Manufacturing method of semiconductor device having magnetic substance film

Patent metadata

Field	Value
Publication number	US-10529918-B2
Application number	US-201615263942-A
Country	US
Kind code	B2
Filing date	Sep 13, 2016
Priority date	Sep 16, 2015
Publication date	Jan 7, 2020
Grant date	Jan 7, 2020

Abstract

There is provided a semiconductor device manufacturing method which includes: loading a substrate with a magnetic substance film formed thereon into a process container; regulating an internal pressure of the process container to a first pressure lower than an atmospheric pressure; regulating the internal pressure of the process container from the first pressure to a second pressure higher than the first pressure; and magnetizing the magnetic substance film by applying a magnetic field to the magnetic substance film under the second pressure.

First claim

What is claimed is:

1. A semiconductor device manufacturing method comprising:
loading a substrate with a magnetic substance film formed thereon into a process container of a magnetic annealing apparatus, the substrate being arranged in a direction selected between a vertical posture or a horizontal posture in the process container;
regulating an internal pressure of the process container to a first pressure that is lower than an atmospheric pressure;
regulating the internal pressure of the process container from the first pressure to a second pressure that is higher than the first pressure; and
magnetizing the magnetic substance film in the process container of the magnetic annealing apparatus by applying a magnetic field to the magnetic substance film under the second pressure such that when the substrate is arranged in the vertical posture, the magnetic substance film of the substrate is magnetized in a direction perpendicular to the magnetic substance film, and when the substrate is arranged in the horizontal posture, the magnetic substance film of the substrate is magnetized in a direction parallel with the magnetic substance film,
wherein the regulating the internal pressure of the process container from the first pressure to the second pressure includes regulating a temperature of the substrate and the magnetic field within the process container, and
wherein the magnetizing the magnetic substance film is performed under a condition of the second pressure, the temperature of the substrate and the magnetic field within the process container which are regulated in the regulating the internal pressure of the process container from the first pressure to the second pressure.

2. The semiconductor device manufacturing method of claim 1 , wherein the second pressure falls within a range of 0.1 Pa to 100 kPa.

3. The semiconductor device manufacturing method of claim 1 , wherein the second pressure falls within a range of 100 Pa to 100 kPa.

4. The semiconductor device manufacturing method of claim 1 , wherein the step of magnetizing includes applying the magnetic field to the magnetic substance film while heating the magnetic substance film.

5. The semiconductor device manufacturing method of claim 1 , wherein the step of magnetizing includes supplying an inert gas into the process container.

6. The semiconductor device manufacturing method of claim 1 , wherein the step of loading includes loading the substrate into the process container while vertically holding the substrate by a substrate holder.

7. The semiconductor device manufacturing method of claim 1 , wherein the step of loading includes loading the substrate into the process container while horizontally holding the substrate by a substrate holder.

8. The semiconductor device manufacturing method of claim 1 , wherein the first pressure is within a range from 100 μPa to less than 0.1 Pa.

Assignees

• Tokyo Electron Ltd

Inventors

• Yamazaki Mitsuru
• Yamashita Koji

Classifications

• F27D11/12

  with electromagnetic fields acting directly on the material being heated · CPC title

• F27D7/06

  Forming or maintaining special atmospheres or vacuum within heating chambers (supplying steam, vapour, gases or liquids F27D7/02) · CPC title

• F27B5/04

  adapted for treating the charge in vacuum or special atmosphere · CPC title

• F27B3/08 Primary

  heated electrically, with or without any other source of heat · CPC title

• F27D21/00

  Arrangement of monitoring devices; Arrangement of safety devices · CPC title