Amalgamated cover ring

Patent metadata

Field	Value
Publication number	US-10515843-B2
Application number	US-201615371849-A
Country	US
Kind code	B2
Filing date	Dec 7, 2016
Priority date	Dec 7, 2015
Publication date	Dec 24, 2019
Grant date	Dec 24, 2019

Abstract

The present disclosure generally relates to generally relates to equipment for performing semiconductor device fabrication, and more particularly, to a cover ring for partially covering a surface of a substrate support in high-density plasma chemical vapor deposition processing. In one embodiment, the cover ring may include an annular body, an inner support block with a beveled first edge for stability, one or more thermal breaks to increase thermal movement towards the outer diameter, a rounded shoulder to prevent particle deposition, an outer lip configured to a substrate support pedestal, a vertical appendage to support the substrate, and a thermally conductive coating disposed on the annular ring to direct thermal conductivity towards the outer edge of the ring and prevent particle accumulation.

First claim

The invention claimed is:

1. A cover ring, comprising:
an annular body having a first surface, a second surface substantially parallel to the first surface, an inner edge, and an outer edge;
a support block extending from the annular body and defining at least a portion of the second surface, wherein the inner edge forms a portion of the support block and the support block has a beveled edge extending from the inner edge of the annular body to the second surface of the annular body;
one or more thermal breaks formed on the annular body adjacent to and radially outward from the support block;
a rounded shoulder extending from the first surface of the annular body to the outer edge of the annular body;
a lip disposed proximate the outer edge and extending downward from the rounded shoulder, the lip having a bottom surface, wherein a first vertical distance from the bottom surface to the first surface is less than a second vertical distance from the first surface to the second surface;
a groove formed in the annular body adjacent the lip, wherein the groove is disposed between the outer edge and the one or more thermal breaks;
a vertical appendage comprising a third surface extending from the first surface away from the second surface and substantially parallel to the inner edge, a fourth surface orthogonal and connected to the inner edge, and a beveled edge extending downward from the third surface to the fourth surface; and
a thermally conductive coating disposed on the second surface of the annular body.

2. The cover ring of claim 1 , wherein the thermally conductive coating is disposed on a first portion of the second surface defined by the support block.

3. The cover ring of claim 1 , wherein the thermally conductive coating is disposed on a first portion of the second surface defined by the support block and a second portion of the second surface disposed between the groove and the one or more thermal breaks.

4. The cover ring of claim 1 , wherein the lip comprises a fifth surface extending from the outer edge to the groove, and wherein a first distance from the first surface to the fifth surface is less than a second distance from the first surface to the second surface.

5. The cover ring of claim 1 , wherein the cover ring is made of aluminum nitride.

6. The cover ring of claim 1 , wherein the vertical appendage is a continuous ring.

7. A cover ring, comprising:
an annular body having a first surface, a second surface substantially parallel to the first surface, an inner edge, and an outer edge;
a support block extending from the annular body and defining at least a portion of the second surface, wherein the support block has a beveled edge extending from the inner edge of the annular body to the second surface of the annular body;
one or more thermal breaks formed on the annular body adjacent to and radially outward from the support block;
a rounded shoulder extending from the first surface of the annular body to the outer edge of the annular body;
a lip disposed proximate the outer edge and extending downward from the rounded shoulder, the lip having a bottom surface, wherein a first vertical distance from the bottom surface to the first surface is less than a second vertical distance from the first surface to the second surface;
a groove formed in the annular body adjacent the lip, wherein the groove is disposed between the outer edge and the one or more thermal breaks;
a vertical appendage comprising a third surface extending from the first surface away from the second surface and substantially parallel to the inner edge, a fourth surface orthogonal and connected to the inner edge, and a beveled edge disposed between the third surface and the fourth surface; and
a thermally conductive coating disposed on the first surface and the second surface of the annular body.

8. The cover ring of claim 7 , further comprising one or more protrusions extending from the first surface of the annular body.

9. The cover ring of claim 7 , wherein the thermally conductive coating is disposed on the first surface of the annular body between the vertical appendage and the rounded shoulder.

10. The cover ring of claim 7 , wherein the thermally conductive coating is a diamond-like carbon material.

11. The cover ring of claim 7 , wherein the rounded shoulder is disposed at an angle of about 135 degrees, measured on the angle formed by the outer edge and the rounded shoulder.

12. The cover ring of claim 7 , wherein the annular body is aluminum nitride.

13. The cover ring of claim 7 , wherein the one or more thermal breaks extend from the second surface of the annular body.

14. A cover ring, comprising:
an annular body having a first surface, a second surface substantially parallel to the first surface, an inner edge, and an outer edge;
a support block extending from the annular body and defining at least a portion of the second surface, wherein the support block has a beveled edge extending from the inner edge of the annular body to the second surface of the annular body;
one or more thermal breaks formed on the annular body adjacent to and radially outward from the support block;
a rounded shoulder extending from the first surface of the annular body to the outer edge of the annular body;
a lip disposed proximate the outer edge and extending downward from the rounded shoulder, the lip having a bottom surface, wherein a first vertical distance from the bottom surface to the first surface is less than a second vertical distance from the first surface to the second surface;
a groove formed in the annular body adjacent the lip, wherein the groove is disposed between the outer edge and the one or more thermal breaks;
a vertical appendage comprising a third surface extending from the first surface away from the second surface and substantially parallel to the inner edge, a fourth surface orthogonal and connected to the inner edge, and a beveled edge disposed between the third surface and the fourth surface;
a thermally conductive coating disposed on the second surface of the annular body; and
one or more protrusions disposed on the first surface of the annular body.

15. The cover ring of claim 14 , wherein the one or more thermal breaks are bumps protruding outward from the annular body.

16. The cover ring of claim 15 , wherein the one or more protrusions on the first surface of the annular body have a wave profile.

17. The cover ring of claim 14 , wherein the rounded shoulder is disposed at an angle between about 130 degrees and about 140 degrees, measured on the angle formed by the outer edge and the rounded shoulder.

18. The cover ring of claim 14 , wherein the thermally conductive coating is a diamond-like carbon material.

19. The cover ring of claim 14 , wherein the vertical appendage extends from the first surface of the annular body and defines a circumference of an inner diameter of the annular body.

20. The cover ring of claim 14 , wherein the vertical appendage extending from the first surface of the annular body comprises one or more discontinuous posts circumferentially spaced about 90 degrees apart.

Assignees

• Applied Materials Inc

Inventors

• Raj Govinda
• Panavalappil Kumarankutty Hanish Kumar
• Wu Stanley

Classifications

• H10P72/7616

  characterised by a coating, a hardness or a material · CPC title

• H10P72/7611 Primary

  characterised by edge profile or support profile · CPC title

• H10P72/7606 Primary

  characterised by edge clamping, e.g. clamping ring · CPC title

• H01L21/68721 Primary

  Electricity · mapped topic

• H01L21/68757

  Electricity · mapped topic