Method for producing nitride single crystal using nitrogen-containing solvent, mineralizer having fluorine atom, and raw material

Patent metadata

Field	Value
Publication number	US-10501865-B2
Application number	US-201815908911-A
Country	US
Kind code	B2
Filing date	Mar 1, 2018
Priority date	Mar 29, 2012
Publication date	Dec 10, 2019
Grant date	Dec 10, 2019

Abstract

A first object of the present invention is to provide a method for efficiently growing a nitride single crystal even under low pressure conditions. The present invention relates to a method for producing a nitride single crystal, comprising growing a nitride crystal on the surface of a seed crystal having a hexagonal crystal structure by setting a pressure in a reaction vessel having the seed crystal, a nitrogen-containing solvent, a mineralizer containing a fluorine atom, and a raw material placed therein to 5 to 200 MPa and performing control so that the nitrogen-containing solvent is in at least either a supercritical state or a subcritical state.

First claim

The invention claimed is:

1. A method for producing a nitride single crystal, the method comprising:
growing a nitride crystal on a seed crystal having a hexagonal crystal structure and having a C-plane as a principal plane in a reaction vessel comprising therein the seed crystal, a nitrogen-containing solvent, a mineralizer comprising a fluorine atom, and a raw material, at a pressure in the reaction vessel of 20 to 200 MPa with the nitrogen-containing solvent in at least one of a supercritical state and a subcritical state,
wherein in the reaction vessel, the temperature of a region where the raw material is dissolved is lower than the temperature of a region where the nitride crystal is grown on the seed crystal.

2. The method for producing a nitride single crystal according to claim 1 , wherein a temperature at which the nitride crystal is grown on the seed crystal is 700° C. or lower.

3. The method for producing a nitride single crystal according to claim 1 , wherein a temperature at which the nitride crystal is grown on the seed crystal is 650° C. or lower.

4. The method for producing a nitride single crystal according to claim 1 , wherein the pressure in the reaction vessel is 20 to 177 MPa.

5. The method for producing a nitride single crystal according to claim 1 , wherein the temperature of the region where the raw material is dissolved is lower than the temperature of the region where the nitride crystal is grown on the seed crystal by 30° C.-150° C.

6. The method for producing a nitride single crystal according to claim 1 , wherein the nitride crystal comprises GaN, the seed crystal comprises GaN, and the raw material comprises GaN.

7. The method for producing a nitride single crystal according to claim 1 , wherein the nitrogen-containing solvent comprises ammonia.

8. The method for producing a nitride single crystal according to claim 1 , wherein the mineralizer comprises at least one selected from ammonium fluoride and gallium fluoride.

9. The method for producing a nitride single crystal according to claim 1 , wherein the reaction vessel further comprises a mineralizer comprising a halogen atom other than a fluorine atom.

10. The method for producing a nitride single crystal according to claim 1 , wherein the reaction vessel is an autoclave.

11. The method for producing a nitride single crystal according to claim 1 , wherein the reaction vessel is a platinum-lined autoclave.

12. A method for producing a GaN single crystal, the method comprising:
growing a GaN crystal on a seed crystal comprising GaN and having a C-plane as a principal plane in a reaction vessel comprising therein the seed crystal, a nitrogen-containing solvent comprising ammonia, a mineralizer comprising a fluorine atom, and a raw material comprising GaN, at a pressure in the reaction vessel of 20 to 200 MPa with the nitrogen-containing solvent in at least one of a supercritical state and a subcritical state,
wherein in the reaction vessel, the temperature of a region where the raw material is dissolved is lower than the temperature of a region where the GaN crystal is grown on the seed crystal.

13. The method for producing a GaN single crystal according to claim 12 , wherein a temperature at which the GaN crystal is grown on the seed crystal is 700° C. or lower.

14. The method for producing a GaN single crystal according to claim 12 , wherein a temperature at which the nitride crystal is grown on the seed crystal is 650° C. or lower.

15. The method for producing a GaN single crystal according according to claim 12 , wherein the pressure in the reaction vessel is 20 to 177 MPa.

16. The method for producing a GaN single crystal according to claim 12 , wherein the temperature of the region where the raw material is dissolved is lower than the temperature of the region where the GaN crystal is grown on the seed crystal by 30° C.-150° C.

17. The method for producing a GaN single crystal according to claim 12 , wherein the mineralizer comprises at least one selected from ammonium fluoride and gallium fluoride.

18. The method for producing a GaN single crystal according to claim 12 , wherein the reaction vessel further comprises a mineralizer comprising a halogen atom other than a fluorine atom.

19. The method for producing a GaN single crystal according to claim 12 , wherein the reaction vessel is an autoclave.

20. The method for producing a GaN single crystal according to claim 12 , wherein the reaction vessel is a platinum-lined autoclave.

21. The method for producing a nitride single crystal according to claim 1 , wherein a temperature at which the nitride crystal is grown on the seed crystal is 500° C. or higher.

22. The method for producing a GaN single crystal according to claim 12 , wherein a temperature at which the nitride crystal is grown on the seed crystal is 500° C. or higher.

Assignees

• Mitsubishi Chem Corp
• Univ Tohoku
• Japan Steel Works Ltd

Inventors

• Ishiguro Tohru
• Bao Quanxi
• Yokoyama Chiaki
• Tomida Daisuke
• Chichibu Shigefusa
• Kayano Rinzo
• Ueda Mutsuo
• Saito Makoto
• Kagamitani Yuji

Classifications

• C30B29/406

  Gallium nitride · CPC title

• C30B29/403

  AIII-nitrides · CPC title

• C30B7/105 Primary

  using ammonia as solvent, i.e. ammonothermal processes · CPC title

• C30B7/14

  the crystallising materials being formed by chemical reactions in the solution · CPC title