Fluidic sensor device having UV-blocking cover

Patent metadata

Field	Value
Publication number	US-10659000-B2
Application number	US-201715470111-A
Country	US
Kind code	B2
Filing date	Mar 27, 2017
Priority date	Mar 25, 2016
Publication date	May 19, 2020
Grant date	May 19, 2020

Abstract

A fluidic sensing device includes a first sidewall, a second sidewall, a bulk acoustic resonator structure, a biomolecule, and a cover. A fluidic channel is defined between the first and second sidewalls. The bulk acoustic resonator structure has a surface defining at least a portion of the bottom of the channel. The biomolecule is attached to the surface of the bulk acoustic resonator that forms the bottom of the channel. The cover is disposed over the channel and the first and second sidewalls. A portion of the cover disposed over the channel defines at least a portion of the top of the channel and blocks UV radiation from being transmitted through the cover. A first portion of the cover disposed over the first sidewall is transparent to UV radiation, and a second portion of the cover disposed over the second sidewall is transparent to UV radiation.

First claim

What is claimed is:

1. A fluidic sensing device comprising:
a fluidic channel having a first side, a second side, a top, and a bottom;
a first sidewall defining the first side of the fluidic channel;
a second sidewall spaced apart from the first sidewall and defining the second side of the fluidic channel;
a bulk acoustic resonator structure having a surface defining at least a portion of the bottom of the channel, wherein the bulk acoustic resonator structure comprises piezoelectric material arranged between a first electrode and a second electrode;
a biomolecule attached to the surface of the bulk acoustic resonator;
a cover disposed over the first and second sidewalls and attached to the first and second sidewalls, wherein the cover defines at least a portion of the top of the fluidic channel and wherein a portion of the cover disposed over the channel blocks transmission of ultraviolet (UV) radiation configured, wherein a first portion of the cover disposed over the first sidewall is transparent to UV radiation, and wherein a second portion of the cover disposed over the second sidewall is transparent to UV radiation.

2. A fluidic sensing device according to claim 1 , wherein the cover is attached to the first and second sidewalls via a cured UV-curable adhesive.

3. A fluidic sensing device according to claim 2 , wherein the UV-curable adhesive comprises a UV-curable epoxy adhesive.

4. A fluidic sensing device according to claim 1 , wherein cover comprises a UV blocking coating on the portion disposed over the fluidic channel.

5. A fluidic sensing device according to claim 4 , wherein the UV blocking coating comprises a compound that absorbs UV radiation.

6. A fluidic sensing device according to claim 5 , wherein the radiation blocking coating comprises a coating that is transparent to visible light.

7. A fluidic device according to claim 4 , wherein the UV blocking coating reflects UV radiation.

8. A fluidic sensing device according to claim 4 , wherein the coating is on a surface of the cover that faces the fluidic channel.

9. A fluidic sensing device according to claim 4 , wherein the cover has an outer surface and an inner surface, wherein the inner surface faces the fluidic channel, and wherein the coating is on one or both of the inner surface and the outer surface.

10. A fluidic sensing device according to claim 1 , wherein the cover has an outer surface and an inner surface, wherein the inner surface faces the fluidic channel, and wherein the cover defines an inlet extending from the outer surface to the inner surface, wherein the inlet is in communication with the fluidic channel.

11. A fluidic sensing device according to claim 1 , wherein the resonator structure comprises a via extending through the resonator structure, wherein the via is in communication with the fluidic channel.

12. A fluidic sensing device according to claim 1 , wherein the biomolecule comprises an antibody or an analyte-binding fragment thereof.

Assignees

• Qorvo Us Inc
• Qorvo Biotechnologies Llc

Inventors

• Diep Buu Quoc

Classifications

• H03H3/02

  for the manufacture of piezoelectric or electrostrictive resonators or networks (H03H3/08 takes precedence) · CPC title

• H03H9/175

  Acoustic mirrors · CPC title

• G01N29/24

  Probes {(transducers for acoustic waves B06B, G10K; for measuring G01H)} · CPC title

• H03H2003/027

  the resonators or networks being of the microelectro-mechanical [MEMS] type · CPC title

• H03H9/105

  the enclosure being defined by a cover cap mounted on an element forming part of the BAW device · CPC title