Semiconductor device and method of producing a semiconductor device

Patent metadata

Field	Value
Publication number	US-10519034-B2
Application number	US-201815875635-A
Country	US
Kind code	B2
Filing date	Jan 19, 2018
Priority date	Jan 20, 2017
Publication date	Dec 31, 2019
Grant date	Dec 31, 2019

Abstract

A method of producing a semiconductor device includes providing a carrier structure having a semiconductor substrate; applying or introducing a precursor substance onto or into the carrier structure, treating the precursor substance for producing a porous matrix structure; introducing a functionalization substance into the porous matrix structure.

First claim

The invention claimed is:

1. A method of producing a semiconductor device, comprising:
providing a carrier structure comprising a semiconductor substrate;
applying or introducing a precursor substance onto or into the carrier structure, wherein the precursor substance comprises aluminum;
patterning the aluminum to produce a matrix structure area and a contact area;
treating the precursor substance by selectively applying a voltage to the matrix structure area for producing a porous matrix structure of aluminum oxide by anodic oxidation while the contact area is not oxidized;
introducing a functionalization substance into the porous matrix structure.

2. The method as claimed in claim 1 , the method comprising applying a passivation layer following application of the precursor substance and prior to treating of the precursor substance, the precursor substance being partly covered by the passivation layer applied.

3. The method as claimed in claim 1 , wherein the precursor substance is applied onto the semiconductor substrate, an oxide layer of the carrier structure,
a nitride layer of the carrier structure, or a semiconductor layer of the carrier structure.

4. The method as claimed in claim 1 , wherein the functionalization substance is based on a triphenylmethane dye, an azo dye, a stilbene dye, ORMOCER®s, a quaternary ammonium compound, or a metal complex.

5. A method of producing a semiconductor device, comprising:
providing a carrier structure comprising a semiconductor substrate;
applying or introducing a precursor substance onto or into the carrier structure;
treating the precursor substance for producing a porous matrix structure;
introducing a functionalization substance into the porous matrix structure,
wherein the functionalization substance is configured to perform bonding with a further porous matrix structure, said further porous matrix structure also being loaded with the functionalization substance.

Assignees

• Fraunhofer Ges Forschung

Inventors

• Trupp Sabine
• Henfling Michael
• Neumeier Karl

Classifications

• G01N33/0027

  concerning the detector · CPC title

• B81C1/00206 Primary

  Processes for functionalising a surface, e.g. provide the surface with specific mechanical, chemical or biological properties · CPC title

• B81C2201/0114

  Electrochemical etching, anodic oxidation · CPC title

• B81B2201/0214

  Biosensors; Chemical sensors · CPC title

• B81C2201/016

  Passivation · CPC title