Micro-electrical mechanical system sensor package and method of manufacture thereof

Patent metadata

Field	Value
Publication number	US-10631100-B2
Application number	US-201816129419-A
Country	US
Kind code	B2
Filing date	Sep 12, 2018
Priority date	Sep 12, 2018
Publication date	Apr 21, 2020
Grant date	Apr 21, 2020

Abstract

A device includes: a first sidewall including a first opening extending through the first sidewall; a first sensor attached to an interior surface of the first sidewall, wherein the first sensor is aligned to at least partially cover the first opening; a second sidewall opposite the first sidewall; a third sidewall attaching the first sidewall to the second sidewall; and a first contact pad disposed on an exterior surface of the third sidewall, wherein the first contact pad is configured to provide at least one of a power connection or a signal connection for the first sensor.

First claim

What is claimed is:

1. A device, comprising:
a first sidewall comprising a first opening extending through the first sidewall;
a first sensor attached to an interior surface of the first sidewall, wherein the first sensor is aligned to at least partially cover the first opening;
a second sidewall opposite the first sidewall;
a third sidewall having a first thickness attaching the first sidewall to the second sidewall at a first end of the first and second sidewalls;
a first contact pad disposed on an exterior surface of the third sidewall, wherein the first contact pad is configured to provide at least one of a power connection or a signal connection for the first sensor; and
a fourth sidewall having a second thickness attaching the first sidewall to the second sidewall at a second end of the first and second sidewalls, wherein the first thickness is greater than the second thickness, and wherein the first and second sidewalls are substantially perpendicular to the third and fourth sidewalls.

2. The device of claim 1 , wherein the first sensor comprises a first micro-electrical mechanical system (MEMS) microphone die.

3. The device of claim 1 , further comprising a lid forming the first sidewall.

4. The device of claim 3 , wherein the lid comprises a conductive material and provides electromagnetic interference (EMI) shielding for the first sensor.

5. The device of claim 1 , further comprising a substrate, wherein the substrate comprises an interconnect structure disposed with a body of the substrate.

6. The device of claim 5 , further comprising a trace disposed on the exterior surface of the third sidewall and electrically coupling the interconnect structure and the first contact pad to each other, wherein a first end of the trace is coupled to the first contact pad and a second end of the trace is coupled to the interconnect structure.

7. The device of claim 6 , wherein a first portion of the trace is disposed on the exterior surface of the third sidewall, wherein a second portion of the trace extends through the substrate, and wherein the first portion of the trace is perpendicular to the second portion of the trace.

8. The device of claim 5 , wherein the substrate forms the second sidewall.

9. The device of claim 1 , further comprising a second opening and a second sensor aligned to at least partially cover the second opening.

10. The device of claim 9 , wherein the second opening extends through the first sidewall and is adjacent to the first opening, and wherein the second sensor is attached to the interior surface of the first sidewall.

11. The device of claim 10 , further comprising:
a third opening and a fourth opening extending through the second sidewall, wherein the third opening is adjacent to the fourth opening; and
a third sensor and a fourth sensor aligned to at least partially cover the third opening and the fourth opening, respectively.

12. The device of claim 9 , wherein the second opening extends through the second sidewall and is directed away from the first opening, and wherein the second sensor is attached to an interior surface of the second sidewall.

13. The device of claim 9 , further comprising a second contact pad disposed on the exterior surface of the third sidewall, wherein the second contact pad is configured to provide at least one of a power connection or a signal connection for the second sensor.

14. The device of claim 9 , further comprising an interior cavity and a control chip disposed within the interior cavity, the control chip being configured to be in electrical communication with the first sensor.

15. A MEMS microphone package, comprising:
a first lid forming a first sidewall of the MEMS microphone package, the first lid comprising a first acoustic input port extending through the first lid;
a first MEMS microphone die attached to an interior surface of the first lid, wherein the first MEMS microphone die is aligned to at least partially cover the first acoustic input port;
a second sidewall opposite the first lid;
a molding compound forming a third sidewall and attaching the first lid to a first end of the second sidewall; and
a first input/output (I/O) pad disposed on an exterior surface of the molding compound, wherein the first I/O pad is configured to provide at least one of a power connection or a signal connection for the first MEMS microphone die; and
a molding compound forming a fourth sidewall separate from the third sidewall and attaching the first lid to a second of the second sidewall, wherein a thickness of the third sidewall is greater than a thickness of the fourth sidewall, and wherein the first and second sidewalls are substantially perpendicular to the third and fourth sidewalls.

16. The MEMS microphone package of claim 15 , further comprising an interior cavity and an application specific integrated circuit (ASIC) die disposed within the interior cavity and electrically coupled to the first MEMS microphone die.

17. The MEMS microphone package of claim 16 , wherein the first MEMS microphone die and the ASIC die spatially overlap at least partially.

18. The MEMS microphone package of claim 15 , further comprising a printed circuit board, wherein the printed circuit board comprises an interconnect structure disposed with a body of the printed circuit board.

19. The MEMS microphone package of claim 18 , further comprising a trace disposed on the exterior surface of the third sidewall and electrically coupling the interconnect structure and the first I/O pad to each other, wherein a first end of the trace is coupled to the first I/O pad and a second end of the trace is coupled to the interconnect structure, and wherein an angle subtended between the first end of the trace and the second end of the trace is substantially 90 degrees.

20. The MEMS microphone package of claim 18 , wherein an exterior surface of the printed circuit board forms an exterior surface of the second sidewall.

21. The MEMS microphone package of claim 15 , further comprising a second acoustic input port and a second MEMS microphone die aligned to at least partially cover the second acoustic input port.

22. The MEMS microphone package of claim 21 , wherein the second acoustic input port extends through the first lid and is adjacent to the first acoustic input port, and wherein the second MEMS microphone die is attached to the interior surface of the first lid.

23. The MEMS microphone package of claim 21 , further comprising a second lid forming the second sidewall, wherein the second acoustic input port extends through the second lid and is directed away from the first acoustic input port, and wherein the second MEMS microphone die is attached to an interior surface of the second lid.

24. The MEMS microphone package of claim 23 , wherein the first lid and the second lid comprise a conductive material and provide electromagnetic interference (EMI) shielding for the first MEMS microphone die and the second MEMS microphone die, respectively.

25. A method, comprising:
attaching a first side of a sensor to a first side of a lid, the sensor having a contact pad disposed on a second side of the sensor opposite the first side;
providing an interconnect on the contact pad, wherein a first end of the interconnect is attached to the contact pad, and wherein the interconnect extends away from the contact pad;
attaching a control chip to a first side of a substrate and electrically connecting

Assignees

• Infineon Technologies Ag

Inventors

• Chiang Chau Fatt
• Chua Kok Yau

Classifications

• B81B2207/012

  the micromechanical device and the control or processing electronics being separate parts in the same package · CPC title

• H04R2201/029

  Manufacturing aspects of enclosures transducers · CPC title

• B81B2207/07

  Interconnects · CPC title

• B81B7/04

  Networks or arrays of similar microstructural devices · CPC title

• B81B2201/0257

  Microphones or microspeakers · CPC title