Optical systems fabricated by printing-based assembly

Patent metadata

Field	Value
Publication number	US-10504882-B2
Application number	US-201715402723-A
Country	US
Kind code	B2
Filing date	Jan 10, 2017
Priority date	Jan 17, 2007
Publication date	Dec 10, 2019
Grant date	Dec 10, 2019

Abstract

Provided are optical devices and systems fabricated, at least in part, via printing-based assembly and integration of device components. In specific embodiments the present invention provides light emitting systems, light collecting systems, light sensing systems and photovoltaic systems comprising printable semiconductor elements, including large area, high performance macroelectronic devices. Optical systems of the present invention comprise semiconductor elements assembled, organized and/or integrated with other device components via printing techniques that exhibit performance characteristics and functionality comparable to single crystalline semiconductor based devices fabricated using conventional high temperature processing methods. Optical systems of the present invention have device geometries and configurations, such as form factors, component densities, and component positions, accessed by printing that provide a range of useful device functionalities. Optical systems of the present invention include devices and device arrays exhibiting a range of useful physical and mechanical properties including flexibility, shapeability, conformability and stretchablity.

First claim

We claim:

1. A semiconductor system, comprising:
a substrate having a receiving surface, wherein the substrate comprises glass or polymer; and
a plurality of separate and individual crystalline semiconductor elements,
wherein the semiconductor elements are provided on the receiving surface of the substrate in a regular array with a density greater than or equal to five semiconductor elements per millimeter,
wherein the separate and individual crystalline semiconductor elements are non-native to the substrate, and
wherein the separate and individual crystalline semiconductor elements have a length and a width in a direction parallel to the receiving surface greater than a thickness in a direction orthogonal to the receiving surface.

2. The semiconductor system of claim 1 , wherein the semiconductor elements are provided on the receiving surface of the substrate with a density greater than or equal to fifty semiconductor elements per millimeter.

3. The semiconductor system of claim 1 , wherein the semiconductor elements are provided on the receiving surface of the substrate with a density greater than or equal to one hundred semiconductor elements per millimeter.

4. The semiconductor system of claim 1 , wherein each of the semiconductor elements has at least a length or width physical dimension less than or equal to 200 microns.

5. The semiconductor system of claim 1 , wherein each of the semiconductor elements has at least a length or width physical dimension less than or equal to 2 microns.

6. The semiconductor system of claim 1 , wherein each of the semiconductor elements has at least a length or width physical dimension less than or equal to 0.5 microns.

7. The semiconductor system of claim 1 , wherein each of the semiconductor elements has at least a thickness physical dimension less than or equal to 100 microns.

8. The semiconductor system of claim 1 , wherein each of the semiconductor elements has at least a thickness physical dimension less than or equal to 10 microns.

9. The semiconductor system of claim 1 , wherein each of the semiconductor elements has at least a thickness physical dimension less than or equal to 1 micron.

10. The semiconductor system of claim 1 , wherein the positions of the semiconductor elements are separated by less than or equal to 10 microns.

11. The semiconductor system of claim 1 , wherein the positions of the semiconductor elements are longitudinally aligned to each other.

12. The semiconductor system of claim 1 , wherein the lengths of the semiconductor elements are parallel to within 3 degrees.

13. The semiconductor system of claim 1 , wherein the semiconductor system is an optical system.

14. The semiconductor system of claim 13 , wherein the optical system is a light-emitting system, a light-collecting system, or a light-sensing system.

15. The semiconductor system of claim 1 , wherein the semiconductor element is a light-emitting diode (LED), a laser, a solar cell, a sensor, a diode, a transistor, or a photodiode.

16. The semiconductor system of claim 1 , further comprising an adhesive layer on the receiving surface to adhere the semiconductor elements to the substrate.

17. The semiconductor system of claim 1 , further comprising a first and second electrodes provided on the receiving surface, wherein the semiconductor elements are in electrical contact with at least one of the first and second electrodes, and wherein the semiconductor elements provide a fill factor between the first and second electrodes greater than or equal to 10%.

18. The semiconductor system of claim 1 , further comprising a first and second electrodes provided on the receiving surface, wherein the semiconductor elements are in electrical contact with at least one of the first and second electrodes, and wherein the semiconductor elements provide a fill factor between the first and second electrodes greater than or equal to 50%.

19. A method of making a semiconductor system, comprising:
providing a substrate having a receiving surface, wherein the substrate comprises glass or polymer;
providing a plurality of separate and individual printable crystalline semiconductor elements on an inorganic semiconductor source wafer, wherein the crystalline semiconductor elements have a length and a width in a direction parallel to a receiving surface greater than a thickness in a direction orthogonal to the receiving surface; and
dry transfer contact printing the printable crystalline semiconductor elements from the source wafer to the receiving surface of the substrate thereby providing separate and individual printed crystalline semiconductor elements to the receiving surface of the substrate with a density greater than or equal to five semiconductor elements per millimeter, wherein the printed crystalline semiconductor elements are non-native to the substrate.

Assignees

• Univ Illinois
• Semprius Inc
• X Celeprint Ltd

Inventors

• Rogers John
• Nuzzo Ralph
• Meitl Matthew
• Menard Etienne
• Baca Alfred
• Motala Michael
• Ahn Jong-Hyun
• Park Sang-Il
• Yu Chang-Jae
• Ko Heung Cho
• Stoykovich Mark
• Yoon Jongseung

Classifications

• H10P95/00

  Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass · CPC title

• H10W72/0198

  batch processes · CPC title

• H10W72/00

  Interconnections or connectors in packages · CPC title

• H10W72/07307

  the auxiliary member being a temporary substrate, e.g. a removable substrate · CPC title

• H10W72/0711

  Apparatus therefor · CPC title