonding to the pair of electrodes,
wherein each biomolecule bridges the nanogap, with the first and second ends of the biomolecule being bound to the exposed regions.

12. The method of claim 11 , wherein the Au metal alloy is selected from the group consisting of Au—Si, Au—Ge, Au—Bi, Au—Co, Au—Mo, Au—Rh, Au—Ru, and Au—W.

13. The method of claim 11 , wherein the resist layer comprises an electrically insulating ceramic layer comprising Al 2 O 3 or SiO 2 .

14. The method of claim 13 , further comprising a step of annealing at from about 200° to about 600° C. for about 10 minutes to about 12 hours to promote phase separation between the Au and non-Au metal.

15. A method of manufacturing a device for DNA or genome sequencing, said method comprising:
disposing a pair of electrodes on a substrate, the electrodes separated by a nanogap;
depositing a resist layer over the electrode pair;
patterning the resist layer to create an exposed region on each electrode at or near the nanogap;
depositing Au—Ag or Au—Cu alloy onto the electrode surface within each exposed region;
exposing the electrodes to an etchant solution to selectively remove the non-Au metal from the alloy deposited within each exposed region; and
exposing the exposed regions to a biomolecule, wherein the biomolecule has at least first and second ends, with each end comprising a functionalization for bonding to the pair of electrodes,
wherein each biomolecule bridges the nanogap, with the first and second ends of the biomolecule being bound to the exposed regions.

16. The method of claim 15 , wherein the resist layer comprises an electrically insulating ceramic layer comprising Al 2 O 3 or SiO 2 .

17. The method of claim 15 , wherein the electrodes comprise gold (Au).

18. The method of claim 15 , wherein the patterning comprises e-beam or nano-lithography.

19. A method of manufacturing a device for DNA or genome sequencing, said method comprising:
disposing a pair of electrodes on a substrate, the electrodes separated by a nanogap;
depositing a latchable magnetic layer over the electrodes;
depositing a resist layer over the latchable magnetic layer;
patterning the resist layer to create an exposed region at or near the nanogap in which the latchable magnetic layer is exposed;
exposing the electrodes to an external magnetic field or to an applied voltage to magnetize the latchable magnetic layer; and
exposing the exposed regions to a biomolecule, wherein the biomolecule has at least first and second ends with each end tagged with a magnetic nanoparticle for attraction to the magnetized latchable magnetic layer,
wherein the biomolecule bridges the nanogap, with each magnetic nanoparticle held to each electrode at the exposed regions.

20. The method of claim 19 , wherein the latchable magnetic layer comprises a FeCrCo or FeCuNi spinodal alloy with Hc higher than 10 Oe.

21. The method of claim 19 , further comprising the step of depositing a layer of Au over the latchable magnetic layer prior to the step of patterning the resist layer.

22. The method of claim 19 , wherein the magnetic layer is magnetized or demagnetized to enable magnetically attracted attachment of magnetic nanoparticle-tagged biomolecules or removal and cleaning-out of attached magnetic nanoparticle-tagged biomolecules with a permanent magnet sweep, allowing multiple repeat operations of the device.

23. A method of manufacturing a device for DNA or genome sequencing, said method comprising:
disposing a pair of platinum (Pt) or rhenium (Rh) electrodes on a substrate, the electrodes separated by a nanogap;
depositing a gold (Au) film measuring from about 1 nm to about 10 nm in thickness over the electrode pair;
patterning the resist layer to create an exposed region on each electrode at or near the nanogap;
annealing the electrodes to induce spheroidization of the Au film into Au spheres, with one sphere disposed within each exposed region;
etching the spheres to reduce the height of the spheres;
repeating the annealing and etching steps at least two more times; and
exposing the Au spheres to a bio

Assignees

• Roswell Biotechnologies Inc

Inventors

• Choi Chulmin
• Jin Sungho
• Mola Paul W
• Merriman Barry L

Classifications

• C12Q2565/631

  being a biochannel or pore · CPC title

• G01N33/48721

  Investigating individual macromolecules, e.g. by translocation through nanopores (Coulter counters in general G01N15/12; fabrication methods for nanoscale apertures B81B1/00; sequencing of nucleic acids C12Q1/68) · CPC title

• C12Q1/6869 Primary

  Methods for sequencing · CPC title

• C12Q1/00

  Measuring or testing processes involving enzymes, nucleic acids or microorganisms (measuring or testing apparatus with condition measuring or sensing means, e.g. colony counters, C12M1/34); Compositions therefor; Processes of preparing such compositions · CPC title

• G01N27/3278

  involving nanosized elements, e.g. nanogaps or nanoparticles (nanopores G01N33/48721; magnetic beads G01N27/745) · CPC title