Turntable cloth peeling jig

Patent metadata

Field	Value
Publication number	US-10730162-B2
Application number	US-201715638501-A
Country	US
Kind code	B2
Filing date	Jun 30, 2017
Priority date	Jul 8, 2016
Publication date	Aug 4, 2020
Grant date	Aug 4, 2020

Abstract

Disclosed is a turntable cloth peeling jig including: a cylindrical winding cylinder including a slit formed on an outer periphery of the cylindrical winding cylinder and extending in an axial direction thereof; a cloth clamping member disposed inside the winding cylinder and configured to clamp an outer peripheral edge of a cloth inserted into the slit; an extension bar attached to one end portion of the winding cylinder so as to extend coaxially therewith; an engaging portion provided at a tip end portion of the extension bar and engaged with a rotation jig configured to rotate the winding cylinder; and a handle provided in the engaging portion and configured to support the winding cylinder when rotating the rotating jig.

First claim

What is claimed is:

1. A turntable cloth peeling jig comprising:
a cylindrical winding cylinder including a slit formed on an outer periphery of the cylindrical winding cylinder and extending in an axial direction thereof;
a cloth clamping member disposed inside the winding cylinder and configured to clamp an outer peripheral edge of a cloth inserted into the slit;
an extension bar attached to one end portion of the winding cylinder so as to extend coaxially therewith;
an engaging portion provided at a tip end portion of the extension bar and engaged with a rotating jig extending radially with regard to the extension bar and configured to rotate the winding cylinder; and
a handle extending from an outer portion of the engaging portion, the handle extending radially with regard to the extension bar, and the handle being configured to support the winding cylinder, the handle and the outer portion of the engaging portion being configured to remain stationary when rotating the rotating jig relative to the handle to rotate the winding cylinder.

2. The turntable cloth peeling jig of claim 1 , wherein the engaging portion is a gear wrench that reduces a rotational torque of the rotating jig.

3. The turntable cloth peeling jig of claim 1 , wherein the cloth clamping member includes an upper member and a lower member that clamp the outer peripheral edge of the cloth from an upper side and a lower side thereof, and
the upper and lower members include mutually engageable teeth provided on mutually facing surfaces thereof.

4. The turntable cloth peeling jig of claim 1 , wherein the cloth clamping member includes an upper member and a lower member that clamp the outer peripheral edge of the cloth from an upper side and a lower side thereof, and
one of the upper and lower members includes a pin configured to break through the cloth when the outer peripheral edge of the cloth is clamped, and a remaining one of the upper and lower members includes a pin insertion hole into which the pin is inserted.

5. The turntable cloth peeling jig of claim 1 , wherein an axial length of the extension bar is longer than an axial length of the winding cylinder.

6. The turntable cloth peeling jig of claim 1 , wherein the engaging portion is a wrench.

7. A turntable cloth peeling jig comprising:
a cloth clamping member configured to clamp an outer peripheral edge of a cloth;
a handle configured to pull the cloth clamping member; and
an extension bar configured to connect the cloth clamping member and the handle,
wherein the cloth clamping member includes an upper member and a lower member that clamp the outer peripheral edge of the cloth from an upper side and a lower side thereof,
the upper and lower members include mutually engageable teeth provided on mutually facing surfaces thereof,
the teeth are provided over 5 cm or more in a longitudinal direction of the upper and lower members, and
one end of the extension bar is rotatably attached to a longitudinal end portion of the cloth clamping member, and another end of the extension bar is rotatably attached to a longitudinal end portion of the handle.

8. The turntable cloth peeling jig of claim 7 , wherein one of the upper and lower members includes a pin for breaking through the cloth when the outer peripheral edge of the cloth is clamped, and a remaining one the upper and lower members includes a pin insertion hole into which the pin is inserted.

9. The turntable cloth peeling jig of claim 7 , wherein at least a part of each of the upper member and the lower member is covered with a cover made of a soft member.

10. The turntable cloth peeling jig of claim 7 , wherein the handle has a U-shape and is directly fixed to the cloth clamping member.

Assignees

• Ebara Corp

Inventors

• Sotozaki Hiroshi
• Saito Kenichiro
• Sone Tadakazu

Classifications

• H10P90/129

  by polishing · CPC title

• H10P70/54

  Cleaning of wafer edges · CPC title

• H10P52/00

  Grinding, lapping or polishing of wafers, substrates or parts of devices · CPC title

• Y10T156/1978

  Delaminating bending means · CPC title

• Y10T156/195

  Delaminating roller means · CPC title