Electronic component with a metal resistor suspended in a closed cavity

Patent metadata

Field	Value
Publication number	US-10588232-B2
Application number	US-201716076855-A
Country	US
Kind code	B2
Filing date	Feb 7, 2017
Priority date	Feb 12, 2016
Publication date	Mar 10, 2020
Grant date	Mar 10, 2020

Abstract

The invention relates to an electronic component for producing infrared radiation. Said component includes a first element and a second element arranged so as to form a closed vacuum cavity in which at least one resistive element of said electronic component is suspended, the at least one resistive element including metal. Said first and second elements are connected by eutectic solder so as to sealingly close the cavity. Said electronic component comprises connection terminals located outside the closed cavity and connected electrically to the suspended resistive element.

First claim

The invention claimed is:

1. An electronic component for generating infrared radiation, comprising:
a first element and a second element arranged in such a manner as to form an enclosed cavity under vacuum within which at least one resistive element of the electronic component is suspended, wherein
said at least one resistive element comprising metal and configured to generate the infrared radiation,
the first and second elements being joined by eutectic soldering to seal the enclosed cavity in a leak-tight manner,
said electronic component comprising connection terminals situated outside of the enclosed cavity and electrically connected to the suspended resistive element,
the enclosed cavity has an internal pressure of less than 10 −2 mbar, and
the at least one resistive element is suspended by suspension arms belonging to the first element.

2. The electronic component according to claim 1 , wherein the eutectic soldering is formed with silicon and gold, or Au and In, or Cu and Sn, or Au and Sn, or Au and Ge, or Al and Ge.

3. The electronic component according to claim 1 , wherein a residual gas trap is situated within the enclosed cavity.

4. The electronic component according to claim 1 , wherein the first element comprises the connection terminals.

5. The electronic component according to claim 1 , wherein the second element comprises the connection terminals, the first element comprises connection pads electrically connected to the at least one resistive element, the connection terminals each being in electrical contact with at least one of the connection pads.

6. The electronic component according to Claim 1 , wherein the at least one resistive element comprises at least one structured part of a stack comprising successive layers as follows: a first barrier layer to prevent diffusion of a metal layer, the metal layer of platinum, a second barrier layer to prevent diffusion of the metal layer, wherein the first and second barrier layers are of titanium nitride.

7. The electronic component according to claim 6 , wherein said stack forms a part of the suspension arms suspending the at least one resistive element and extends in a direction of the connection terminals.

8. The electronic component according to claim 1 , wherein the enclosed cavity is provided by a single ribbon of eutectic soldering.

9. The electronic component according to claim 1 , wherein the enclosed cavity is bounded, at least in part, by a hollow formed in the first element, said hollow comprising a bottom oriented towards the at least one resistive element, said hollow being hounded by a continuous surface of same material.

10. A gas detector comprising the electronic component according to claim 1 and a sensor configured to measure the infrared radiation coming from the electronic component.

11. A method of fabrication of electronic components, the method comprising:
supplying a first plate comprising a base, on which plurality of first hollows is formed, the first plate comprising suspended resistive elements comprising metal, and each first hollow is associated with at least one of the suspended resistive elements disposed facing a bottom of the respective first hollow, the bottom being bounded by a surface of the base,
supplying a second plate, comprising second hollows configured to cooperate with the first hollows and form enclosed cavities of the electronic components,
assembling the first and second plates comprising eutectic soldering implemented within a chamber under vacuum which results in:
formation of the enclosed cavities, under vacuum and leak tight,
localization of connection terminals of the suspended resistive elements in hollow spaces bounded by the first and second plates and formed outside of the enclosed cavities,

removal of material n the hollow spaces in order to make the connection terminals accessible.

12. The method according to claim 11 , wherein the eutectic soldering uses gold and silicon, or Cu and Sn, or Au and Sn, or Au and Ge, or Al and Ge, or Au and In, brought into contact.

13. The method according to claim 11 , further comprising, prior to the assembling, for each first hollow, formation of a closed track made of a first material arranged at a periphery of the respective first hollow, wherein the second plate comprises bearing faces made of a second material, each bearing face disposed in contact against a corresponding track during the assembling, the eutectic soldering comprising pushing the first and second plates towards each other while applying a suitable temperature in order to form the eutectic soldering from the first and second materials.

14. The method according to claim 11 , wherein the first plate comprises the connection terminals, and wherein the removal of material is implemented by removal of material belonging to the second plate, and wherein the removal of material is implemented by a technique chosen from amongst: sawing, polishing, and etching.

15. The method according to claim 11 , wherein
the connection terminals are carried by the second plate,
the first plate comprises connection pads each electrically connected to at least one of the suspended resistive elements, and third hollows to form the hollow spaces,
the result of the assembling is an electrical contact being made between the connection pads and corresponding connection terminals and formation of the hollow spaces comprising the connection terminals.

16. The method according to claim 15 , wherein the removal of material is implemented by removal of material belonging to the first plate in the hollow spaces.

Assignees

• Commissariat Energie Atomique

Inventors

• Nicoletti Sergio
• Brun Mickaël

Classifications

• H05K5/0247

  Electrical details of casings, e.g. terminals, passages for cables or wiring · CPC title

• G01J3/108 Primary

  for measurement in the infrared range · CPC title

• H05K5/069 Primary

  Other details of the casing, e.g. wall structure, passage for a connector, a cable, a shaft · CPC title

• H01K1/18

  Mountings or supports for the incandescent body · CPC title

• G01N21/3504

  for analysing gases, e.g. multi-gas analysis · CPC title