Plating apparatus

Patent metadata

Field	Value
Publication number	US-10577706-B2
Application number	US-201916380843-A
Country	US
Kind code	B2
Filing date	Apr 10, 2019
Priority date	Mar 26, 2013
Publication date	Mar 3, 2020
Grant date	Mar 3, 2020

Abstract

A plating apparatus includes a processing bath configured to store a processing liquid therein, a transporter configured to immerse a substrate holder, holding a substrate, in the processing liquid, raise the substrate holder out of the processing bath, and transport the substrate holder in a horizontal direction, and a gas flow generator configured to generate a clean gas flow forward of the substrate with respect to a direction in which the substrate holder is transported. The transporter moves the gas flow generator together with the substrate holder in the horizontal direction while transporting the substrate holder in the horizontal direction.

First claim

What is claimed is:

1. A plating apparatus comprising:
a substrate holder configured to hold a substrate;
a transporter configured to transport the substrate holder, holding the substrate, between a substrate-holder tilting mechanism and a processing bath;
a cover member arranged to cover the substrate held by the substrate holder; and
a gas flow generator connected to the transporter and configured to introduce a gas into a space between the cover member and the substrate during transporting of the substrate holder holding the substrate, the gas flow generator comprising a gas inlet pipe configured to deliver the gas, and a gas nozzle coupled to the gas inlet pipe and configured to discharge the gas therefrom, wherein the gas nozzle has a tip end located within the cover member.

2. The plating apparatus according to claim 1 , wherein the cover member has an upper wall.

3. The plating apparatus according to claim 1 , wherein:
the gas flow generator is configured to discharge the gas toward the substrate held by the substrate holder so as to flow downwardly the gas in the space.

4. The plating apparatus according to claim 1 , wherein the gas flow generator is configured to supply an inert gas from the gas nozzle.

5. The plating apparatus according to claim 1 , further comprising:
a heating element configured to heat the substrate and the substrate holder, the heating element being mounted to the cover member.

6. The plating apparatus according to claim 1 , further comprising:
a static electricity eliminator configured to eliminate a static electricity from the substrate.

7. The plating apparatus according to claim 1 , further comprising:
a liquid-receiving unit arranged to receive a processing liquid which has dropped from the substrate holder,
wherein the transporter is configured to move the liquid-receiving unit together with the substrate holder in a horizontal direction.

8. The plating apparatus according to claim 7 , wherein:
the liquid-receiving unit comprises a tray disposed below the substrate holder and an actuator configured to move the tray in the horizontal direction; and
the actuator is configured to move the tray to a predetermined retreat position while the substrate holder, holding the substrate, is immersed in the processing liquid in the processing bath.

Assignees

• Ebara Corp

Inventors

• Hirao Tomonori

Classifications

• C23C18/163

  Supporting devices for articles to be coated · CPC title

• C23C18/1632

  Features specific for the apparatus, e.g. layout of cells and of its equipment, multiple cells · CPC title

• C23C18/1628

  Specific elements or parts of the apparatus · CPC title

• C25D17/06 Primary

  Suspending or supporting devices for articles to be coated · CPC title

• C25D21/04

  Removal of gases or vapours {; Gas or pressure control} · CPC title