Plasma processing apparatus
US-10679867-B2 · Jun 9, 2020 · US
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Patent family 60297583
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 60297583 |
| Family type | — |
| Earliest priority | May 12, 2016 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US10679867B2 — Plasma processing apparatus |
Representative publication
Best representative member for this family based on priority and filing country.
US10679867B2 — Plasma processing apparatus (published Jun 9, 2020)
Member publications
Related publications in this family.
Plasma processing apparatus
US-2017330772-A1 · Nov 16, 2017 · US