Transition radiation light sources

Patent metadata

Field	Value
Publication number	US-10665447-B2
Application number	US-201916294015-A
Country	US
Kind code	B2
Filing date	Mar 6, 2019
Priority date	Sep 6, 2016
Publication date	May 26, 2020
Grant date	May 26, 2020

Abstract

Transition radiation from nanotubes, nanosheets, and nanoparticles and in particular, boron nitride nanomaterials, can be utilized for the generation of light. Wavelengths of light of interest for microchip lithography, including 13.5 nm (91.8 eV) and 6.7 nm (185 eV), can be generated at useful intensities, by transition radiation light sources. Light useful for monitoring relativistic charged particle beam characteristics such as spatial distribution and intensity can be generated.

First claim

What is claimed is:

1. A transition radiation light source comprising:
a charged particle beam configured to pass a charged particle beam through a transition radiation production target and produce transition radiation light having a wavelength in the range of at least 13.5 nm to in the optical wavelength region;
the transition radiation production target having at least one transition radiation material comprising at least one of boron nitride nanotubes and boron nitride nanosheets.

2. The transition radiation light source of claim 1 , wherein the transition radiation material comprises at least one of boron nitride nanotube powder, boron nitride nanotube mats, boron nitride nanosheet powders, boron nitride nanosheet mats, boron nitride nanotube threads, and boron nitride nanosheet threads.

3. The transition radiation light source of claim 1 , wherein the transition radiation material comprises a combination of at least one boron nitride nanotube mat and boron nitride nanotube threads.

4. The transition radiation light source of claim 1 , wherein the charged particle beam comprises a relativistic charged particle beam.

5. The transition radiation light source of claim 1 , wherein the charged particle beam comprises an electron beam.

6. The transition radiation light source of claim 1 , further comprising an energy recovery linac.

7. The transition radiation light source of claim 1 , further comprising a plurality of transition radiation production targets.

8. The transition radiation light source of claim 7 , wherein each target in the plurality has at least one transition radiation material comprising at least one of boron nitride nanotubes and boron nitride nanosheets.

9. The transition radiation light source of claim 1 , wherein the transition radiation material further comprises additional particulates comprising at least one of boron nitride, aluminum oxide, aluminum nitride, and carbon boride.

10. The transition radiation light source of claim 9 , wherein the additional particulates have an average size configured for a desired light wavelength of produced transition radiation light.

11. A method for generating transition radiation light comprising:
passing a charged particle beam through a transition radiation target having at least one transition radiation material comprising at least one of boron nitride nanotubes and boron nitride nanosheets; and
emitting a transition radiation light from the transition radiation target, the emitted light having a wavelength in the range of at least 13.5 nm to in the optical wavelength region.

12. The method of claim 11 , wherein the at least one transition radiation material comprises at least one of boron nitride nanotube powder, boron nitride nanotube mats, boron nitride nanosheet powders, boron nitride nanosheet mats, boron nitride nanotube threads, and boron nitride nanosheet threads.

13. The method of claim 11 , wherein the at least one transition radiation material comprises a combination of at least one boron nitride nanotube mat and boron nitride nanotube threads.

14. The method of claim 11 , wherein the charged particle beam comprises a relativistic charged particle beam.

15. The method of claim 11 , wherein the charged particle beam comprises an electron beam.

16. The method of claim 11 , further comprising an energy recovery linac.

17. The method of claim 11 , further comprising a plurality of transition radiation production targets.

18. The method of claim 17 , wherein each target in the plurality has at least one transition radiation material comprising at least one of boron nitride nanotubes and boron nitride nano sheets.

19. The method of claim 1 , wherein the transition radiation material further comprises additional particulates comprising at least one of boron nitride, aluminum oxide, aluminum nitride, and carbon boride.

20. The method of claim 19 , wherein the additional particulates have an average size configured for a desired light wavelength of produced transition radiation light.

Assignees

• Bnnt Llc
• Jefferson Science Ass Llc

Inventors

• Jordan Kevin C
• Dushatinski Thomas G
• Smith Michael W
• Stevens Jonathan C
• Whitney R Roy

Classifications

• H01J63/06 Primary

  Lamps with luminescent screen excited by the ray or stream · CPC title

• H01J63/02

  Details, e.g. electrode, gas filling, shape of vessel · CPC title

• H05H3/00

  Production or acceleration of neutral particle beams, e.g. molecular or atomic beams · CPC title

• H05H9/00

  Linear accelerators · CPC title

• B82Y20/00

  Nanooptics, e.g. quantum optics or photonic crystals · CPC title