Work processing apparatus and liquid chemical bag for the same

Patent metadata

Field	Value
Publication number	US-10632590-B2
Application number	US-201615370670-A
Country	US
Kind code	B2
Filing date	Dec 6, 2016
Priority date	Dec 8, 2015
Publication date	Apr 28, 2020
Grant date	Apr 28, 2020

Abstract

The work processing apparatus of the present invention comprises: a processing section for processing or treating a work; and a liquid chemical supplying section for supplying a liquid chemical to the processing section. The liquid chemical supplying section includes: a plurality of liquid chemical bags for storing the liquid chemical; a bag holding part in which the liquid chemical bags are attached and held; and a liquid feeding part, to which the liquid chemical bags are detachably connected, for feeding the liquid chemical from the liquid chemical bags to the processing section. Each of the liquid chemical bags is produced by overlapping flexible resin sheets with each other and welding their edge parts to form into a bag. Each of the liquid chemical bags has a port part communicating with an outside. A joint with a valve is attached to each of the port parts.

First claim

What is claimed is:

1. A work processing apparatus,
comprising:
a processing section for processing or treating a work; and
a liquid chemical supplying section for supplying a liquid chemical to the processing section,
wherein the liquid chemical supplying section includes: a plurality of liquid chemical bags for storing the liquid chemical; a bag holding part in which the liquid chemical bags are attached and held; and a liquid feeding part, to which the liquid chemical bags are detachably connected, for feeding the liquid chemical from the liquid chemical bags to the processing section,
each of the liquid chemical bags is produced by overlapping flexible resin sheets with each other and welding their edge parts to form into a bag, and has a port part communicating with an outside, and
a joint with a valve is attached to each of the port parts,
wherein the bag holding part is located under the processing section and capable of being drawn out forward.

2. The work processing apparatus according to claim 1 ,
wherein the liquid chemical bags are filled with the liquid chemical in a state where air has been removed therefrom.

3. The work processing apparatus according to claim 1 ,
wherein each of the liquid chemical bags is suspended and held in the bag holding part in a state where the joint with the valve is on the upper side, and
a liquid chemical suction pipe is provided in each of the liquid chemical bags and extended downward.

4. The work processing apparatus according to claim 3 ,
wherein the liquid chemical bags are suspended and formed in a flat shape in a state where the adjacent liquid chemical bags are alternately shifted, in a width direction, from each other.

5. The work processing apparatus according to claim 1 ,
further comprising a measuring section for measuring weights of the liquid chemical bags held in the bag holding part.

6. The work processing apparatus according to claim 1 ,
wherein the joint with the valve is a Luer-Lock type joint.

7. The work processing apparatus according to claim 1 ,
wherein the liquid chemical bags include the bag filled with a polishing liquid.

8. The work processing apparatus according to claim 1 ,
wherein the liquid chemical bags separately include the bag filled with a polishing liquid and the bag filled with pure water.

9. The work processing apparatus according to claim 1 ,
wherein the liquid chemical bags include the bag filled with a rinsing liquid for rinsing the work.

10. The work processing apparatus according to claim 1 ,
wherein the liquid chemical bags include the bag filled with a cleaning liquid for cleaning the work.

11. The work processing apparatus according to claim 1 ,
wherein the work is a semiconductor wafer of ½ inch size.

12. A work processing apparatus, comprising:
a processing section for processing or treating a work;
a liquid chemical supplying section for supplying a liquid chemical to the processing section,
wherein the liquid chemical supplying section includes:
a plurality of liquid chemical bags for storing the liquid chemical; a bag holding part in which the liquid chemical bags are attached and held; and a liquid feeding part, to which the liquid chemical bags are detachably connected, for feeding the liquid chemical from the liquid chemical bags to the processing section;
each of the liquid chemical bags is produced by overlapping flexible resin sheets with each other and welding their edge parts to form into a bag, and has a port part communicating with an outside; and
a joint with a valve is attached to each of the port parts; and

a filling device for filling the liquid chemical bags with the liquid chemical or chemicals,
wherein the filling device includes: an air discharging part for discharging air from the liquid chemical bags; and a measuring part for measuring a weight or a capacity of the liquid chemical filling each of the liquid chemical bags.

13. The work processing apparatus according to claim 12 ,
wherein the filling device further includes:
a raw liquid storing part for storing a raw liquid of the liquid chemical;
a pure water storing part for storing pure water;
a mounting part on which the liquid chemical bag is mounted;
a discharge tank;
a first pipeline being communicated with the liquid chemical bags, from the raw liquid storing part, via a first check valve, a first three-way valve and a second three-way valve in this order, the first pipeline being capable of supplying the liquid chemical from the raw liquid storing part to the liquid chemical bags;
a second pipeline being communicated with the liquid chemical bags, from the pure water storing part, via a second check valve, the first three-way valve and the second three-way valve in this order, the second pipeline being capable of supplying the pure water from the pure water storing part to the liquid chemical bags;
a third pipeline being communicated with the discharge tank, from the liquid chemical bags, via the second three-way valve and a third check valve in this order, the third pipeline being capable of discharging air from the liquid chemical bags to the discharge tank;
a first pump being provided to the first pipeline between the first check valve and the raw liquid storing part, the first pump feeding the liquid chemical from the raw liquid storing part to the liquid chemical bags via the first pipeline;
a second pump being provided to the second pipeline between the second check valve and the pure water storing part, the second pump feeding the pure water from the pure water storing part to the liquid chemical bags via the second pipeline; and
a third pump being provided to the third pipeline between the third check valve and the discharge tank, the third pump discharging air from the liquid chemical bags to the discharge tank via the third pipeline.

14. The work processing apparatus according to claim 13 ,
wherein the first pump is a syringe,
a fourth check valve is provided to the first pipeline between the syringe and the raw liquid storing part,
the third pump is a syringe, and
a fifth check valve is provided to the third pipeline between the syringe and the discharge tank.

15. The work processing apparatus according to claim 12 ,
wherein the filling device includes:
a first liquid chemical storing part for storing a first liquid chemical;
a second liquid chemical storing part for storing a second liquid chemical;
a mounting part on which the liquid chemical bag is mounted;
a discharge tank;
a first pipeline being communicated with the liquid chemical bags, from the first liquid chemical storing part, via a first check valve, a first three-way valve and a second three-way valve in this order, the first pipeline being capable of supplying the first liquid chemical from the first liquid chemical storing part to the liquid chemical bags;
a second pipeline being communicated with the liquid chemical bags, from the second liquid chemical storing part, via a second check valve, the first three-way valve and the second three-way valve in this order, the second pipeline being capable of supplying the second liquid chemical from the second liquid chemical storing part to the liquid chemical bags;
a third pipeline being communicated with the discharge tank, from the liquid chemical bags, via the second three-way valve and a third check valve in this order, the third pipeline being capable of discharging air from the liquid chemical bags to the discharge tank;
a first pump being provided to the first pipeline between the first check valve and the first liquid chemical storing p

Assignees

• Fujikoshi Machinery Corp
• Aist

Inventors

• Tsukada Masayuki
• Shibuya Kazutaka
• Fuse Takayuki
• Nakamura Yoshio
• Hara Shiro

Classifications

• B24B37/34 Primary

  Accessories · CPC title

• B24B37/20

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• B65D31/14

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• B24B57/02

  for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents · CPC title

• B65D33/14

  Suspension means (handles B65D33/06) · CPC title