Compact probe for atomic-force microscopy and atomic-force microscope including such a probe

Patent metadata

Field	Value
Publication number	US-10527645-B2
Application number	US-201615744033-A
Country	US
Kind code	B2
Filing date	Jul 12, 2016
Priority date	Jul 22, 2015
Publication date	Jan 7, 2020
Grant date	Jan 7, 2020

Abstract

A probe for atomic force microscopy comprises a tip for atomic force microscopy oriented in a direction referred to as the longitudinal direction and protrudes from an edge of a substrate in the longitudinal direction, wherein the tip is arranged at one end of a shuttle attached to the substrate at least via a first and via a second structure, which structures are referred to as support structures, at least the first support structure being a flexible structure, extending in a direction referred to as the transverse direction, perpendicular to the longitudinal direction and anchored to the substrate by at least one mechanical linkage in the transverse direction, the support structures being suitable for allowing the shuttle to be displaced in the longitudinal direction. An atomic force microscope comprising at least one such probe is also provided.

First claim

The invention claimed is:

1. A probe for atomic force microscopy comprising:
a substrate having an edge;
a shuttle that is attached to said substrate via a first support structure and a second support structure; and
a tip for atomic force microscopy that is oriented in a longitudinal direction and protrudes from the edge of the substrate in said longitudinal direction, said tip being arranged at one end of the shuttle, wherein
said first and second support structures are both anchored to the substrate and are linked to said shuttle at different positions, in said longitudinal direction, of the latter;
at least said first support structure extends mainly in a transverse direction, perpendicular to said longitudinal direction and is anchored to the substrate by at least one mechanical linkage in said transverse direction, the longitudinal and transverse directions forming a plane that is parallel to a main surface of the substrate,
said support structures are deformable in the longitudinal direction, allowing the shuttle to be displaced in the longitudinal direction, and
at least said shuttle and said first and second support structures are located above a surface of said substrate in a direction parallel to the longitudinal and transverse directions.

2. The probe for atomic force microscopy as claimed in claim 1 , wherein said second support structure is a micromechanical resonator that is suitable for being excited in order to make said shuttle oscillate in said longitudinal direction.

3. The probe for atomic force microscopy as claimed in claim 2 , wherein said micromechanical resonator is chosen from a ring-shaped resonator and at least one beam that is anchored to the substrate by at least one mechanical linkage and is oriented in said transverse direction.

4. The probe for atomic force microscopy as claimed in claim 1 , wherein said second support structure is also a flexible structure, extending in said transverse direction and anchored to the substrate by at least one mechanical linkage.

5. The probe for atomic force microscopy as claimed in claim 1 , also comprising at least one actuator that is configured to bring about a displacement of said shuttle in said longitudinal direction, causing at least said first support structure to bend.

6. The probe for atomic force microscopy as claimed in claim 1 , also comprising at least one actuator that is configured to bring about a displacement of said shuttle mainly in said transverse direction, causing at least one said support structure to bend.

7. The probe for atomic force microscopy as claimed in claim 1 , having a monolithic structure and wherein at least said shuttle and said support structures are produced in a surface layer, referred to as the device layer, which is located above a surface of said substrate.

8. The probe for atomic force microscopy as claimed in claim 1 , wherein the shape of said shuttle is elongate in said longitudinal direction and protrudes from said edge of the substrate.

9. The probe for atomic force microscopy as claimed in claim 8 , wherein said first support structure is at least partly suspended above said edge of the substrate.

10. The probe for atomic force microscopy as claimed in claim 9 , wherein said first support structure is attached to the substrate via anchors that are themselves at least partly suspended above said edge of the substrate.

11. The probe for atomic force microscopy as claimed in claim 1 , also comprising at least one conductive track linking an interconnect pad, deposited on said substrate, to said tip for atomic force microscopy, by passing through one said support structure and through said shuttle.

12. The probe for atomic force microscopy as claimed in claim 11 , also comprising two elements that are positioned on either side of the support structure bearing said conductive track, said elements bearing respective conductive tracks, forming a planar waveguide with the conductive track passing through said support element.

13. The probe for atomic force microscopy as claimed in claim 1 , comprising two elongate structures, referred to as lateral beams, extending in said longitudinal direction on either side of the shuttle, wherein both said shuttle and said lateral beams bear conductive tracks forming a planar waveguide.

14. The probe for atomic force microscopy as claimed in claim 1 , also including a structure extending beyond said edge of the substrate in a direction that is oblique in the direction of said atomic force microscopy tip, said structure bearing an element chosen from a planar waveguide and a microfluidic channel.

15. The probe for atomic force microscopy as claimed in claim 1 , wherein said shuttle bears, in proximity to or in correspondence with said tip for atomic force microscopy, a resistive element, the ends of which are linked to two interconnect pads that are deposited on said substrate by respective conductive tracks passing through said first support structure and through said shuttle.

16. The probe for atomic force microscopy as claimed in claim 1 , including a thermo-optical actuator comprising a planar optical guide section that is rigidly connected to said shuttle and extends in said transverse direction, as well as at least one planar optical guide that is arranged on the surface of said substrate and configured to inject light into said planar optical guide section in a generally longitudinal direction.

17. The probe for atomic force microscopy as claimed in claim 1 , comprising a motion sensor including a planar optical guide section that is rigidly connected to said shuttle and extends in said transverse direction, as well as two planar optical guides that are arranged on the surface of said substrate and are optically coupled to the opposite ends of said optical guide section, the strength of the coupling depending on the position of the optical guide section in said longitudinal direction.

18. The probe for atomic force microscopy as claimed in claim 1 , including a motion sensor including an optical resonator that is rigidly connected to said shuttle, as well as at least one planar optical guide that is rigidly connected to the substrate and coupled by evanescent wave with said optical resonator, the strength of the coupling depending on the position of the shuttle, and hence of the optical resonator, with respect to said planar optical guide, in said longitudinal direction.

19. The probe for atomic force microscopy as claimed in claim 1 , wherein the shape of at least one said support structure is elongate with hairpin turns.

20. An atomic force microscope comprising at least one probe as claimed in claim 1 .

21. The atomic force microscope as claimed in claim 20 , also comprising:
a light source that is configured to generate a light beam directed toward a region of the surface of a sample that is interacting with the tip for atomic force microscopy of said probe; and
a system for detecting the light of said beam that is scattered through interaction with the surface of said sample and said tip.

22. The atomic force microscope as claimed in claim 20 , also comprising a conductive tip that is arranged to come into contact with a region of the surface of a sample in proximity to the tip for atomic force microscopy of said probe.

Assignees

• Centre Nat Rech Scient
• Vmicro

Inventors

• Walter Benjamin
• Faucher Marc

Classifications

• G01Q60/38

  Probes, their manufacture, or their related instrumentation, e.g. holders · CPC title

• G01Q70/10

  Shape or taper · CPC title

• G01Q20/04

  Self-detecting probes, i.e. wherein the probe itself generates a signal representative of its position, e.g. piezoelectric gauge · CPC title

• G01Q60/22

  Probes, their manufacture, or their related instrumentation, e.g. holders · CPC title

• G01Q60/58

  SThM [Scanning Thermal Microscopy] or apparatus therefor, e.g. SThM probes · CPC title