Selective surface modification of OTFT source/drain electrode by ink jetting F4TCNQ

Patent metadata

Field	Value
Publication number	US-10490746-B2
Application number	US-201715446516-A
Country	US
Kind code	B2
Filing date	Mar 1, 2017
Priority date	Mar 1, 2017
Publication date	Nov 26, 2019
Grant date	Nov 26, 2019

Abstract

A method and system utilizes ink jetting or printing of surface work function modification material or solution to form modified p-type and/or n-type electrodes. The proposed method is suitable for making complementary OTFT circuits in roll-to-roll fabrication environment.

First claim

What is claimed is:

1. A method of fabricating a complementary top gate Organic Thin Film Transistor (OTFT) comprising:
providing a substrate;
patterning source and drain electrodes for a p-type OTFT and a n-type OTFT on at least one of a buffer layer on the substrate and the substrate itself;
printing, by a printing system, at least one of (i) a first surface work function modifier onto surfaces of the source and drain electrodes for the p-type OTFT and (ii) a second surface work function modifier onto surfaces of the source and drain electrodes for the n-type OTFT, wherein the printing is done selectively and precisely onto the surfaces of the source and drain electrodes without printing on the buffer layer or the substrate;
printing by the printing system, a p-type of semiconductor material into at least a channel region between the source and drain electrodes for the p-type OTFT;
printing by the printing system, an n-type of semiconductor material into at least a channel region between the source and drain electrodes for the n-type OTFT;
forming a dielectric layer over the p-type semiconductor material, the n-type semiconductor material and the source and drain electrodes including at least one of the (i) the modified surfaces of the drain and source electrodes for the p-type OTFT, and (ii) the modified surfaces of the drain and source electrodes for the n-type OTFT; and
forming gate electrodes on a surface of the dielectric layer.

2. The method according to claim 1 further including at least one of (i) wherein only the surfaces of the source and drain electrodes for the p-type OTFT are modified, and (ii) wherein only the surfaces of the source and drain electrodes for the n-type OTFT are modified.

3. The method according to claim 1 further including at least one of (i) wherein only the surfaces of the source and drain electrodes for the p-type OTFT are modified, and (ii) wherein only the surfaces of the source and drain electrodes for the n-type OTFT are modified, and wherein all the electrodes are formed in a same step.

4. The method according to claim 1 further including dissolving the first surface work function modifier into a flowing state, wherein the dissolved first surface work function modifier is configured to modify the surfaces of the source and drain electrodes for the p-type OTFT, and providing at least one of (i) the dissolved first surface work function modifier for the p-type OTFT and (ii) the second surface work function modifier to the printing system.

5. The method according to claim 4 wherein the first surface work function modifier is a F4TCNQ composition.

6. The method according to claim 5 wherein the dissolving of the F4TCNQ composition is accomplished by dissolving 0.1 weight % F4TCNQ in dichlorobenzene.

7. The method according to claim 1 wherein the second surface work function modifier is selected from a group consisting of 4-Methyl (sulfanyl)thiophenol, 4-methoxythiophenol, 4-methylthiophenol, 4-aminothiophenol, and 4-nitrothiophenol nitrothiophenol.

8. The method according to claim 1 further including roughing the surface of at least the buffer layer, prior to the printing system printing at least one of (i) the first surface work function modifier onto the surfaces of the source and drain electrodes for the p-type OTFT, and (ii) the second surface work function modifier onto the surfaces of the source and drain electrodes for the n-type OTFT.

9. The method according to claim 1 wherein the steps forming the complimentary OTFT are undertaken in a roll to roll fabrication process.

10. The method according to claim 1 wherein for efficient charge carrier injection into p-type organic molecules of the p-type material, a work function of the surfaces of the source and drain electrodes for the p-type OTFT are modified to substantially match an energy level of a highest occupied molecular orbital (HOMO) of the p-type organic molecules.

11. The method according to claim 1 wherein for efficient charge carrier injection into n-type organic molecules of the n-type material, a work function of the surfaces of the source and drain electrodes for the n-type OTFT are modified to substantially match an energy level of the lowest unoccupied molecular orbital (LUMO) of the organic molecules of the n-type organic molecules.

12. The method according to claim 1 wherein the printing includes depositing droplets to form a volume in a range of between approximately 100 pL/mm 2 to 10 nL/mm 2 of at least one of (i) the first surface work function modifier and the (ii) second surface work function modifier, on a surface area between approximately 100 pL/mm 2 to 10 nL/mm 2 ) of at least one of (i) the source and drain electrodes for the p-type OTFT, and (ii) the source and drain electrodes for the n-type OTFT.

13. The method according to claim 1 wherein the printing system deposits droplets with a 60 μm to 80 μm jetting nozzle on at least one of (i) the source and drain electrodes for the p-type OTFT, and (ii) the source and drain electrodes for the n-type OTFT.

14. The method according to claim 1 wherein a nozzle head of the printing system is maintained at a temperature of between 30° C. to 60° C. to maintain the first surface work function, in the form of a F4TCNQ composition in a stable flowing state.

15. The method according to claim 1 further including heating at least one of (i) the printed first surface work function modifier and the surfaces of the source and drain electrodes for the p-type OTFT to form modified surfaces of the source and drain electrodes for the p-type OTFT, and (ii) the printed second surface work function modifier and the surfaces of the source and drain electrodes for the n-type OTFT, to form modified surfaces of the source and drain electrodes for the n-type OTFT.

16. The method according to claim 1 , wherein a step of removal of unwanted surface work function modifier is not required.

17. A method of fabricating a complementary top gate Organic Thin Film Transistor (OTFT) comprising:
providing a substrate;
patterning source and drain electrodes for a p-type OTFT and a n-type OTFT on at least one of a buffer layer on the substrate and the substrate itself;
printing, by a printing system, at least one of (i) a first surface work function modifier onto surfaces of the source and drain electrodes for the p-type OTFT and (ii) a second surface work function modifier onto surfaces of the source and drain electrodes for the n-type OTFT;
printing by the printing system, a p-type of semiconductor material into at least a channel region between the source and drain electrodes for the p-type OTFT;
printing by the printing system, an n-type of semiconductor material into at least a channel region between the source and drain electrodes for the n-type OTFT;
roughing a surface of at least one of the buffer layer and the substrate, prior to the printing system printing at least one of (i) the first surface work function modifier onto the surfaces of the source and drain electrodes for the p-type OTFT, and (ii) the second surface work function modifier onto the surfaces of the source and drain electrodes for the n-type OTFT, wherein the roughing of at least one of the buffer layer and the substrate is accomplished by providing at least one of argon plasma treatment and oxygen treatment to the surface of the buffer layer;
forming a dielectric layer over the p-type semiconductor material, the n-type semiconductor material and the source and drain electrodes including at least one of the (i) the modified surfaces of the drain and source electrod

Assignees

• Palo Alto Res Ct Inc

Inventors

• Mei Ping
• Street Robert A
• Whiting Gregory L
• Kor Sivkheng
• Ready Steven E

Classifications

• H01L51/0022 Primary

  Electricity · mapped topic

• H01L51/105

  Electricity · mapped topic

• H01L27/283

  Electricity · mapped topic

• H10K19/10 Primary

  comprising field-effect transistors · CPC title

• H10K71/611 Primary

  using printing deposition, e.g. ink jet printing · CPC title