Low warp fan-out processing method and production of substrates therefor
US-11875993-B2 · Jan 16, 2024 · US
US9108880B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9108880-B2 |
| Application number | US-200913059966-A |
| Country | US |
| Kind code | B2 |
| Filing date | Aug 18, 2009 |
| Priority date | Aug 18, 2008 |
| Publication date | Aug 18, 2015 |
| Grant date | Aug 18, 2015 |
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Systems, techniques and applications for nanoscale coating structures and materials that are superhydrophobic with a water contact angle greater than about 140° or 160° and/or superoleophobic with an oil contact angle greater than about 140° or 160°. The nanostructured coatings can include Si or metallic, ceramic or polymeric nanowires that may have a re-entrant or mushroom-like tip geometry. The nanowired coatings can be used in various self-cleaning applications ranging from glass windows for high-rise buildings and non-wash automobiles to pipeline inner surface coatings and surface coatings for biomedical implants.
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What is claimed is: 1. A method of making an article, comprising: forming a metal coating on a glass substrate; annealing the metal coating to form balled-up metal islands; coating over the balled-up metal islands with a protective layer including sputter deposition of Ti/Au over the balled-up metal islands while leaving corner regions between the balled-up metal islands and the glass substrate open to chemical etching to selectively protect at least a portion of the balled up…
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