Manufacturing method of semiconductor device and semiconductor manufacturing apparatus
US-10850363-B2 · Dec 1, 2020 · US
US10569382B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10569382-B2 |
| Application number | US-201615076793-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 22, 2016 |
| Priority date | Dec 13, 2013 |
| Publication date | Feb 25, 2020 |
| Grant date | Feb 25, 2020 |
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Official abstract text for this publication.
A tool comprising a plurality of wear indicators is provided. The tool may be made from a rapid prototyping process. The tool may be used in an abrasive processing operation. The tool may comprise one or more control elements, (e.g., control geometries, part interfaces, fixture interfaces and/or the like). These control elements may comprise indicators of tool wear. The indicators may be inspected physically (e.g., by touch) and/or visually.
Opening claim text (preview).
What is claimed is: 1. A tool configured to hold a part to be worked, the tool comprising: a body comprising a channel configured to receive and hold the part, the part comprising a plurality of airfoils; and a mock airfoil integrally formed on an end of the body, the mock airfoil comprising a convex surface, a concave surface opposing the convex surface, and a plurality of wear indicators, the plurality of wear indicators configured to indicate varying degrees of tool erosion, wherein a controlled geometry surface of the mock airfoil is either the convex surface or the concave surface; wherein the controlled geometry surface of the mock airfoil is configured to allow and control an abrasive effect of an abrasive process on a surface of an end airfoil of the plurality of airfoils of the part that faces, and is adjacent to, the controlled geometry surface of the mock airfoil, wherein the controlled geometry surface of the mock airfoil is shaped to resemble the surface of the end airfoil such that the mock airfoil is configured to replicate an operational environment where a neighboring airfoil of a neighboring plurality of airfoils would be present. 2. The tool of claim 1 , wherein the plurality of wear indicators comprises a first wear indicator, a second wear indicator, and a third wear indicator. 3. The tool of claim 2 , wherein the first wear indicator comprises a color indicator. 4. The tool of claim 2 , wherein the first wear indicator comprises a secondary indicator. 5. The tool of claim 4 , wherein the secondary indicator is a powder, wherein the first wear indicator is a housing that retains the powder, wherein the housing is configured to open and the powder is configured to spill out the housing in response to wear. 6. The tool of claim 5 , wherein the tool is made from a rapid prototyping process. 7. The tool of claim 1 , wherein the mock airfoil is configured to be disposed a distance away from the end airfoil such that a gap is defined between the controlled geometry surface of the mock airfoil and the surface of the end airfoil facing the controlled geometry surface, wherein abrasive media of the abrasive process passes through the gap and affects the surface of the end airfoil. 8. The tool of claim 7 , wherein the distance is a uniform distance between adjacent airfoils of the plurality of airfoils. 9. The tool of claim 1 , wherein the controlled geometry surface of the mock airfoil replicates the end airfoil, and also replicates a corresponding surface of individual airfoils of the plurality of airfoils. 10. A wear monitoring system, comprising: a tool configured to hold a part to be worked, the tool comprising, a body defining a channel configured to receive and retain the part to be manufactured in an abrasive process, wherein the part comprises a plurality of airfoils, and a structure integrally formed on an end the body of the tool, the structure comprising a convex surface, a concave surface opposing the convex surface, and a plurality of wear indicators configured to indicate varying degrees of tool wear, wherein either the convex surface or the concave surface is a control geometry; wherein the control geometry is configured to face a surface of an end airfoil of the plurality of airfoils such that the control geometry is configured to allow and control an abrasive effect of the abrasive process on the surface of the end airfoil of the plurality of airfoils, wherein the control geometry is shaped to resemble the surface of the end airfoil such that the control geometry is configured to replicate an operational environment where a neighboring airfoil of a neighboring plurality of airfoils would be present. 11. The wear monitoring system of claim 10 , wherein each of the plurality of indicators comprises a secondary indicator, wherein the secondary indicator is a powder, wherein each of the plurality of indicators is a housing that retains the powder, wherein the housing of each of the plurality of indicators is configured to open and the powder is configured to spill out the housing of each of the plurality of indicators in response to wear, wherein the secondary indicator is a color indicator. 12. The wear monitoring system of claim 11 , wherein the secondary indicator is a first secondary indicator, wherein the plurality of indicators further comprises a second secondary indicator. 13. The wear monitoring system of claim 10 , wherein a first indicator of the plurality of indicators is a first distance from an edge of the control geometry and a second indicator of the plurality of indicators is a second distance from the edge of the control geometry. 14. The wear monitoring system of claim 10 , wherein the plurality of indicators comprises a first indicator, a second indicator, and a third indicator.
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