Deposition platform for flexible substrates and method of operation thereof

Patent metadata

Field	Value
Publication number	US-10689760-B2
Application number	US-201615351279-A
Country	US
Kind code	B2
Filing date	Nov 14, 2016
Priority date	Mar 28, 2013
Publication date	Jun 23, 2020
Grant date	Jun 23, 2020

Abstract

An apparatus for processing a flexible substrate is provided including a vacuum chamber having a first chamber portion, second chamber portion and third chamber portion. The apparatus further includes an unwinding shaft supporting the flexible substrate to be processed and a winding shaft supporting the flexible substrate after processing, wherein the unwinding shaft and the winding shaft are disposed in the first chamber portion, a first wall separating the first chamber portion from the second chamber portion, wherein the first wall is inclined with respect to a vertical and horizontal orientation, a coating drum having a first portion disposed in the second chamber portion and a second portion disposed in the third chamber portion, and a plurality of processing stations disposed at least partially in the third chamber portion, wherein a majority of the plurality of the processing stations are disposed below a rotational axis of the coating drum.

First claim

The invention claimed is:

1. An apparatus for processing a flexible substrate, comprising:
a vacuum chamber having a first chamber portion, a second chamber portion and a third chamber portion, the first chamber portion and second chamber portion being separated by a wall inclined at an angle relative to a vertical orientation, wherein the angle is at least 20 degrees;
an unwinding shaft for supporting the flexible substrate to be processed and a winding shaft for supporting the flexible substrate after processing, wherein the unwinding shaft and the winding shaft are disposed in the first chamber portion;
a first gap sluice separating the first chamber portion from the second chamber portion at a first position, the first gap sluice configured to open and close to provide a first vacuum seal between the first chamber portion and the second chamber portion at the first position;
a second gap sluice separating the first chamber portion from the second chamber portion at a second position, the second gap sluice configured to open and close to provide a second vacuum seal between the first chamber portion and the second chamber portion at the second position, wherein the first position is spaced apart from the second position in a vertical and horizontal direction;
a coating drum having a first portion disposed in the second chamber portion and a second portion disposed in the third chamber portion, the coating drum having a rotational axis; and
a plurality of processing stations disposed at least partially in the third chamber portion, wherein a majority of the plurality of the processing stations are disposed below the rotational axis of the coating drum.

2. The apparatus of claim 1 , wherein the first gap sluice is offset from the second gap sluice by about 20° and about 70° with respect to a vertical orientation.

3. The apparatus of claim 1 , wherein the rotational axis of the coating drum is disposed below a rotational axis of the unwinding shaft and a rotational axis of the winding shaft.

4. The apparatus of claim 1 , wherein
each processing station comprises a deposition source, and
each processing station is disposed at a vertical location of the rotational axis of the coating drum or below the rotational axis of the coating drum.

5. The apparatus of claim 1 , wherein the first gap sluice is configured to close on the flexible substrate to create the first vacuum seal.

6. The apparatus of claim 1 , wherein a majority of the second portion of the coating drum is located below the rotational axis of the coating drum.

7. The apparatus of claim 6 , wherein at least some of the second portion of the coating drum is located above the rotational axis of the coating drum.

Assignees

• Applied Materials Inc

Inventors

• Dieguez-Campo Jose Manuel
• Landgraf Heike
• Stolley Tobias
• Hein Stefan
• Ries Florian
• Neil Morrison

Classifications

• C23C16/509

  using internal electrodes · CPC title

• C23C14/562

  for coating elongated substrates · CPC title

• C23C16/45519

  Inert gas curtains · CPC title

• C23C16/44

  characterised by the method of coating (C23C16/04 takes precedence) · CPC title

• C23C16/4409

  characterised by sealing means · CPC title