Plasma processing apparatus

Patent metadata

Field	Value
Publication number	US-10679867-B2
Application number	US-201715590356-A
Country	US
Kind code	B2
Filing date	May 9, 2017
Priority date	May 12, 2016
Publication date	Jun 9, 2020
Grant date	Jun 9, 2020

Abstract

A capacitively-coupled plasma processing apparatus includes: at least one chamber body providing chambers separated from each other; upper electrodes respectively installed in upper spaces within the chambers; lower electrodes respectively installed in lower spaces within the chambers; a high frequency power supply; a transformer including a primary coil electrically connected to the high frequency power supply, and secondary coils each of which coils having a first end and a second end; first condensers respectively connected between each of the first ends of the secondary coils and the upper electrodes; and second condensers respectively connected between each of the second ends of the secondary coils and the lower electrodes. The primary coil extends around a central axis. The secondary coils are configured to be coaxially disposed with respect to the primary coil. A self-inductance of each of the secondary coils is smaller than that of the primary coil.

First claim

What is claimed is:

1. A capacitively-coupled plasma processing apparatus, comprising:
at least one chamber body providing two chambers separated from each other, the at least one chamber body being grounded;
first and second upper electrodes respectively installed in upper spaces within the two chambers;
first and second lower electrodes respectively installed in lower spaces within the two chambers;
a high frequency power supply;
a transformer including a primary coil electrically connected to the high frequency power supply, and first and second secondary coils configured by separate wirings;
a first condenser connected between a first end of the first secondary coil and the first upper electrode;
a second condenser connected between a second end of the first secondary coil and the second upper electrode;
a third condenser connected between a first end of the second secondary coil and the first lower electrode; and
a fourth condenser connected between a second end of the second secondary coil and the second lower electrode,
wherein the primary coil extends around a central axis,
the first and second secondary coils are configured to be coaxially disposed with respect to the primary coil,
each of the second ends of the third and fourth condensers floats from a ground electric potential, and
a self-inductance of each of the first and second secondary coils is smaller than that of the primary coil.

2. The apparatus of claim 1 , wherein the first to fourth condensers are fixed condensers.

3. The apparatus of claim 1 , wherein a winding of each of the first and second secondary coils is wound in an alternate relationship with a winding of the primary coil.

4. The apparatus of claim 1 , further comprising one or more fifth condensers,
wherein the primary coil extends around the central axis, and includes a plurality of coils arranged along a direction in which the central axis extends,
the plurality of coils and the one or more fifth condensers are alternately connected in a series relationship with each other, and
the windings of the first and second secondary coils are wound in an alternate relationship with each of the windings of the plurality of coils.

5. The apparatus of claim 1 , further comprising one or more fifth condensers,
wherein the primary coil extends around the central axis, and includes a plurality of coils arranged along a direction in which the central axis extends,
the plurality of coils and the one or more fifth condensers are alternately connected in a series relationship with each other, and
the first and second secondary coils are arranged in an alternate relationship with the plurality of coils in the direction in which the central axis extends.

6. The apparatus of claim 1 , wherein the primary coil is a single coil, and
one of the first and second secondary coils is disposed at a first side with respect to the center of the primary coil in the direction which the central axis extends, and the other of the first and second secondary coils is disposed at a second side with respect to the center of the primary coil in the direction which the central axis extends.

7. The apparatus of claim 1 , wherein each of the first and second secondary coils is configured to fluctuate around an axis extending in a direction parallel to the central axis outside a region surrounded by the primary coil.

8. The apparatus of claim 1 , wherein the first and second secondary coils do not overlap each other outside the region surrounded by the primary coil when viewed in the direction parallel to the central axis.

9. The apparatus of claim 1 , further comprising one or more magnetic shield plates installed between the first and second secondary coils outside the region surrounded by the primary coil.

10. The apparatus of claim 1 , wherein the primary coil and the first and second secondary coils have substantially the same sectional areas.

Assignees

• Tokyo Electron Ltd

Inventors

• Yamazawa Yohei

Classifications

• H01F21/04

  by relative movement of turns or parts of windings · CPC title

• H02M2001/007

  Electricity · mapped topic

• H01L21/3065

  Electricity · mapped topic

• H05K9/0007

  Casings (standardised racks H05K9/0062) · CPC title

• H01J37/32174 Primary

  Circuits specially adapted for controlling the RF discharge · CPC title