Method for fabricating an electronic device and a stacked electronic device

Patent metadata

Field	Value
Publication number	US-10672721-B2
Application number	US-201816208038-A
Country	US
Kind code	B2
Filing date	Dec 3, 2018
Priority date	Nov 26, 2014
Publication date	Jun 2, 2020
Grant date	Jun 2, 2020

Abstract

A method for fabricating an electronic device includes fixing a rear face of an integrated-circuit chip to a front face of a support wafer. An infused adhesive is applied in the form of drops or segments that are separated from each other. A protective wafer is applied to the infused adhesive, and the infused adhesive is cured. The infused adhesive includes a curable adhesive and solid spacer elements infused in the curable adhesive. A closed intermediate peripheral ring is deposited on the integrated-circuit chip outside the cured infused adhesive, and an encapsulation block is formed such that it surrounds the chip, the protective wafer and the closed intermediate peripheral ring.

First claim

The invention claimed is:

1. A method, comprising:
fixing a rear face of an integrated-circuit chip to a front face of a support wafer;
depositing on a front face of the integrated-circuit chip an infused adhesive in a form of drops or segments at a distance from one another and positioned outside a central region of the front face of the integrated-circuit chip, the infused adhesive comprising a curable adhesive and solid spacer elements infused in the curable adhesive;
placing a protective wafer on the infused adhesive so that a free space remains between the front face of the integrated-circuit chip and a rear face of the protective wafer;
curing the curable adhesive to fix the protective wafer to the integrated-circuit chip;
producing an intermediate peripheral ring between the front face of the integrated-circuit chip and the rear face of the protective wafer after curing the curable adhesive; and
producing an encapsulation ring around the integrated-circuit chip, the protective wafer, and the intermediate peripheral ring on a peripheral zone of the front face of the support wafer.

2. The method of claim 1 , wherein producing the intermediate peripheral ring comprises curing a resin using ultraviolet radiation without releasing gas.

3. The method of claim 1 , wherein producing the encapsulating ring comprises supplying a coating material and curing the coating material.

4. The method of claim 1 , wherein curing the curable adhesive comprises heating to polymerize the curable adhesive and releasing gas.

5. The method of claim 1 , wherein producing the encapsulation ring comprises applying a liquid material in an area which surrounds a stack formed by the integrated-circuit chip and the protective wafer.

6. The method of claim 5 , further comprising curing the liquid material and dicing the support wafer and the cured liquid material to form an electronic device.

7. The method of claim 1 , wherein the intermediate peripheral ring completely surrounds the free space.

8. The method of claim 1 , wherein the intermediate peripheral ring completely surrounds the protective wafer along a peripheral edge of the protective wafer.

9. The method of claim 8 , wherein the intermediate peripheral ring is produced to be in contact with the peripheral edge of the protective wafer.

Assignees

• St Microelectronics Grenoble 2

Inventors

• Saxod Karine
• Sorrieul Marika

Classifications

• H01L2224/2929

  Electricity · mapped topic

• H01L2224/13291

  Electricity · mapped topic

• H01L24/73

  Electricity · mapped topic

• H01L2224/30135

  Electricity · mapped topic

• H01L23/3121

  Electricity · mapped topic