Measuring method of scanning probe microscopy using penetrative pressing force

Patent metadata

Field	Value
Publication number	US-10545170-B2
Application number	US-201615067628-A
Country	US
Kind code	B2
Filing date	Mar 11, 2016
Priority date	Jun 23, 2015
Publication date	Jan 28, 2020
Grant date	Jan 28, 2020

Abstract

A measuring method of a scanning probe microscopy moves the probe from the first measuring point to the second measuring point while the probe has contact with the object to be measured and a pressing force weaker than the first pressing force is applied between the probe and the object to be measured after the measurement at the first measuring point has ended, applies the first pressing force between the probe and the object to be measured until the tip end position of the probe reaches the first distance in the depth direction from the upper surface of the object to be measured, and measures the physical property information of the object to be measured after the tip end position of the probe has reached the first distance in the depth direction from the upper surface of the object to be measured at the second measuring point.

First claim

The invention claimed is:

1. A measuring method of a scanning probe microscopy, comprising:
positioning a probe at a first measuring point of an object to be measured;
applying a first pressing force between the probe and the object to be measured until a tip end position of the probe reaches a first distance in a depth direction from an upper surface of the object to be measured at the first measuring point;
measuring physical property information of the object to be measured after the tip end position of the probe has reached the first distance in the depth direction from the upper surface of the object to be measured at the first measuring point;
moving the probe from the first measuring point to the second measuring point while the probe has contact with the object to be measured and a second pressing force weaker than the first pressing force is applied between the probe and the object to be measured after the measurement at the first measuring point has ended;
increasing a pressing force applied between the probe and the object to be measured from the second pressing force to the first pressing force until the tip end position of the probe reaches the first distance in the depth direction from the upper surface of the object to be measured when the probe has reached the second measuring point; and
measuring the physical property information of the object to be measured after the tip end position of the probe has reached the first distance in the depth direction from the upper surface of the object to be measured at the second measuring point.

2. The measuring method according to claim 1 , wherein
when the probe is moved from the first measuring point to the second measuring point, the probe is moved from the first measuring point to the second measuring point in a state where the tip end position of the probe is positioned on a side nearer to the first measuring point than the upper surface of the object to be measured and positioned on a side nearer to the upper surface of the object to be measured than the tip end position of the probe at the first measuring point.

3. The measuring method according to claim 2 , wherein
when the probe is moved from the first measuring point to the second measuring point, the pressing force between the probe and the object to be measured is changed from the first pressing force to the second pressing force after the measurement of the physical property information at the first measuring point ends, and after that, the second pressing force is maintained until the probe reaches the second measuring point.

4. The measuring method according to claim 1 , wherein
when the probe is moved from the first measuring point to the second measuring point, the probe is placed on the side nearer to the first measuring point than the upper surface of the object to be measured, and the tip end position of the probe is continuously changed or is changed in stages in the depth direction.

5. The measuring method according to claim 4 , wherein
in the middle of moving the probe from the first measuring point to the second measuring point, the pressing force between the probe and the object to be measured is continuously changed or is changed in stages from the first pressing force to the second pressing force, and after that, the pressing force is continuously changed or is changed in stages from the second pressing force to the first pressing force, and the pressing force between the probe and the object to be measured is set to be the first pressing force when the probe has reached the second measuring point.

6. The measuring method according to claim 1 , wherein
the physical property information is a resistance value of the object to be measured.

7. The measuring method according to claim 1 , wherein
the physical property information of the object to be measured is measured after a predetermined time elapses from the time when the first pressing force is applied between the probe and the object to be measured at the first measuring point or the second measuring point.

8. The measuring method according to claim 1 , wherein
the position of the probe is fixed, and the pressing force applied between the probe and the object to be measured is switched to the first pressing force or the second pressing force by moving the object to be measured relative to the probe.

9. The measuring method according to claim 1 , wherein
the position of the object to be measured is fixed, and the pressing force applied between the probe and the object to be measured is switched to the first pressing force or the second pressing force by moving the probe relative to the object to be measured.

10. A measuring method of a scanning probe microscopy, comprising:
positioning a probe at a first measuring point of an object to be measured;
positioning a tip end position of the probe at a first distance in a depth direction from an upper surface of the object to be measured at the first measuring point;
measuring physical property information of the object to be measured after the tip end position of the probe has reached the first distance in the depth direction from the upper surface of the object to be measured at the first measuring point;
moving the probe from the first measuring point to a second measuring point while the probe has contact with the object to be measured after the measurement at the first measuring point has ended, on a state of moving the tip end position of the probe at a second distance in the depth direction from the upper surface of the object, the second distance being shorter than the first distance;
positioning the tip end position of the probe at the first distance in the depth direction from the upper surface of the object to be measured when the probe reaches the second measuring point; and
measuring the physical property information of the object to be measured after the tip end position of the probe has reached the first distance in the depth direction from the upper surface of the object to be measured at the second measuring point.

11. The measuring method according to claim 10 , wherein
when the probe is moved from the first measuring point to the second measuring point, the probe is moved from the first measuring point to the second measuring point in a state where the tip end position of the probe is positioned on a side nearer to the first measuring point than the upper surface of the object to be measured and positioned on a side nearer to the upper surface of the object to be measured than the tip end position of the probe at the first measuring point.

12. The measuring method according to claim 10 , wherein
when the probe is moved from the first measuring point to the second measuring point, the probe is placed on the side nearer to the first measuring point than the upper surface of the object to be measured, and the tip end position of the probe is continuously changed or is changed in stages in the depth direction.

13. The measuring method according to claim 10 , wherein
the physical property information is a resistance value of the object to be measured.

14. The measuring method according to claim 1 , wherein
the physical property information of the object to be measured is measured after a predetermined time elapses from the time when the tip end position of the probe has reached the first distance in the depth direction from the upper surface of the object to be measured at the first measuring point or the second measuring point.

15. The measuring method according to claim 10 , wherein
the position of the probe is fixed, and the tip end position of

Assignees

• Toshiba Memory Corp

Inventors

• Hirota Jun
• Harada Kazunori
• Nakai Tsukasa

Classifications

• G01Q10/06

  Circuits or algorithms therefor · CPC title

• G01Q60/30 Primary

  Scanning potential microscopy · CPC title