Hydrogen co-gas when using aluminum iodide as an ion source material

Patent metadata

Field	Value
Publication number	US-10676370-B2
Application number	US-201815995707-A
Country	US
Kind code	B2
Filing date	Jun 1, 2018
Priority date	Jun 5, 2017
Publication date	Jun 9, 2020
Grant date	Jun 9, 2020

Abstract

An ion implantation system is provided having an ion source configured to form an ion beam from aluminum iodide. A beamline assembly selectively transports the ion beam to an end station configured to accept the ion beam for implantation of aluminum ions into a workpiece. An arc chamber forms a plasma from the aluminum iodide, where arc current from a power supply is configured to dissociate aluminum ions from the aluminum iodide. One or more extraction electrodes extract the ion beam from the arc chamber. A hydrogen co-gas source further introduces a hydrogen co-gas to react residual aluminum iodide and iodide, where the reacted residual aluminum iodide and iodide is evacuated from the system.

First claim

The invention claimed is:

1. An ion implantation system, comprising:
an aluminum iodide source material;
an ion source configured to ionize the aluminum iodide source material and form an ion beam therefrom, and whereby the ionization of the aluminum iodide source material further forms a by-product comprising a non-conducting material containing iodine;
a hydrogen introduction apparatus configured to introduce a reducing agent comprising hydrogen to the ion source, wherein the reducing agent is configured to alter a chemistry of the non-conducting material to produce a volatile gas by-product;
a beamline assembly configured to selectively transport the ion beam; and
an end station configured to accept the ion beam for implantation of ions into a workpiece.

2. The ion implantation system of claim 1 , wherein the hydrogen introduction apparatus comprises a hydrogen co-gas source, wherein the hydrogen from the reducing agent alters the chemistry of the non-conducting material to produce hydrogen iodide.

3. The ion implantation system of claim 1 , wherein the hydrogen introduction apparatus comprises a pressurized gas source.

4. The ion implantation system of claim 3 , wherein the pressurized gas source comprises one or more of hydrogen gas and phosphine.

5. The ion implantation system of claim 1 , further comprising a water introduction apparatus configured to introduce water vapor to the ion implantation system.

6. The ion implantation system of claim 1 , further comprising a vacuum system configured to substantially evacuate one or more enclosed portions of the ion implantation system.

7. The ion implantation system of claim 6 , wherein the one or more enclosed portions of the ion implantation system comprise the ion source.

8. The ion implantation system of claim 1 , wherein the aluminum iodide source material is in one of a solid form and a powder form.

9. The ion implantation system of claim 8 , further comprising a source material vaporizer operably coupled to the ion source, wherein the source material vaporizer is configured to vaporize the aluminum iodide source material.

10. A method for implanting aluminum ions into a workpiece using the system of claim 1 , the method comprising:
vaporizing an aluminum iodide source material;
providing the vaporized aluminum iodide source material to an ion source of an ion implantation system;
providing a hydrogen co-gas to the ion source;
ionizing the aluminum iodide source material in the ion source, wherein the hydrogen co-gas reacts with the vaporized aluminum iodide within the ion source to produce volatile hydrogen iodide gas;
removing the volatile hydrogen iodide gas via a vacuum system; and
implanting aluminum ions from the ionized aluminum iodide source material into a workpiece.

11. The method of claim 10 , wherein the aluminum iodide source material is initially in one of a solid and powder form.

12. The method of claim 10 , wherein providing the hydrogen co-gas to the ion source comprises providing one or more of hydrogen gas and phosphine to the ion source.

13. The method of claim 10 , further comprising cleaning one or more of residual aluminum iodide and iodide from one or more internal components of the ion implantation system by introducing water vapor to the one or more internal components of the ion implantation system.

14. The method of claim 13 , wherein introducing water vapor to the internal components of the ion implantation system comprises introducing atmospheric air to the one or more internal components of the ion implantation system.

15. The method of claim 13 , wherein introducing water vapor to the one or more internal components of the ion implantation system comprises controlling a flow of water to the one or more internal components through a supply line under vacuum, thereby vaporizing the water.

16. The method of claim 13 , further comprising evacuating the ion implantation system, therein substantially removing the water vapor and residual hydrogen iodide and I2.

Assignees

• Axcelis Tech Inc

Inventors

• Colvin Neil
• Hsieh Tseh-Jen
• Basson Neil

Classifications

• C23C16/448

  characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials · CPC title

• C01F7/48 Primary

  Halides, with or without other cations besides aluminium · CPC title

• H01J37/3171 Primary

  for ion implantation · CPC title

• H01L21/02019

  Electricity · mapped topic

• H01J37/08

  Ion sources; Ion guns · CPC title