Cleaning liquid, anticorrosion agent, and method for manufacturing the same

Patent metadata

Field	Value
Publication number	US-10597609-B2
Application number	US-201715855173-A
Country	US
Kind code	B2
Filing date	Dec 27, 2017
Priority date	Dec 29, 2016
Publication date	Mar 24, 2020
Grant date	Mar 24, 2020

Abstract

A cleaning liquid and an anticorrosion agent having an excellent corrosion inhibition function, and a method for manufacturing the same. The cleaning liquid contains alkanol hydroxyamine represented by general formula (1), alkanolamine represented by general formula (2), a solvent, and a basic compound other than the alkanol hydroxyamine and the alkanolamine or an acidic compound. In the general formula (1), R a1 and R a2 each independently represents a C1-C10 alkyl group having one to three hydroxy groups, or a hydrogen atom, R a1 and R a2 are not simultaneously a hydrogen atom, and R b1 and R b2 are not simultaneously a hydrogen atom.

First claim

What is claimed is:

1. A cleaning liquid comprising alkanol hydroxyamine represented by the following general formula (1), alkanolamine represented by the following general formula (2), a solvent, as well as a basic compound other than the alkanol hydroxyamine and the alkanolamine, or an acidic compound:

wherein R a1 and R a2 each independently represent a C1-C10 alkyl group having one to three hydroxy groups, or a hydrogen atom,
where R a1 and R a2 are not simultaneously a hydrogen atom;

wherein R b1 and R b2 each independently represent a C1-C10 alkyl group having one to three hydroxy groups, or a hydrogen atom,
where R b1 and R b2 are not simultaneously a hydrogen atom.

2. The cleaning liquid according to claim 1 , wherein R a1 in the general formula (1) and R b1 in the general formula (2) are the same group, and R a2 in the general formula (1) and R b2 in the general formula (2) are the same group.

3. The cleaning liquid according to claim 1 , wherein R a1 and R a2 in the general formula (1) are the same group, and R b1 and R b2 in the general formula (2) are the same group.

4. An anticorrosion agent comprising alkanol hydroxyamine represented by the following general formula (1) and alkanolamine represented by the following general formula (2):

wherein R a1 and R a2 each independently represent a C1-C10 alkyl group having one to three hydroxy groups, or a hydrogen atom,
where R a1 and R a2 are not simultaneously a hydrogen atom;

wherein R a1 and R b2 each independently represent a C1-C10 alkyl group having one to three hydroxy groups, or a hydrogen atom,
where R b1 and R b2 are not simultaneously a hydrogen atom.

5. A method for manufacturing a cleaning liquid or an anticorrosion agent comprising alkanol hydroxyamine represented by the following general formula (1), the method comprising:
synthesizing the alkanol hydroxyamine by oxidizing alkanolamine represented by the following general formula (2):

wherein R a1 and R a2 each independently represent a C1-C10 alkyl group having one to three hydroxy groups, or a hydrogen atom,
where R a1 and R a2 are not simultaneously a hydrogen atom;

wherein R b1 and R b2 each independently represent a C1-C10 alkyl group having one to three hydroxy groups, or a hydrogen atom,
wherein R b1 and R b2 are not simultaneously a hydrogen atom.

6. A method for cleaning a substrate comprising using the cleaning liquid according to claim 1 .

7. A method for cleaning a substrate comprising using the anticorrosion agent according to claim 4 .

8. A method for cleaning a substrate comprising using the anticorrosion agent manufactured by the method according to claim 5 .

9. The method according to claim 6 , wherein the cleaning of a substrate is cleaning of a substrate in lithography.

10. A method for manufacturing a semiconductor comprising a substrate, the method comprising cleaning the substrate using the method according to claim 6 .

11. A method for inhibiting corrosion of easily corrodible metal, comprising bringing the easily corrodible metal into contact with the cleaning liquid according to claim 1 .

12. A method for inhibiting corrosion of easily corrodible metal, comprising bringing the easily corrodible metal into contact with the anticorrosion agent according to claim 4 .

13. A method for inhibiting corrosion of easily corrodible metal, comprising bringing the easily corrodible metal into contact with the cleaning liquid or anticorrosion agent manufactured by the method according to claim 5 .

Assignees

• Tokyo Ohka Kogyo Co Ltd

Inventors

• Namiki Takumi
• Haraguchi Takayuki
• Wu Yu-Geng

Classifications

• H10P95/00

  Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass · CPC title

• H10P70/27

  during, before or after processing of conductive materials, e.g. polysilicon or amorphous silicon layers · CPC title

• H10P50/287

  by chemical means · CPC title

• C11D7/3218

  Alkanolamines or alkanolimines · CPC title

• C23F11/06

  in markedly alkaline liquids · CPC title