Thermal absorption coating on sapphire for epitaxial process

Patent metadata

Field	Value
Publication number	US-10651034-B2
Application number	US-201715474234-A
Country	US
Kind code	B2
Filing date	Mar 30, 2017
Priority date	Mar 30, 2016
Publication date	May 12, 2020
Grant date	May 12, 2020

Abstract

A method of forming an epitaxial layer on a substrate such as a sapphire wafer that does not readily absorb thermal radiation. The method includes coating a first side surface of the substrate with an energy-absorbing opaque material. The opaque material forms a thermally absorptive coating on the substrate. The coated substrate may be heated to remove contaminants from the thermally absorptive coating. The coated substrate is positioned in a vacuum deposition chamber and heated by directing radiative energy onto the thermally absorptive coating. An epitaxial layer such as GaN or SiGe is formed on a second side surface of the substrate opposite the thermally absorptive coating.

First claim

What is claimed is:

1. A method of forming an epitaxial layer on a sapphire substrate having first and second opposite side surfaces, the method comprising:
coating the first opposite side surface of the sapphire substrate with an energy-absorbing opaque paint that is stable at high temperatures to form a thermally absorptive coating on the first side of the sapphire substrate;
incrementally heating the coated sapphire substrate to remove contaminants originated from the thermally absorptive coating, wherein incrementally heating the coated sapphire substrate comprises baking the coated sapphire substrate at a first temperature below about 650° C. for a first time period, followed by baking the coated sapphire substrate at a second temperature above the first temperature and below 650° C. for a second time period, followed by baking the coated sapphire substrate at about 650° C. for a third time period and wherein the first time period, the second time period, and the third time period are each at least about 15 minutes;
cooling the coated sapphire substrate;
positioning the coated sapphire substrate in a vacuum deposition chamber;
heating the coated sapphire substrate in the vacuum deposition chamber by directing radiative energy onto the thermally absorptive coating on the first side of the sapphire substrate;
forming an epitaxial layer on the second side of the coated sapphire substrate opposite the thermally absorptive coating.

2. The method of claim 1 , wherein:
the paint is applied using a room temperature spray process.

3. The method of claim 2 , further comprising:
allowing the paint to dry at about room temperature before removing contaminants from the thermally absorptive coating by incrementally heating the coated sapphire substrate.

4. The method of claim 1 , wherein:
the paint comprises at least one pigment, wherein the at least one pigment comprises one or more of copper, chromium, or carbon black.

5. The method of claim 1 , further comprising:
polishing the first and second opposite side surfaces of the sapphire substrate; and
wherein the sapphire substrate comprises a C-plane sapphire material.

6. The method of claim 5 , further comprising:
forming the epitaxial layer on the second side of the coated sapphire substrate opposite the thermally absorptive coating by applying a molecular beam of target material to develop the epitaxial layer on the second opposite side surface after applying the paint on the epitaxial layer on the first opposite side surface.

7. The method of claim 1 , wherein:
the first temperature is about 400° C.;
the second temperature is about 500° C.;
incrementally heating the coated sapphire substrate comprises heating the coated sapphire substrate to about 650° C.; and
wherein the coated sapphire substrate is a wafer.

8. The method of claim 1 , further comprising:
forming an epitaxial layer of GaN on the second opposite side surface of the coated sapphire substrate;
wherein the coated sapphire substrate is heated in the vacuum deposition chamber to a temperature of at least about 850° C.; and
wherein the coated sapphire substrate is a wafer.

9. The method of claim 1 , further comprising:
forming an epitaxial layer of SiGe on the second opposite side surface of the coated sapphire substrate;
wherein the coated sapphire substrate is heated in the vacuum deposition chamber to a temperature of at least about 890° C.; and
wherein the coated sapphire substrate is a wafer.

10. The method of claim 1 , further comprising:
positioning the sapphire substrate in water;
removing the thermally absorptive coating by sonicating the water; and
wherein the coated sapphire substrate is a wafer.

11. A method of forming an epitaxial layer on a sapphire substrate having first and second opposite side surfaces, the method comprising:
coating the first opposite side surface of the sapphire substrate with an energy-absorbing opaque paint that is stable at high temperatures to form a thermally absorptive coating on the first side of the sapphire substrate;
incrementally heating the coated sapphire substrate to remove contaminants originated from the thermally absorptive coating;
cooling the coated sapphire substrate;
positioning the coated sapphire substrate in a vacuum deposition chamber;
heating the coated sapphire substrate in the vacuum deposition chamber by directing radiative energy onto the thermally absorptive coating on the first side of the sapphire substrate; and
forming an epitaxial layer on the second side of the coated sapphire substrate opposite the thermally absorptive coating,
wherein:
incrementally heating the coated sapphire substrate comprises heating the coated sapphire substrate to about 650° C.;
the coated sapphire substrate is a wafer; and
the coated sapphire substrate is baked at about 400° C. for about 15 minutes, followed by baking at about 500° C. for about 15 minutes, followed by baking at about 650° C. for at least about 20 minutes.

12. The method of claim 11 , further comprising:
allowing the coated sapphire substrate to cool at about room temperature to about 450° C. or less after baking the coated sapphire substrate at about 650° C.

13. A method of forming an epitaxial layer on a substrate having first and second opposite side surfaces, the method comprising:
coating at least a portion of the first opposite side surface of the substrate with an energy-absorbing opaque paint that is stable at high temperatures to form a thermally absorptive coating on the first side of the substrate resulting in a coated substrate;
heating the coated substrate to remove contaminants from the thermally absorptive coating by baking the coated sapphire substrate at a first temperature less than about 650° C., then baking the coated sapphire substrate at a second temperature above the first temperature and below about 650° C. for a second time period, followed by baking the coated sapphire substrate at about 650° C. for a third time period, wherein the first time period, the second time period, and the third time period are each at least about 15 minutes;
positioning the coated substrate in a vacuum deposition chamber;
heating the coated substrate in the vacuum deposition chamber by directing radiative energy onto the thermally absorptive coating;
forming an epitaxial layer on the second side of the coated substrate opposite the thermally absorptive coating; and
removing the thermally absorptive coating.

14. The method of claim 13 , further comprising:
the first temperature is about 400° C.;
the second temperature is about 500° C.; and
cooling the coated substrate to about to 450° C. or less after baking the coated sapphire substrate at about 650° C. and before positioning the coated substrate in a vacuum deposition chamber.

15. The method of claim 14 ,
further comprising allowing the paint to dry before heating the coated substrate.

16. The method of claim 13 , wherein:
the substrate comprises a material that transmits at least one of visible light or infrared light.

17. The method of claim 13 , wherein:
the substrate comprises a material selected from sapphire, glass, quartz, diamond GaAs, GaN, silicon or Germanium.

18. The method of claim 13 , wherein:
the coated substrate comprises a coated sapphire wafer.

19. The method of claim 18 , further comprising
forming an epitaxial layer of GaN on the second opposite side surface of the coated sapphire wafer; and
wherein the sapphire wafer is heated in the vacuum deposition chambe

Assignees

• Nasa

Inventors

• Choi Sang H
• Duzik Adam J

Classifications

• H10P14/3416

  Nitrides · CPC title

• H10P14/3411

  Silicon, silicon germanium or germanium · CPC title

• H10P14/2922

  being non-crystalline insulating materials, e.g. glass or polymers · CPC title

• H10P14/2921

  being crystalline insulating materials · CPC title

• H10P14/2903

  Carbon, e.g. diamond-like carbon · CPC title