Semiconductor device and method for manufacturing the same

Patent metadata

Field	Value
Publication number	US-10629520-B2
Application number	US-201815989468-A
Country	US
Kind code	B2
Filing date	May 25, 2018
Priority date	May 29, 2017
Publication date	Apr 21, 2020
Grant date	Apr 21, 2020

Abstract

A semiconductor device provided according to an aspect of the present disclosure includes a semiconductor element, a bonding target, a first wire, a wire strip and a second wire. The bonding target is electrically connected to the semiconductor element. The first wire is made of a first metal. The first wire includes a first bonding portion bonded to the bonding target and a first line portion extending from the first bonding portion. The wire strip is made of the first metal. The wire strip is bonded to the bonding target. The second wire is made of a second metal different from the first metal. The second wire includes a second bonding portion bonded to the bonding target via the wire strip and a second line portion extending from the second bonding portion.

First claim

The invention claimed is:

1. A semiconductor device comprising:
a semiconductor element;
a bonding target electrically connected to the semiconductor element;
a first wire made of a first metal, the first wire including:
a first bonding portion bonded to the bonding target; and
a first line portion extending from the first bonding portion;

a wire strip made of the first metal and bonded to the bonding target; and
a second wire made of a second metal different from the first metal, the second wire including:
a second bonding portion fixed to the bonding target via the wire strip made of the first metal, the second bonding portion being bonded to the wire strip; and
a second line portion extending from the second bonding portion.

2. The semiconductor device according to claim 1 , wherein the second bonding portion is spaced apart from the bonding target.

3. The semiconductor device according to claim 1 , wherein each of the first bonding portion and the wire strip is bonded by wedge bonding using a wedge tool, and each of the first bonding portion and the wire strip has a press trace formed during the bonding.

4. The semiconductor device according to claim 3 , wherein the wire strip has a substantially same shape as that of the first bonding portion.

5. The semiconductor device according to claim 1 , wherein the second bonding portion is a ball bonding portion bonded by ball bonding.

6. The semiconductor device according to claim 1 , wherein the second bonding portion is a stitch bonding portion bonded by stitch bonding.

7. The semiconductor device according to claim 6 , wherein the wire strip has an elongated shape, and
a direction in which the second line portion extends from the stitch bonding portion is identical with a longitudinal direction of the wire strip.

8. The semiconductor device according to claim 1 , wherein a bonding strength between the bonding target and each of the first wire and the wire strip is greater than a bonding strength, in a case where the second wire is directly bonded to the bonding target, between the bonding target and the second wire, and
a bonding strength between the wire strip and the second wire is greater than a bonding strength, in a case where the second wire is directly bonded to the bonding target, between the bonding target and the second wire.

9. The semiconductor device according to claim 1 , wherein the first wire has a wire diameter that is larger than a wire diameter of the second wire.

10. The semiconductor device according to claim 1 , wherein the bonding target includes a first bonding target portion and a second bonding target portion, the first bonding portion being bonded to the first bonding target portion, the second bonding portion being bonded to the second bonding target portion via the wire strip, and
the first bonding target portion and the second bonding target portion have respective outermost layers that are made of a same material.

11. The semiconductor device according to claim 10 , wherein the first bonding target portion and the second bonding target portion each are plated with nickel.

12. The semiconductor device according to claim 11 , wherein the first metal is mainly composed of aluminum, and
the second metal is mainly composed of gold or copper.

13. A method for manufacturing a semiconductor device, comprising:
forming a wire strip by bonding a part of a first wiring material to a bonding target, the first wiring material being made of a first metal,
forming a first wire by using the first wiring material, the first wire including a first bonding portion bonded to the bonding target and a first line portion extending from the first bonding portion, and
forming a second wire by using a second wiring material made of a second metal different from the first metal, the second wire including:
a second bonding portion bonded to the wire strip made of the first metal; and
a second line portion extending from the second bonding portion.

14. The manufacturing method according to claim 13 , wherein forming the wire strip comprises forming the wire strip by using a wedge tool, the wedge tool including a wire guide, a wedge that presses the first wiring material fed by the wire guide against a bonding object, and a cutter that cuts the first wiring material, and
forming the first wire comprises forming the first wire by using the wedge tool.

15. The manufacturing method according to claim 14 , wherein forming the wire strip comprises:
applying ultrasonic vibration with a part of the first wiring material pressed against the bonding target with the wedge to bond the part of the first wiring material to the bonding target, and
cutting the first wiring material so as to leave the part of the first wiring material to form the wire strip.

16. The manufacturing method according to claim 13 , wherein forming the second wire comprises:
forming the second bonding portion by melting the second wiring material projecting from a tip of a capillary to form a molten ball and pressing the molten ball against the wire strip for bonding;
forming the second bonding line by moving the capillary after the forming the second bonding portion while allowing the second wiring material to be drawn from the capillary; and
pressing the second wiring material after the forming the second bonding portion against the semiconductor element for bonding.

17. The manufacturing method according to claim 13 , wherein forming the second wire comprises:
melting the second wiring material projecting from a tip of a capillary to form a molten ball and pressing the molten ball against the semiconductor element for bonding;
forming the second line portion by moving the capillary after the melting the second wiring material while allowing the second wiring material to be drawn from the capillary; and
forming the second bonding portion by pressing the second wiring material after the forming the second line portion by moving the capillary against the wire strip for bonding.

18. The manufacturing method according to claim 17 , wherein the wire strip has an elongated shape, and
forming the second wire comprises forming the second wire in such a manner that a direction in which the second line portion extends form the second bonding portion is identical with a longitudinal direction of the wire strip.

19. The manufacturing method according to claim 13 , wherein, the first metal is made of a metal that has a bonding strength with the bonding target that is greater than a bonding strength between the second metal and the bonding target and that has a bonding strength with the second metal that is greater than a bonding strength between the second metal and the bonding target.

20. The manufacturing method according to claim 13 , wherein the first wire has a wire diameter that is larger than a wire diameter of the second wire.

21. The manufacturing method according to claim 13 , wherein the bonding target includes a first bonding target portion and a second bonding target portion, the first bonding portion being bonded to the first bonding target portion, the second bonding portion being bonded to the second bonding target portion via the wire strip, and
the first bonding target portion and the second bonding target portion have respective outermost layers that are made of a same material.

22. The manufacturing method according to claim 21 , further comprising plating both the first bonding target portion and the second b

Assignees

• Rohm Co Ltd

Inventors

• Haga Motoharu

Classifications

• H01L23/4952 Primary

  Electricity · mapped topic

• H01L23/49575

  Electricity · mapped topic

• H01L24/48

  Electricity · mapped topic

• H01L2224/45144

  Electricity · mapped topic

• H01L2224/45015

  Electricity · mapped topic