Tantalum compound

Patent metadata

Field	Value
Publication number	US-10651031-B2
Application number	US-201816183927-A
Country	US
Kind code	B2
Filing date	Nov 8, 2018
Priority date	Dec 21, 2015
Publication date	May 12, 2020
Grant date	May 12, 2020

Abstract

A tantalum compound, a method of forming a thin film, and a method of fabricating an integrated circuit device, the tantalum compound being represented by the following General Formula (I):

First claim

What is claimed is:

1. A tantalum compound represented by the following General Formula (I):

wherein, in General Formula 1,
R 1 , R 3 , and R 4 are each independently a C1 to C10 substituted or unsubstituted linear or branched alkyl, alkenyl, or alkynyl group; and
R 2 is a hydrogen atom, a C1 to C10 substituted or unsubstituted linear or branched alkyl, alkenyl, or alkynyl group.

2. The tantalum compound as claimed in claim 1 , wherein:
each of R 1 , R 3 , and R 4 is an isopropyl group, and
R 2 is a methyl group.

3. The tantalum compound as claimed in claim 1 , wherein each of R 1 , R 2 , R 3 , and R 4 is a C1 to C5 linear or branched alkyl group.

4. The tantalum compound as claimed in claim 1 , wherein at least one of R 1 , R 2 , R 3 , and R 4 is a branched alkyl group.

5. The tantalum compound as claimed in claim 1 , wherein at least one of R 1 , R 2 , R 3 , and R 4 is an isopropyl group.

6. The tantalum compound as claimed in claim 1 , wherein R 2 is a C1 to C5 linear or branched alkyl group.

7. A tantalum compound including following group:

wherein the symbol “*” represents a binding site,
R 1 is a C1 to C10 substituted or unsubstituted linear or branched alkyl, alkenyl, or alkynyl group, or a C4 to C20 substituted or unsubstituted aromatic or alicyclic hydrocarbon group; and
R 2 is a hydrogen atom, a C1 to C10 substituted or unsubstituted linear or branched alkyl, alkenyl, or alkynyl group, or a C6 to C20 substituted or unsubstituted aromatic or alicyclic hydrocarbon group.

8. A tantalum compound represented by the following General Formula (I):

wherein, in General Formula 1,
R 1 , R 3 , and R 4 are each independently a C1 to C10 substituted or unsubstituted linear or branched alkyl, alkenyl, or alkynyl group, or a C4 to C20 substituted or unsubstituted aromatic or alicyclic hydrocarbon group; and
R 2 is a hydrogen atom, a C1 to C10 substituted or unsubstituted linear or branched alkyl, alkenyl, or alkynyl group, or a C6 to C20 substituted or unsubstituted aromatic or alicyclic hydrocarbon group.

9. The tantalum compound as claimed in claim 8 , wherein each of R 1 , R 2 , R 3 , and R 4 is a methyl, an ethyl, a propyl, an isopropyl, butyl, an isobutyl, a secondary butyl, a tertiary butyl, a pentyl, an isoamyl, a secondary amyl, or a tertiary amyl group.

10. The tantalum compound as claimed in claim 8 , wherein each of R 1 , R 2 , R 3 , and R 4 is a C1 to C5 linear or branched alkyl group.

11. The tantalum compound as claimed in claim 8 , wherein R 1 is an isopropyl, a secondary butyl, or a secondary amyl group.

12. The tantalum compound as claimed in claim 8 , wherein each of R 1 , R 3 , and R 4 is a C1 to C10 linear or branched alkyl group.

13. The tantalum compound as claimed in claim 8 , wherein the tantalum compound is a liquid at 25° C. and 1 atm.

14. The tantalum compound as claimed in claim 8 , wherein R 2 is a methyl, an ethyl, a propyl, a butyl, or an amyl group.

15. The tantalum compound as claimed in claim 8 , wherein at least one of R 1 , R 2 , R 3 , and R 4 is an alicyclic alkyl group.

16. The tantalum compound as claimed in claim 8 , wherein at least one of R 1 , R 3 , and R 4 is a branched alkyl group.

17. The tantalum compound as claimed in claim 8 , wherein at least one of R 1 , R 2 , R 3 , and R 4 is a cyclopentyl group.

18. The tantalum compound as claimed in claim 8 , wherein R 2 is a C1 to C10 linear or branched alkyl group.

19. The tantalum compound as claimed in claim 8 , wherein R 1 is a branched secondary alkyl group.

20. The tantalum compound as claimed in claim 8 , wherein R 2 is a linear primary alkyl group.

Assignees

• Samsung Electronics Co Ltd
• Adeka Corp

Inventors

• Ryu Seung-Min
• Koide Takanori
• Yamada Naoki
• Lim Jae-Soon
• Shiratori Tsubasa
• Cho Youn-Joung

Classifications

• C07F9/00 Primary

  Compounds containing elements of Groups 5 or 15 of the Periodic Table · CPC title

• C23C16/34

  Nitrides {(C23C16/303 takes precedence)} · CPC title

• C23C16/405

  of refractory metals or yttrium · CPC title

• C23C16/4412

  Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps · CPC title

• C23C16/16

  from metal carbonyl compounds · CPC title