Method for manufacturing group 13 nitride crystal and group 13 nitride crystal

Patent metadata

Field	Value
Publication number	US-10538858-B2
Application number	US-201515115154-A
Country	US
Kind code	B2
Filing date	Feb 19, 2015
Priority date	Mar 18, 2014
Publication date	Jan 21, 2020
Grant date	Jan 21, 2020

Abstract

In a method for manufacturing a group 13 nitride crystal, a seed crystal made of a group 13 nitride crystal is arranged in a mixed melt containing an alkali metal and a group 13 element, and nitrogen is supplied to the mixed melt to grow the group 13 nitride crystal on a principal plane of the seed crystal. The seed crystal is manufactured by vapor phase epitaxy. At least a part of contact members coming into contact with the mixed melt in a reaction vessel accommodating the mixed melt is made of Al2O3. An interface layer having a photoluminescence emission peak whose wavelength is longer than the wavelength of a photoluminescence emission peak of the grown group 13 nitride crystal is formed between the seed crystal and the grown group nitride crystal.

First claim

The invention claimed is:

1. A method for manufacturing a group 13 nitride crystal, comprising:
arranging a seed crystal in a mixed melt containing an alkali metal and a group 13 element, retained in a reaction vessel,
the seed crystal being a group 13 nitride seed crystal manufactured by vapor phase epitaxy and having an off-angle 1.5° or more and 2° or less with respect to a principal plane of the seed crystal, and
a member made of alumina, whose purity is higher than 99.9% and whose Si concentration is lower than 100 ppm, being arranged in the reaction vessel and in contact with the mixed melt; and

growing an interface layer on the principal plane of the seed crystal; and
supplying a nitrogen-containing gas into the mixed melt and growing a group 13 nitride crystal on the interface layer, which was grown on the seed crystal,
a pressure of the nitrogen-containing gas in growing the group 13 nitride crystal being set higher than a pressure of the nitrogen-containing gas in elevating a temperature in the reaction vessel to a crystal growth temperature of the group 13 nitride crystal, and
the interface layer having a photoluminescence emission peak whose wavelength is longer than a wavelength of a photoluminescence emission peak of the grown group 13 nitride crystal.

2. The method for manufacturing a group 13 nitride crystal according to claim 1 , wherein each of one or more members made of alumina is provided in contact with the mixed melt, and a purity of each of the one or more members is higher than 99.9% and an Si concentration of each of the one or more members is more than 25 ppm and lower than 100 ppm.

3. The method for manufacturing a group 13 nitride crystal according to claim 1 , wherein the pressure of the nitrogen-containing gas in elevating the temperature in the reaction vessel to the crystal growth temperature of the group 13 nitride crystal is 2.2 MPa, and the pressure of the nitrogen-containing gas in growing the group 13 nitrogen crystal is 3.0 MPa.

4. The method for manufacturing a group 13 nitride crystal according to claim 1 , wherein the seed crystal contains Si.

5. The method for manufacturing a group 13 nitride crystal according to claim 1 , wherein the group 13 nitride crystal is a GaN crystal.

6. The method for manufacturing a group 13 nitride crystal according to claim 5 , wherein the wavelength of the photoluminescence emission peak of the interface layer falls within a range of 650±30 nm.

7. The method for manufacturing a group 13 nitride crystal according to claim 1 , wherein the seed crystal has a substrate shape.

8. The method for manufacturing a group 13 nitride crystal according to claim 1 , wherein the interface layer formed between the seed crystal and the grown group 13 nitride crystal has different physical properties from those of the seed crystal and has different physical properties from those of the grown group 13 nitride crystal.

Assignees

• Sciocs Co Ltd

Inventors

• Hayashi Masahiro
• Satoh Takashi
• Miyoshi Naoya
• Wada Junichi
• Sarayama Seiji

Classifications

• H10P14/3416

  Nitrides · CPC title

• H10P14/3211

  Silicon, silicon germanium or germanium · CPC title

• H10P14/263

  using melted materials · CPC title

• C30B29/68

  Crystals with laminate structure, e.g. "superlattices" · CPC title

• C30B19/12

  characterised by the substrate · CPC title