Wire saw apparatus

Patent metadata

Field	Value
Publication number	US-10589446-B2
Application number	US-201615558833-A
Country	US
Kind code	B2
Filing date	Mar 3, 2016
Priority date	May 1, 2015
Publication date	Mar 17, 2020
Grant date	Mar 17, 2020

Abstract

A wire saw apparatus including: a wire row formed of a wire wound around a plurality of wire guides and reciprocatively travels in an axial direction; a nozzle from a coolant or slurry is supplied to the wire; and a workpiece feed mechanism presses a held workpiece against the wire row, the wire saw apparatus slice the workpiece into a wafer shape by pressing the workpiece held by the workpiece feed mechanism against the wire row and feeding it for slicing while supplying the coolant or the slurry from the nozzle to the wire, the wire saw apparatus nozzle is arranged above the wire row to be orthogonal to the wire row, and windbreak plates are arranged on both left and right sides of the arranged nozzle seen from an axial direction.

First claim

The invention claimed is:

1. A wire saw apparatus comprising:
a wire row formed of a wire that is wound around a plurality of wire guides and reciprocatively travels in an axial direction of the wire; a nozzle from which a coolant or slurry is supplied to the wire; and
a workpiece feed mechanism that presses a held workpiece against the wire row, the wire saw apparatus being configured to slice the workpiece into a wafer shape by pressing the workpiece held by the workpiece feed mechanism against the wire row and feeding it for slicing while supplying the coolant or the slurry from the nozzle to the wire,
wherein the nozzle is arranged above the wire row to be orthogonal to the wire row, and windbreak plates are arranged on both left and right sides of the arranged nozzle seen from an axial direction of the nozzle,
each windbreak plate is arranged in such a manner that a distance between a lower surface of the windbreak plate and the wire row is 1 mm or more and 10 mm or less,
the nozzle comprises an opening through which the coolant or slurry is supplied to the wire, wherein the opening of the nozzle faces the wire of the wire row, which causes the coolant or the slurry to flow downward from the nozzle to the wire, and
wherein the lower surface of the windbreak plate is closer to the wire than the opening of the nozzle.

2. The wire saw apparatus according to claim 1 , wherein each windbreak plate is arranged in such a manner that a distance from a center of a slit provided in a lower surface of the nozzle to the each windbreak plate is 5 mm or more and 40 mm or less.

Assignees

• Shinetsu Handotai Kk

Inventors

• Kitagawa Koji
• Shimizu Yuichi

Classifications

• B24B57/02

  for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents · CPC title

• B28D5/0076 Primary

  for removing dust, e.g. by spraying liquids; for lubricating, cooling or cleaning tool or work · CPC title

• B24B55/02

  Equipment for cooling the grinding surfaces, e.g. devices for feeding coolant (cooling or lubricating during dressing operation B24B53/095; incorporated in grinding wheels B24D) · CPC title

• B24B27/06 Primary

  Grinders for cutting-off · CPC title

• B24B27/0633

  using a cutting wire · CPC title